臺灣博碩士論文加值系統

本篇論文主要分為相位匹配理論之介紹，一維週期性極化反轉鉭酸鋰雷射晶片之研製，以及紅、綠、藍光倍頻雷射晶片之光學量測與特性分析。原理部分闡述非線性頻率轉換與準相位匹配理論。製程部分則剖析數種研製方法，並論述其優缺。我們利用鎳金屬內擴散混合高電壓致區域反轉製程技術於厚度為0.5公釐共熔鉭酸鋰晶片；成功研製出週期為12.78微米、7.76微米、5.15微米之一維與二維週期性極化反轉鉭酸鋰倍頻雷射晶片。至於週期為7微米之一維週期性極化反轉鉭酸鋰光學參量振盪雷射晶片，以及週期為7.76與4.99微米之一維週期性極化反轉鉭酸鋰級聯雷射晶片，亦以前述方法製備。上述週期性極化反轉結構之有效長度皆可達20公釐，足以因應倍頻實驗以及光學參量振盪器架設研究之用。在光學實驗部分，先以波長為1064奈米之奈秒雷射進行綠光倍頻實驗，繼而以實驗室架設之光學參量振盪器做為泵浦光源，進行紅、藍光倍頻實驗，測量並分析雷射晶片之轉換效率。

In this thesis, the theory of quasi-phase-matching (QPM) and nonlinear optical generation and the fabrication techniques of periodically poled ferroelectric nonlinear crystals will be first introduced. I then will emphasize on the nickel-diffusion assisted electric poling method that leads to the realization of periodically poled QPM structures of 20 mm length on 0.5 mm thick congruent-grown lithium tantalate (PPCLT) substrates. The QPM-based PPCLT chips with periodicity of 12.78, 7.76, and 5.15 micrometer suitable for producing second harmonic generation (SHG) of red, green, and blue lasers and for optical parametric oscillator (OPO) of near infrared lasers have been demonstrated and characterized. Finally a green pumped cascaded OPO-SHG blue laser with double-periodicity of 7.76 and 4.99 micrometer in PPCLT will be demonstrated and discussed.

第一章 緒論 - 1 -
1.1 研究動機 - 1 -
1.2 非線性晶體 - 3 -
1.3 鉭酸鋰晶體 - 5 -
1.3.1 基本特性 - 5 -
1.3.2 相變化 - 6 -
1.3.3 長晶技術 - 8 -
1.4 極化反轉製程 - 10 -
1.4.1 鋰離子外擴散法 - 10 -
1.4.2 特殊金屬內擴散法 - 10 -
1.4.3 質子交換法 - 11 -
1.4.4 高電壓致極化反轉法 - 11 -
1.4.5 淺層反轉混合高電壓致極化反轉法 - 12 -
1.4.6 結論 - 12 -
1.5 非線性頻率轉換技術 - 13 -
1.5.1 倍頻產生 - 13 -
1.5.2 光學參量振盪器 - 14 -
1.6 論文內容概述 - 15 -
第二章 相位匹配理論 - 16 -
2.1 非線性頻率轉換與相位匹配 - 17 -
2.1.1 平面波近似 - 18 -
2.1.2 高斯波近似 - 19 -
2.2 雙折射相位匹配 - 21 -
2.3 準相位匹配 - 24 -
2.3.1 一維空間 - 25 -
2.3.2 二維空間 - 29 -
2.4 光學參量振盪器理論 - 31 -
2.4.1 傳統光參產生及準相位匹配光參產生 - 31 -
2.4.2 波長可調性 - 32 -
2.4.3 光參產生細部理論 - 33 -
2.4.4 光學參量振盪器理論 - 35 -
第三章 設計與製程 - 38 -
3.1 週期設計 - 39 -
3.2 極化反轉模型 - 45 -
3.3 高電壓波形 - 48 -
3.4 高電壓致極化反轉 - 50 -
3.4.1 液態電極與基座設計 - 52 -
3.4.2 金屬電極之選擇 - 53 -
3.4.3 金屬電極定義方式 - 54 -
3.4.4 O形環對高電壓反轉法的影響 - 56 -
3.5 內建電場量測 - 58 -
3.6 利用光阻定義週期性結構 - 59 -
3.7 利用鎳金屬內擴散機制定義週期性結構 - 63 -
3.7.1 製作鎳金屬圖形 - 65 -
3.7.2 熱處理 - 65 -
3.8 成核時間控制 - 67 -
3.9 製程討論 - 70 -
第四章 光學量測分析 - 71 -
4.1 光學參量振盪器 - 71 -
4.1.1 930 nm共振腔 - 73 -
4.1.2 長度20 mm光學參量振盪雷射晶片 - 75 -
4.2 倍頻晶片特性量測 - 80 -
4.2.1 綠光倍頻晶片特性量測 - 80 -
4.2.2 藍、紅光倍頻晶片特性量測 - 85 -
4.3 光學實驗討論 - 95 -
第五章 結論與未來展望 - 96 -
5.1 結論 - 96 -
5.2 未來展望 - 97 -

[1] www.expo2005.or.jp.
[2] www.cnet.com.au, “Laser TV unveiled in Australia,” Oct 11th 2006.
[3] www.engadgethd.com, “LaserVue it is!, ” Apr 7th 2008.
[4] www.microvision.com.
[5] www.dlp.com.
[6] www.explay.co.il.
[7] T. H. Maiman, "Stimulated Optical Emission in Ruby," Journal of the Optical Society of America,” Vol. 50, pp. 1134-1134, 1960.
[8] www.engadget.com.
[9] P. A. Franken, G. Weinreich, C. W. Peters, and A. E. Hill, "Generation of Optical Harmonics," Physical Review Letters, Vol. 7, pp. 118-119, 1961.
[10] J. A. Armstrong, N. Bloembergen, J. Ducuing, and P. S. Pershan, "Interactions between Light Waves in a Nonlinear Dielectric," Physical Review, Vol. 127, pp. 1918-1939, 1962.
[11] V. Berger, "Nonlinear photonic crystals," Physical Review Letters, Vol. 81, pp. 4136-4139, 1998.
[12] www.novalux.com
[13] Hong Ky Nguyen, M.H. Hu, N. Nishiyama, N.J. Visovsky, Yabo Li, Kechang Song, Xingsheng Liu, J. Gollier, L.C. Hughes, R. Bhat, and Chung-En Zah, “107-mW low-noise green-light emission by frequency doubling of a reliable 1060-nm DFB semiconductor laser diode,” IEEE Journal of Quantum Electron, Vol 18(5), pp. 682-684, 2006.
[14] V. Gopalan, N. Sanford, J. A. Aust, K. Kitamura and Y. Furukawa, “Handbook of Advanced Electronic and Photonic Materials,” Academic Press, pp. 62, 2001.
[15] V. Gopalan, K. Kitamura, and Y. Furukawa, ”Domain reversal and wall structure of 180o ferroelectric domains in LiTaO3 crystals,” FUNDAMENTAL PHYSICS OF FERROELECTRICS 2000: Aspen Center for Physics Winter Workshop. AIP Conference Proceedings, Vol. 535, pp. 183-190, 2000.
[16] K. Kitamura, Y. Furukawa, S. Takekawa, T. Hatanaka, H. Ito, and V. Gopalan, “Non-stoichiometric control of LiNbO3 and LiTaO3 in ferroelectric domain engineering for optical devices,” Ferroelectrics, Vol. 257, pp. 235-243, 2001.
[17] Y. Liu, S. Kurimura, M. Nakamura, S. Takekawa, and K. Kitamura, “Effective aperture in periodically poled Mg-doped stoichiometric LiTaO3 for quasi-phase-matched optical parametric oscillation,” Japanse Journal of Applied Physics, Vol. 45, pp. 4064-4067, 2006.
[18] X. Liu, K. Kitamura, K. Terabe, and S. Takekawa, “Stabilization of periodically poled domain structures in a quasiphase-matching device using near-stoichiometric LiTaO3,” Journal of Applied Physics, Vol. 102, 2007.
[19] L. H. Peng, Y. J. Shih, and Y. C. Zhang, “Restrictive domain motion in polarization switching of lithium niobate,” Applied Physics Letters , Vol. 81, pp. 1666, 2002.
[20] S. Thaniyavarn, T. Findakly, D. Booher, and J. Moen, “Domain inversion effects in Ti-LiNbO3 integrated optical devices,” Applied Physics Letters, Vol. 46, pp. 933, 1985.
[21] 陳威霖, “鎳擴散式鉭酸光波導之研製,” 國立台灣大學光電工程學研究所博士論文, 1995
[22] 吳振弘, “鈮酸鋰準相位匹配二倍頻元件之研製,” 國立台灣大學光電工程學研究所碩士論文, 1996.
[23] M. L. Bortz, S. J. Field, M. M. Fejer, D. W. Nam, R. G. Waarts, and D. F. Welch, “Noncritical quasi-phase-matched second harmonic generation in an annealed proton-exchanged LiNbO3 waveguide,” IEEE Journal of Quantum Electron, Vol. 30, pp. 2953, 1994.
[24] I. Camlibel, “Spontaneous polarization measurements in several ferroelectric oxides using a pulsed-field method,” Journal of Applied Physics, Vol. 40, pp. 1690, 1969.
[25] L. E. Myers, R. C. Eckardt, M. M. Fejer, and R. L. Byer, “Quasi-phase-matched optical parametric oscillators in bulk periodically poled LiNbO3,” Journal of the Optical Society of America B, Vol. 12, pp. 2102, 1995.
[26] K. Mizuuchi and K. Yamamoto, “Harmonic blue light generation in bulk periodically poled LiTaO3,” Applied Physics Letters, Vol. 66, pp. 2943, 1995.
[27] Peng, L. H., Tseng, Y. P., Lin, K. L., Huang, Z. X., Huang, C. T., Kung, and A. H., “Depolarization field mitigated domain engineering in nickel diffused lithium tentalate,” Applied Physics Letters, Vol. 92, 2008.
[28] 盧昶伸, “準相位匹配鈮酸鋰光學參量振盪器之研究,” 國立台灣大學光電工程學研究所碩士論文, 2007.
[29] 楊順涵, “腔內倍頻準相位匹配綠光雷射之研究,” 國立台灣大學光電工程學研究所碩士論文, 2007.
[30] J. A. Armstrong, N. Bloembergen, J. Ducuing, and P. S. Pershan, “Interactions between Light Waves in a Nonlinear Dielectric,” Physical Review, Vol. 127, pp. 1918-1939, 1962.
[31] V. Berger, “Nonlinear photonic crystals,” Physics Review Letters, Vol. 81, pp. 4136, 1998.
[32] R. Newman, “Excitation of the Nd3+ fluorescence in CaWO4 by recombination radiation in GaAs,” Journal of Applied Physics, Vol. 34, pp. 437, 1963.
[33] Meyn, J. P. and M. M. Fejer, “Tunable ultraviolet radiation by second-harmonic generation in periodically poled lithium tantalite,” Optics Letters, Vol. 22, No. 16, pp. 1214-1216, 1997.
[34] R. C. Miller and G. Weinreich, “Mechanism for the Sidewise Motion of 180o Domain Walls in Barium Titanate,” Physical Review, vol. 117, pp. 1460-1466, 1960.
[35] G. D. Miller, “Periodically Poled Lithium Niobate: Modeling, Fabrication, and Nonlinear-Optical Performance,” 1998.
[36] 林立峰, “摻氧化鋅鈮酸鋰二維非線性光子晶體之研究,” 國立台灣大學光電工程學研究所碩士論文, 2005.
[37] 張永昌, “鈮酸鋰準相位匹配倍頻轉藍、綠光雷射之研製,” 國立台灣大學光電工程學研究所碩士論文, 2001.
[38] 陳逸豪, “利用鈮酸鋰一維非線性光子晶體產生光參共振可調波長雷射光源之研究,” 國立台灣大學光電工程學研究所碩士論文, 2006.
[39] 房宜澂, “高電壓導致鈮酸鋰區域反轉之研究,” 國立台灣大學光電工程學研究所碩士論文, 1998.
[40] 林宜慶, “高電壓致鈮酸鋰小週期極化反轉與動力學研究,” 國立台灣大學光電工程學研究所碩士論文, 1999.
[41] L. E. Myers, R. C. Eckardt, M. M. Fejer, and R. L. Byer, “Quasi-phase-matched optical parametric oscillators in bulk periodically poled LiNbO3,” Journal of the Optical Society of America B, Vol.12, pp. 2102, 1995.
[42] S. Nagano, M. Konishi, T. Shiomi, and M. Minakata, “Study on formation of small polarization domain inversion for high-efficiency quasi-phase-matched second-harmonic generation device,” Japanse Journal of Applied Physics, Vol. 42, pp. 4334, 2003.
[43] 史毅駿, “鈮酸鋰二維非線性光子晶體之研製,” 國立台灣大學光電工程學研究所碩士論文, 2002.
[44] Peng, L. H., Shih, Y. C., Tsan, S. M.,and Hsu, C. C., “Mitigation of transverse domain growth in two-dimensional polarization switching of lithium niobate,” Applied Physics Letters, vol. 81, No.27, pp. 5210-5212, 2002
[45] 陳贊元, “週期性極化反轉鈮酸鋰的研究與製作,” 國立台灣大學光電工程學研究所碩士論文, 2000.
[46] 林威呈, “利用高介電係數材料與高溫製程作二維非線性光子晶體,” 國立台灣大學光電工程學研究所碩士論文, 2004.
[47] 林承德, “利用鈮酸鋰二維非線性光子晶體倍頻產生紅、綠、藍雷射光源之研究,” 國立台灣大學光電工程學研究所碩士論文, 2006.
[48] M. Büttiker, R. Landauer, “Nucleation Theory of Overdamped Soliton Motion,” Physical Review Letters, vol 43(20), pp.1453-1456, 1979.
[49] 林耀東, “鉭酸鋰非線性光子晶體雷射與其高溫製程,” 國立台灣大學光電工程學研究所碩士論文, 2003.
[50] Shih-Yu Tu, A. H. Kung, Z. D. Gao, S. N. Zhu, S. Kurimura, and K. Kitamura, “Green-pumped high-power optical parametric oscillator based on periodically poled MgO-doped stoichiometric LiTaO3,” Optics Letters, Vol. 31(24), pp. 3632-3634, 2006.