臺灣博碩士論文加值系統

這十幾年來，場效應電晶體(FET)一直有被廣泛應用在電學相關領域中。而近年來，離子敏場效電晶體(ISFET)及延伸式閘極場效電晶體(EGFET)也開始應用於生物感測方面的研究，而延伸式閘極場效電晶體(EGFET) 的化學感測區與電性區分離、封裝較容易、也較具發展成拋棄型元件的可能性。
　　故本篇論文在探討使用EGFET來作為生物感測器，並結合特定酵素膜及固定化的方式來檢測生理機能的變化如基因突變。使用需阻抗值低、導電率高的材料來做為EGFET之導電膜，以溶液凝膠旋轉塗佈的方式來沉積鋅銦氧化層。經由實驗找出鋅銦氧化層的濃度有著最大靈敏度59.18(mV/pH)、最小遲滯現象-4.24(mV)。這表示感測膜靈敏度高且操作穩定度也高，接著我們在感測膜上固定正常基因與突變基因，使用GPTES作為固定化技術，接著去測定有無突變基因的電量變化，結果明顯分辨出正常序列與突變基因的差異，未來希望以提升準確度跟分析誤差率為目標，希望能在生物感測方面有更多延伸應用。

In recent ten years, field-effect transistors (FET) have been widely used in electrical related area of study.Ion sensitive field effect transistors (ISFET) and extended gate field effect transistors (EGFET) have also begun to be used in research of biosensors. Because the EGFET was considered that have some advantages such as that chemical sensing zone is separated from electrical zone, the package is easier,and it is possible to develop into a disposable component.
Therefore, this paper explores to use EGFETs as biosensors, combined with specific enzyme membranes and immobilization methods to detect genetic mutations. A material having a low resistance value and a high conductivity is used as a conductive film of the EGFET, and a zinc indium oxide layer is deposited by sol-gel spin coating.Through experiments, the concentration of zinc-indium oxide layer was found to have high sensitivity 59.18(mV/pH), and hysteresis-4.24(mV) . This indicates that the sensitivity of the sensing membrane is high and the operational stability is also high. Then we fixed the normal gene and the mutated gene on the sensing membrane, using GPTES as the immobilization technique, and then measuring the change of the mutated gene, and the result clearly distinguishes the difference between the normal sequence and the mutated gene. In the future, we hope to improve the accuracy and analysis the sensing error rate, and hope to have more extended applications for biomedical sensors

Contents
指導教授推薦書
口試委員會審定
誌謝 iii
中文摘要 iv
英文摘要 v
Chapter 1 Introduction - 1 -
1.1 Background - 1 -
1.2 Motivation and objective - 3 -
1.3 EGFET - 5 -
Chapter 2 Theory Description - 6 -
2.1 Introduction of ISFET and EGFET - 6 -
2.2 Site binding model - 7 -
2.3 pH-ISFET operation mechanism - 11 -
Chapter 3 Properties of Zn1-xInxOy/ITO/PEN structure as EGFET electrodes - 13 -
3.1 Material - 13 -
3.2 Sol-gel process - 15 -
3.3 Spin coating - 19 -
3.4 The fabrication process of device - 22 -
3.5.1 Sensitivity of sensing membranes - 25 -
3.5.2 Hysteresis characteristics of sensing film - 33 -
3.5.3 Optical characteristics of sensing film - 37 -
Chapter 4 Biosensor applications of EGFET - 39 -
4.1 Introduction of biosensor - 39 -
4.2 Method of immobilization - 41 -
4.3.1. Reagents - 45 -
4.3.2 GLYMO - 46 -
4.3.3 DNA immobilization and experiment flow - 47 -
4.4 Result and discussion - 49 -
Chapter 5 Conclusions and future works - 53 -
5.1 Conclusions - 53 -
5.2 Future works - 54 -
Reference - 55 -


Figure Caption
Chapter 1 Introduction
Fig. 1-1 the schematic representation of the structure of EGFET... - 5 -
Chapter 2 Theory Description
Fig. 2-1 Schematic representation of the site binding model ….... - 12-
Chapter 3 Properties of Zn1-xInxOy/ITO/PEN structure as EGFET electrodes
Fig. 3-1 sol-gel process…………………………………………...- 17 -
Fig. 3-3 the key stages of spin coating process ………………….- 21 -
Fig. 3-4 Relationship between spin speed and film thickness …...- 21 -
Fig. 3-5 The structure and process flow………………………….- 23 -
Fig. 3-6 Actual appearance of the structure………………………- 24 -
Fig. 3-7 Process flow of EGFET sensing membrane…………….- 24 -
Fig.3-8 The VREF-ID characteristics of EGFET with Zn0.9In0.1Oy film………………………………………………………………..- 27 -
Fig.3-9 Sensitivity and linear response of pH sensor…………….- 27 -
Fig.3-10 The VREF-ID characteristics of EGFET with Zn0.85In0.15Oy film………………………………………………………………..- 28 -
Fig.3-11 Sensitivity and linear response of pH sensor…………...- 28 -
Fig.3-12 The VREF-ID characteristics of EGFET with Zn0.8In0.2Oy film………………………………………………………………..- 29 -
Fig.3-13 Sensitivity and linear response of pH sensor…………...- 29 -
Fig.3-14 The VREF-ID characteristics of EGFET with Zn0.7In0.3Oy film………………………………………………………………..- 30 -
Fig.3-15 Sensitivity and linear response of pH sensor………...…- 30 -
Fig.3-16 The VREF-ID characteristics of EGFET with Zn0.6In0.4Oy film………………………………………………………………..- 31 -
Fig.3-17 Sensitivity and linear response of pH sensor…………...- 31 -
Fig.3-18 The VREF-ID characteristics of EGFET with Zn0.5In0.5Oy film………………………………………………………………..- 32 -
Fig.3-19 Sensitivity and linear response of pH sensor…………...- 32 -
Fig. 3-20 hysteresis voltages characteristic of Zn0.9In0.1Oy………- 34 -
Fig. 3-21 hysteresis voltages characteristic of Zn0.85In0.15Oy…….- 34 -
Fig. 3-22 hysteresis voltages characteristic of Zn0.8In0.2Oy………- 35 -
Fig. 3-23 hysteresis voltages characteristic of Zn0.7In0.3Oy………- 35 -
Fig. 3-24 hysteresis voltages characteristic of Zn0.6In0.4Oy………- 36 -
Fig. 3-25 hysteresis voltages characteristic of Zn0.5In0.5Oy………- 36 -
Fig. 3-26 Optical characteristics of EGFET……………………...- 38 -
Chapter 4 Biosensor applications of EGFET
Fig. 4-1 The development data for various ISFET-based enzyme biosensors……………………………………………………...…- 43 -
Fig. 4-2 Five different methods of immobilization…………..…..- 44 -
Fig. 4-3 The advantages and disadvantages of immobilization method
……………………………………………………………………- 44 -
Fig. 4-4 the structural formula of (3-glycidoxypropyl) –trimethoxynonane…… ………………………………………..…- 46 -
Fig. 4-5 The scheme of the elementary activation reaction…..….- 48 -
Fig. 4-6 The detection result of sample A………….………….…- 50 -
Fig. 4-7 The fluorescent image of sample A……………………..- 50 -
Fig. 4-8 The detection result of sample B………………………..- 51 -
Fig. 4-9 The fluorescent image of sample B……………………..- 51 -
Fig. 4-10 The detection result of sample C……………………….- 52 -
Fig. 4-11 The fluorescent image of sample C…………………….- 52 -

Figure Caption

Table. 3-1 Chart classifying five different types of gels that are relevant in sol-gel synthesis of materials…………………………- 18 -
Table. 3-2 Different concentrations correspond to sensitivity and hysteresis………………………………………………………….- 38 -

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