臺灣博碩士論文加值系統

本篇論文研究中是以微波電漿輔助化學氣相沈積法，成長超微奈米鑽石薄膜並製作超微奈米鑽石平面場發射元件。我們使用不同的機台參數來成長鑽石薄膜，使新的機台達到穩定的狀態，並探討其電子場發射特性。實驗中發現，成長超奈米鑽石薄膜以及微米鑽石薄膜，分別在功率120 W、壓力130 torr以及功率120 W、壓力80 torr時，其表面型態和拉曼檢測結果最好，且機台相對較穩定。另外，進而使用兩種參數長成的複合鑽石薄膜，其電子場發射特性也較佳。
待至機台穩定，且找出較佳的成長參數後，則選定其組合參數，製作微奈米複合鑽石薄膜為陰極材料的鑽石平面場發射元件。為了降低製作成本，本研究首先將以雙面拋光矽片為基板，成長完鑽石薄膜的試片，利用陽極接合儀器和Pyrex 7740玻璃接合在一起，以取代昂貴的SOI矽片；接著再利用犧牲層結構來製作出實驗需要的兩極結構，並討論不同幾何結構對元件場發射特性的影響，另外也藉由改變針尖之間的間距以及針尖的角度銳、鈍，來觀察電流大小和電流密度的變化。
最終利用了簡單有效的製程，且得到當元件擁有適當的針尖高度和兩極距離，其針尖距離約為24 μm的結構配置有最佳的場發射特性，起始電場為46 V/μm，可達最大電流為39.5 μA(208.4 mA/cm2)。

Abstract II
致謝 II
目 錄 VII
表目錄 X
圖目錄 XI
第1章 前言 1
1.1研究背景 1
1.2研究動機 2
第2章 文獻回顧 5
2.1鑽石薄膜的結構與特性 5
2.1.1鑽石薄膜的分類 5
2.1.2鑽石的基本材料特性 9
2.2鑽石薄膜的成核理論與合成方法 12
2.2.1鑽石薄膜的成核 12
2.2.2鑽石薄膜的合成 15
2.3電子場發射理論 19
2.3.1場發射基礎理論 19
2.3.2陰極發射端尺寸效應 22
2.3.3場發射遮蔽效應 24
2.3.4鑽石的負電子親和力 29
第3章 研究方法及實驗步驟 30
3.1陰極發射端製作 30
3.1.1實驗流程 30
3.1.2鑽石薄膜合成 31
3.1.3微波電漿輔助化學氣相沈積系統生長薄膜參數測試 33
3.1.4微波電漿輔助化學氣相沈積系統操作過程及介紹 35
3.1.5光罩設計 37
3.2元件製作 38
3.3薄膜及元件之各項特性分析 39
3.3.1場發射掃描電子顯微鏡分析 39
3.3.2拉曼分析 40
3.3.3四點探針表面電性分析 42
3.3.4電子場發射特性分析 42
第4章 結果與討論 44
4.1微波電漿輔助化學氣相沈積系統穩定實驗 44
4.2UNCD/MCD薄膜之合成及成長於不同尺寸基板的探討 46
4.2.1UNCD/MCD鑽石薄膜測試及特性分析 46
4.2.2薄膜成長於不同基板尺寸的探討 49
4.3場發射元件之兩極結構製程討論 53
4.3.1鑽石薄膜合成 53
4.3.2矽基板與玻璃基板接合 54
4.3.3黃光微影 55
4.3.4金屬、鑽石結構與矽之蝕刻 56
4.3.5Lift-off製程 59
4.4場發射特性分析 60
第5章 結論與未來展望 68
參考文獻 70

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