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研究生:王昊丞
研究生(外文):Hau Cheng Wang
論文名稱:可攜式氫鉀離子感測器
論文名稱(外文):Portable sensor for hydrogen and potassium
指導教授:賴朝松
指導教授(外文):C. S. Lai
學位類別:碩士
校院名稱:長庚大學
系所名稱:電子工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2014
畢業學年度:102
論文頁數:66
中文關鍵詞:氮化鈦延伸式閘極離子場效電晶體可攜式
外文關鍵詞:TiNPotassiumHydrogenEGFETPortable
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  • 點閱點閱:237
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目錄
指導教授推薦書
口試委員審定書
致謝.............................................................................-iii-
摘要.............................................................................-iv-
Abstract........................................................................-v-
目錄............................................................................-vi-
圖目錄...........................................................................-ix-
表目錄...........................................................................-xii-
第一章 簡介.......................................................................-1-
1.1背景與相關研究..................................................................-1-
1.2離子感測場效電晶體理論...........................................................-2-
1.3有機離子選擇薄膜................................................................-6-
1.4智慧型可攜式感測裝置.............................................................-7-
1.5研究動機和方法..................................................................-8-
第二章 氫鉀離子電極製作.............................................................-13-
2.1 TiN/EGFET感測薄膜製備.........................................................-13-
2.2鉀離子感測電極製作..............................................................-14-
2.3量測環境......................................................................-16-
2.4氮化鈦量測分析.................................................................-19-
2.4.1氫離子感測特性...............................................................-19-
2.4.2氮氣比例對電阻影響............................................................-20-
2.4.3氮化鈦快速熱退火處理..........................................................-20-
2.4.4磁滯效應探討................................................................-20-
2.4.5時漂觀察...................................................................-21-
2.5鉀離子選擇薄膜探討.............................................................-21-
第三章 藍芽可攜式裝置設計..........................................................-34-
3.1恆壓恆流電路..................................................................-34-
3.1.1恆壓恆流電路簡介.............................................................-34-
3.1.2恆壓恆流電路量測結果..........................................................-35-
3.2智慧型藍芽電路設計..............................................................-36-
3.2.1前言.......................................................................-36-
3.2.2微控制晶片..................................................................-36-
3.2.3數位轉類比設定...............................................................-37-
3.2.4藍芽通訊晶片.................................................................-38-
3.3.5串列通訊協定.................................................................-38-
3.2.6 Msp430韌體流程.............................................................-40-
3.3電腦人機介面...................................................................-40-
3.3.1 LabVIEW簡介................................................................-40-
3.3.2人機介面設計..................................................................-41-
第四章結論........................................................................-52-
參考文獻..........................................................................-53-
圖目
圖1-1離子場效電晶體結構..............................................................-9-
圖1-2延長式閘極離子感測電晶體.........................................................-9-
圖1-3鉀離離有機離子選擇電極..........................................................-10-
圖1-4鍵結理論示意圖.................................................................-10-
圖1-5 valinomycin分子架構圖........................................................-11-
圖1-6 K-TpClPB分子結構圖...........................................................-11-
圖1-7 Agilent B1500 A半導體裝置分析儀...............................................-12-
圖1-8 恆壓恆流電路.................................................................-12-
圖2-1氫離子感測電極製作流程圖........................................................-22-
圖2-2氫離子感測電極................................................................-22-
圖2-3 CD4007 腳位圖...............................................................-23-
圖2-4鉀離子感測電極製作流程圖........................................................-23-
圖2-5鉀離子感測電極................................................................-24-
圖2-6不同氮氣比例對氫離子感測圖......................................................-24-
圖2-7不同氮氣比例之Ids-Vgs特性曲線圖.................................................-25-
圖2-8不同氮氣比例之Vgs-pH圖........................................................-26-
圖2-9不同氮氣比例對氫離子線性圖......................................................-27-
圖2-10氮氣比例與片電阻增加率比較.....................................................-27-
圖2-11氮氣比例與片電阻和感測度比較...................................................-28-
圖2-12不同N2比例之XPS比較.........................................................-28-
圖2-13 N2 ratio 20%快速熱退火.....................................................-29-
圖2-14 N2 ratio 20%快速熱退火之XPS比較圖...........................................-29-
圖2-15 N2 ratio 20%氮化鈦之酸性迴圈的磁滯圖.........................................-30-
圖2-16 N2 ratio 20%氮化鈦之鹼性迴圈的磁滯圖.........................................-30-
圖2-17 N2 ratio 20%氮化鈦之時漂圖.................................................-31-
圖2-18鉀離子選擇薄膜量測pK之(a)Ids-Vgs圖與(b)Vgs-pK圖...............................-31-
圖2-19鉀離子選擇薄膜量測pK之(a)Ids-Vgs圖與(b)Vgs-pK圖...............................-32-
圖2-20鉀離子選擇薄膜量測pH之Ids-Vgs圖與Vgs-pH圖.....................................-32-
圖3-1 CVCC電路..................................................................-43-
圖3-2氮化鈦結合CVCC量測結果........................................................-43-
圖3-3氮化鈦從B1500A萃取出pH-Vgs圖..................................................-44-
圖3-4鉀離子選擇電極結合CVCC量測結果..................................................-44-
圖3-5可攜式無線藍芽電路架構圖........................................................-45-
圖3-6 msp430腳位圖................................................................-45-
圖3-7 Msp430類比轉數位之暫存器......................................................-46-
圖3-8 Bluetooth晶片...............................................................-46-
圖3-9 UART暫存器..................................................................-47-
圖3-10 串列通訊傳遞方式.............................................................-47-
圖3-11 串列通訊傳遞順序.............................................................-48-
圖3-12 韌體傳輸圖圖................................................................-48-
圖3-13 軟體設計流程................................................................-49-
圖3-14 校正溶液步驟................................................................-49-
圖3-15 無線藍芽量測介面.............................................................-50-
圖3-16 藍芽系統與pH meter比較......................................................-50-
圖3-17藍芽系統量測自配pK溶液........................................................-51-
表目錄
表2-1氮化鈦製程參數................................................................-33-
表2-2 N2 ratio 20%快速熱退火各種溫度比較表...........................................-33-
表3-1鮑率對照表...................................................................-51-











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