臺灣博碩士論文加值系統

本論文設計、組裝與校準出一種新式的小型繞射式雷射光學尺系統，藉由本文於研發過程中所完成一套優良的調校程序來使光機系統達到最佳化的操作條件。由於本文所提之新光學尺系統尺寸必須控制在一定大小範圍以內，因此本系統沒有使用一般常見的氦氖雷射，而以體積小的二極體雷射作為所需光源。整體設計除了可將光學尺整體系統大幅縮小，還可縮小系統所消耗的功率。本創新之光學尺系統包含由雷射二極體光源、環型光路、單倍率望遠鏡、以及圓偏振光干涉儀所形成的光學頭以及光柵，構成一種光柵干涉儀，可透過非接觸之光學量測方法將量測基準由雷射光波長轉換為光柵節距，因此具有抗環境干擾的優點。除此之外，本系統之單倍率望遠鏡架構，可令其兩次繞射光保持在與入射光路平行的方向，進而降低位移平台擾動所造成系統雜訊，並使系統的校準容許公差提高至比全球最佳系統高6-20倍。
本論文同時亦利用光學尺系統對位移平台進行量測，並利用PQ訊號解相位法成功量測出光柵尺及位移平台的位移資訊，驗證過程中也同時以HP 5529A干涉儀進行量測值比對的工作。所得實驗資料充分反映出本文所提創新系統之精確度。綜而言之，本論文完整開創出之一繞射式光學尺系統，以其優異之光機特性及抗環境擾動性相信此一成果可對目前的高精密科技，高精度加工機械、半導體工業及各種相關高科技產業中的所有相關領域均帶來極大的應用價值。

In this dissertation a compact size linear diffractive laser encoder was designed and fabricated. In addition, a step-by-step alignment procedure was also accomplished. This newly developed laser encoder used a 780 nm wavelength laser diode as the light source and was composed of several sub-systems, which include a 1-x telescope, a diffractive grating scale, and a circular polarization interferometer. The circular polarization interferometer sub-system can decode the optical interference signals obtained from two twice diffracted beams, both of which has their frequency subjected to Doppler shifted due to grating scale displacement. With the compact mechanical design and the isothermal design arrived from the common base plate, this newly developed laser encoder is less sensitive to environmental disturbances. As this laser encoder retrieves the grating scale displacement information from the pitch of the grating scale and not from the laser source wavelength, it was found to be potentially less prone to have its measurement accuracy influenced by the frequency drift of the light source used. The performance of the compact diffractive laser encoder system was verified by using the HP5529A interferometer as the measurement reference.

目　　錄
摘 要I
ABSTRACTIII
目　　錄IV
表目錄VII
圖目錄VIII
第1章 緒論1
1.1 研究動機1
1.2 文獻回顧4
1.3 論文架構概要7
第2章 光學原理8
2.1 前言8
2.1.1 光的偏極態8
2.1.2 光的同調性10
2.1.3 干涉基本原理11
2.2 都卜勒效應(DOPPLER EFFECT)12
2.3 光柵的都卜勒偏移效應13
2.4 圓偏光干涉架構15
2.5 容錯式解相位演算法18
2.5.1 原理說明19
第3章 光學尺系統設計25
3.1 光路架設25
3.1.1 環型光路26
3.1.2 單倍率望遠鏡27
3.1.3 圓偏光干涉模組27
3.2 微形光學尺系統公差分析28
3.3 縮小化光學尺系統設計34
3.3.1 光學元件規格36
3.3.2 微形光學尺系統光學調校36
3.4 光機設計考量38
3.4.1 調校平台的設計40
3.4.2 雷射光源的調校41
3.4.3 光柵的對位44
3.4.4 單倍率望遠鏡的對位44
3.4.5 機構設計46
3.5 光柵繞射效率分析47
第4章 光學尺性能量測54
4.1 前言54
4.2 系統架構54
4.3 實驗量測57
4.3.1 光學尺定位誤差與動態反應61
4.4 隨機誤差64
第5章 結 論67
參考文獻69

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