臺灣博碩士論文加值系統

本研究將大型傳統氣相層析儀系統製作至76 mm x 26 mm的微流體甲醇應用晶片。利用黃光微影製程製作出微流道，將管柱的概念放入晶片內，經由填充製造出具有分離效果的晶片，應用氮氣將氣體推動，最後使用火焰離子化偵測器，將經過晶片的檢測品導入，偵測電子訊號。
本研究主要針對酒類內的甲醇做檢測，其主要優勢有下列:(1)快速檢測時間，(2)體積小易於操作，(3)便於攜帶，減少地方性限制。利用晶片將酒類快速做分離，以便於快速檢測甲醇含量，最後本實驗針對楊桃酒、蓮霧酒、清酒、荔枝酒及白葡萄酒進行檢測，所獲得濃度與傳統氣相層析儀比較，準確度達90%以上。

This experiment replaces the traditional Gas Chromatography system with a 76 mm x 26 mm microfluidic chip that detects methanol concentration. The chip is processed by using the Photolithography process. Using nitrogen, the samples are then pushed through the microfluidic channel, and are detected by using electronic pulses from Flame ionization detector.
The purpose of this experiment is to detect the methanol concentration from different samples of alcohols. Compared to the traditional method, the microfluidic chip has many advantages, such as the time required for the detection, the simplicity to operate due to the size, and the portability, which resolves many restrictions. Using a microchip is an express method to make liquor separation of methanol content. The final aim of our study carambola wine, wax apple wine, sake, lychee wine and white wine were detected concentration obtained compared with conventional gas chromatograph, has a 90% or more accuracy.

摘要………………………...………………………………….........................I
Absteact…………………………...…………………………………….……II
致謝………………………………...………………………………………..III
目錄…………………………………...………………………………..……IV
圖目錄………………………………..……………………………….....…VI
表目錄…………………………………..……………………………….….IX
簡寫說明………………………………..……………………………….X
符號說明…………………………………..……………………………...XI
第1章 緒論……………………………..…...………….…..………………1
1.1 前言………………………………...……………………………….1
1.2 微機電系統…………………………..…………………………….1
1.3 研究動機與目的……………………..………………………….…3
第2章 文獻回顧…………………………..……………………………...…4
2.1 微機電系統…………………………..…………………………….4
2.2 化學試藥……………………………..…………………………….5
2.2.1 甲醇…………………………..…..…………………………5
2.2.1 乙醇…..……………………………………………………..5
2.3 甲醇傳統檢測法………..………………………………………….5
2.4 氣相層析系統……………..……………………………………….7
2.4.1 氣相層析系統的發展………..………..……………………7
2.4.2 氣相層析系統分離原理……..……………………………8
2.5 微氣相層析晶片之簡介……………..…………………………...10
2.6 玻璃接合………………………..………………………………...16
2.6.1 玻璃接合技術…………..…………………………………16
2.6.2 接合方法………………..…………………………………16
2.6.3 接合技術之基本限制……..………………………………17
第3章 晶片製作與實驗方法…………..…………………………….……19
3.1 晶片基材………………………..………………………………...20
3.2 光罩的設計……………………..………………………………...21
3.3 微流體晶片製作……...………..…………………………………21
3.3.1 退火(Annealing)……..…..…………………………………21
3.3.2 晶片清洗(Cleaning)………………..………………………22
3.3.3 HMDS塗佈………………………..……………………..…23
3.3.4 塗佈光阻及軟烤(Spin Coating and Soft-bake)……………23
3.3.5 曝光(Exposure)…………………………………..………...24
3.3.6 顯影(Developing)…...……….…………………………..…25
3.3.7 硬烤(Hard-bake).…..………………………………………25
3.3.8 蝕刻及去光阻(Etching and PR stripping)…………………26
3.3.9 鑽孔、清洗、對位及高溫熔融接合(Drilling、Cleaning、
Alignment and Fusion bonding)………………………………………27
3.4 微流道封閉測試……………………..…………...………………30
3.5 GC晶片管壁塗佈製程…………..……………………………..…30
3.6 GC晶片實體外觀……………..…………………………………..32
3.7 實驗步驟……………………….....………………………………33
第4章 結果與討論……………………..……………………………….…35
4.1 GC管柱之測試系統………………...………………………….….35
4.2 不同氣壓下混合物之分離……………...…………………...……35
4.3 不同溫度下混合物之分離……………...…………………...……38
4.4 酒類濃度之檢測……………………….....………………….……41
4.5 晶片檢測…………………………………...…………..………….48
4.6 總結………...…………………………………………..………….58
第5章 結論…………………………...………………………….…………59
第6章 未來展望…………...…………….…………………………………60
參考文獻……………………………..……………………………..………61
附錄……………………………………………………………….…………63
作者簡介……………………………..……………………………………..68

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