臺灣博碩士論文加值系統

由於國內顯示器產業蓬勃發展，傳統加工系統不敷需求，致使UV雷射加工系統需求增加，而為確保加工精度，必須仰賴即時監測系統之架設。本研究在設計「雷射同軸視覺檢測模組鏡頭」，期能滿足大面積加工過程中所需將加工過程忠實反映在監視系統上的需求。

本研究利用ZEMAX光學設計軟體先行模擬檢測模組鏡頭與掃描F/θ鏡頭，並且計算出符合本研究初步光學主要規格的成像品質(MTF>=0.3 @ 40lp/mm)，輔以實驗佐證之。本研究所完成之成果包括掃描鏡頭設計及分析、可見光雷射同軸視覺檢測模組鏡頭設計及分析、可見光雷射同軸視覺檢測模組鏡頭市售品與355nm掃描鏡頭之成像解析度測試，及多重組態可見光雷射同軸視覺檢測模組鏡頭設計。

Owing to the blooming of display industry and the low quality of traditional manufacturing process，the demanding of UV laser manufacture system is increasing. In order to maintain the precision of manufactures, it is necessary to set up the real time monitoring imaging system. The object of this research is to design a coaxial laser scanning and visual inspection imaging lens to monitor the real time image, which is made by the scanning F/ lens for large scale micro lithography.
The procedure is to simulate an F/ lens and an imaging lens to meet the initial specification by using Zemax software, and to mock up the image performance with experiment.
The initial specification of the coaxial laser scanning and visual inspection imaging lens is listed as follows:

? CCD FOV : 1.6mm * 1.2mm
? CCD Mag : 4X
? Image MTF > =0.3 (@40 lp/mm) (@ 50mm*50mm)

The achievements of this research are
(1) Design of F-Theta Lens for wavelength 355nm, (2) Design of the
coaxial laser scanning and visual inspection imaging lens, (3) Finished the experiment for commercial lens mock-up, and (4) Design of the coaxial laser scanning and visual inspection imaging lens for multi- configuration scanning .

摘要………………………………………………………………… i

Abstract……………………………………………………………… ii

誌謝………………………………………………………………… iii

目錄………………………………………………………………… iv

圖目錄……………………………………………………………… vii

表目錄……………………………………………………………… xiii


第一章 緒論……………………………………………………… 1
1.1前言……………………………………………………… 1
1.2研究動機與目的………………………………………… 2
1.3論文架構………………………………………………… 4
第二章 相關基礎理論…………………………………………… 5
2.1視覺檢測系統…………………………………………… 5
2.1.1光源………………………………………………… 7
2.1.2CCD(Charge Coupled Device) …………………… 10
2.1.3光學鏡頭…………………………………………… 13
2.2成像鏡頭光學系統設計之原理………………………… 13
2.2.1幾何光學定義和光線追跡………………………… 14
2.3像差與調變轉換函數…………………………………… 17
2.3.1像差………………………………………………… 17
2.3.2調變轉換函數……………………………………… 28
第三章 雷射同軸視覺檢測模組鏡頭之設計…………………… 32
3.1研究方法…………………………………………………… 32
3.2理論依據…………………………………………………… 33
3.2.1一階成像…………………………………………… 33
3.2.2三階像差…………………………………………… 34
3.3進行步驟…………………………………………………… 35
第四章 雷射同軸視覺檢測模組鏡頭之實驗與設計成果……… 38
4.1設計規格…………………………………………………… 38
4.2設計成果…………………………………………………… 39
4.3縮小系統尺寸……………………………………………… 40
4.4評估市售檢測模組鏡頭…………………………………… 41
4.5實驗步驟及結果…………………………………………… 42
4.6兩片型鏡頭設計及製作…………………………………… 52
4.7多重組態掃描設定………………………………………… 55
4.8設計成果…………………………………………………… 73
第五章 公差分析………………………………………………… 76
5.1公差分析流程……………………………………………… 77
5.2雷射同軸視覺檢測模組鏡頭公差分析…………………… 78
5.2.1靈敏度分析………………………………………… 78
5.2.2誤差平方加總根號值分析………………………… 79
5.2.3蒙地卡羅分析……………………………………… 80
第六章 結論與未來展望………………………………………… 84
參考文獻…………………………………………………………… 86

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