臺灣博碩士論文加值系統

本研究針對以往發展之壓電陶瓷馬達伺服驅動控制電路予以改良，包括增大功率設計以及緩衝電路設計，並解決推動較大負�^(多顆壓電馬達)時所產生之壓電效應的影響，及解決通訊命令干擾之問題，在電路中加入伺服控制模組以增加電路系統之穩定性及對電腦端的通訊能力。
驅動電路分兩部分組成:前端為伺服控制模組與推挽式升壓電路，後端為全橋式換流諧振輸出。其中伺服控制模組以單晶片為設計核心，根據馬達之作動原理與開關元件之切換特性設計步進控制及電壓回授控制。橋式電路設計中，加入低損耗緩衝電路，以得到低雜訊的交流訊號，並配合電感、電容及壓電馬達本體設計諧振電路以得到馬達良好之致動效果，經實驗驗證該設計可滿足功能需求。

Based upon the previous circuitry design, the focus of this article is to improve its performance by re-designing the power amplifier and the Snubber circuit for driving more load output requirement (more motors) and reducing the noise effect of the piezoelectricity and solving the interference problem in communication. Also, a servo control module is developed and implemented in the driving circuitry in order to increase the system’s stability and steadiness.
The drive circuit is comprised of two parts: one is the servo control module and push-pull DC converter, the other one is the full-bridge resonant converter. By using a microchip, servo controller is developed to accomplish stepping control and voltage-feedback control design based on the motor’s driving performance and the switching characteristics of the Full-bridge converter. In Full-bridge converter, Snubber circuit is used to obtain less-noise AC signal, and associated with the inductance and capacity resonant circuitry is designed. Through practical experiment, the proposed circuitry design is verified can provide satisfactory function requirement for driving the piezoelectric motors.

中文摘要 I
英文摘要 II
誌謝 III
目錄 IV
圖目錄 VII

第一章 緒論 1
1.1 研就動機 1
1.2 文獻回顧 3
1.2.1 壓電馬達之文獻回顧 3
1.2.2壓電馬達驅動控制之文獻回顧 5
1.3 研究方法與目的 7
1.4 全文架構 8

第二章 壓電材料之原理 9
2.1 壓電材料介紹 10
2.1.1 壓電效應 10
2.1.2 壓電陶瓷 11
2.1.3 壓電諧振體 12
2.2 壓電材料之機電轉換 13
2.2.1 壓電方程式 13
2.2.2 機電耦合 14
2.2.3 介電損失 14
2.2.4 機械品質因素 15
2.3 壓電馬達 16
2.3.1壓電馬達結構 16
2.3.2壓電馬達作動原理 17
2.3.3壓電馬達之分析 19

第三章 伺服驅動電路之架構與設計 21
3.1 通訊與伺服控制模組與單晶片設計 23
3.1.1單晶片微處理器 23
3.1.2伺服控制模組設計 26
3.2 PWM控制器 30
3.2.1脈寬調變技術 30
3.2.2脈寬調變控制器 32
3.3 推挽式直流電路 39
3.3.1推挽式轉換器 39
3.3.2 基本設計公式 42
3.4 緩衝電路 44
3.4.1 工作原理 45
3.5 電壓回授控制 49
3.5.1 補償修正控制器設計 49
3.6 全橋諧振換流電路 53
3.6.1 全橋換流器 53
3.6.2 全橋緩衝電路 55
3.6.3 諧振設計 57
3.6.4 濾波設計 59

第四章 系統整合與實驗 61
4.1 脈寬調變控制器 61
4.2 單晶片設定與訊號控制 63
4.2.1分相控制 63
4.2.2延遲控制 64
4.3 換流電路與電壓回授 66
4.4 電路測試與實驗結果 72
4.4.1 精密定位平台 73
4.4.2 位置檢測感測器 74
4.4.3 督普勒雷射振動量測儀 74
4.4.4 實驗結果 75

第五章 結論與未來展望 79
5.1 結論 79
5.2 未來展望 80

參考文獻 81
簡歷 86

圖 目 錄
圖1.1 壓電馬達之基本架構 2
圖1.2 Barth 所發明的壓電馬達 3
圖1.3 Nanomotion公司設計之壓電馬達 4
圖1.4 Nanomotion公司設計之XYZ平台 5
圖2.1 壓電效應示意圖 10
圖2.2 壓電諧振體之等效電路 12
圖2.3 壓電馬達結構圖 16
圖2.4 壓電陶瓷馬達運動型式 17
圖2.5 壓電陶瓷馬達內部構造圖與輸出位移圖 18
圖2.6 壓電馬達於39054Hz之模態 19
圖2.7 壓電馬達之阻抗分析 20
圖3.1 壓電陶瓷馬達驅動電路架構圖 21
圖3.2 壓電陶瓷馬達驅動電路樹狀圖 22
圖3.3 PIC18F4x2晶片架構方塊圖 25
圖3.4 壓電馬達運動模式 26
圖3.5 壓電馬達控制流程 26
圖3.6 驅動器伺服控制模組 27
圖3.7 伺服命令輸入電路 28
圖3.8 主、次單晶片間之資料通訊及訊號控制示意圖 29
圖3.9 PWM調變與輸出關係圖 31
圖3.10 功率開關PWM驅動訊號 32
圖3.11 推挽式直流轉換器之PWM程式流程 34
圖3.12 後級全橋PWM換流控制規劃 35
圖3.13 全橋PWM換流程式流程 36
圖3.14 PWM分相控制示意圖 37
圖3.15 A、B相之延遲處理 38
圖3.16 推挽式轉換器電路 39
圖3.17 推挽式電路模態 40
圖3.18 推挽式電路主要波形 41
圖3.19 功率開關元件切換時之切換損失圖 44
圖3.20 推挽式轉換器及緩衝吸收電路 45
圖3.21 緩衝電路模式圖 46
圖3.22 推挽式電壓回授電路 49
圖3.23 PWM脈波產生原理圖 50
圖3.24 電源系統方塊圖 51
圖3.25 補償電路電路圖 52
圖3.26 補償電路模擬圖 52
圖3.27 全橋換流之輸出 54
圖3.28 全橋緩衝電路 56
圖3.29 串聯諧振並聯負載電路模型 57
圖3.30 濾波器之電壓與電流相角圖 59
圖4.1 推挽式驅動轉換訊號 61
圖4.2 全橋驅動轉換訊號(責任週期比為20%) 62
圖4.3 全橋驅動轉換訊號(責任週期比為40%) 62
圖4.4 A、B相換流訊號 63
圖4.5 PWM之延遲控制輸出A相開啟、B相關斷 64
圖4.6 PWM之延遲控制輸出A相關斷、B相開啟 65
圖4.7 未加入緩衝電路之推挽式轉換器一次側兩汲極端之波形 67
圖4.8 加入緩衝電路之推挽式轉換器一次側兩汲極端之波形 67
圖4.9 未加入緩衝電路前之全橋轉換器兩汲極端之波形 68
圖4.10 加入緩衝電路後之全橋轉換器兩汲極端之波形 68
圖4.11 推挽式轉換器濾波整流後之波形 69
圖4.12 全橋轉換器濾波諧振後之波形(duty cycle 48%) 69
圖4.13 馬達空載之電壓波形 70
圖4.14 加上平台致動後之電壓損耗 70
圖4.15 電壓回授效果 71
圖4.16 全橋轉換器之輸出電壓範圍與責任週期 71
圖4.17 壓電陶瓷馬達伺服驅動電路實體圖 72
圖4.18 壓電致動平台圖 73
圖4.19 Mercury 3500光學尺量測系統 74
圖4.20 PC控制器之操作界面 75
圖4.21 壓電陶瓷馬達定子振動量約為340nm 75
圖4.22 壓電陶瓷馬達定子振動量約為5.2um 76
圖4.23 平台連續步階輸入之結果 76
圖4.24 壓電平台於5000um之定位結果 77
圖4.25 壓電平台於25000um之定位結果 78
圖4.26 壓電平台軌跡追蹤與誤差圖 78

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