臺灣博碩士論文加值系統

由於近年來奈米材料逐漸的引人注目，關於氧化鐵奈米棒的研究也相當繁多，在絕大部分中以討論溫度與含氧量對氧化鐵奈米棒的生成影響，以及奈米棒的結構為多數，而對於氧化鐵奈米棒的生成機制卻沒有詳細明確說明。基於此，我們利用高真空濺鍍系統(Sputtering System)在Si(100)基板成長500 nm與50 nm的鐵膜，也利用分子束磊晶(MBE)在MgO(100)、(110)、(111)三個基板上生長50 nm 的鐵膜，並將此置於開放式的烘箱中恆溫加熱350℃氧化10小時，再針對樣品做SEM、XRD、TEM的分析，而量測結果得到：
1. 奈米棒的生成數量、長度與其厚度有關。當鐵膜薄時，奈米棒數目較少、長度較短；當鐵膜厚則較多、長度較長。而在鐵膜較厚，與低溫氧化中時，容易將奈米棒轉變為奈米帶。
2. 奈米棒的生成與基板、鐵膜的晶格方向有關。在MgO（100）上幾乎皆無奈米棒的生成，而在MgO（110）（111）上則都有奈米棒的生成，其中以（111）的數量最多、長度最長。由基板上的鐵膜晶格方向可以看出，鐵膜Fe（100）不易長出奈米棒，而在鐵膜Fe（110）、（211）方向則容易長出奈米棒。
3. 在Fe變成?Fe2O3的過程中，會先氧化成其他氧化鐵，其中以Fe3O4為主。在晶格方向上，可能在Fe3O4（110）上較易形成?Fe2O3奈米棒，而奈米棒的生成方式是會往?Fe2O3〔110〕的方向堆積?Fe2O3（110）的面，而形成一根一根的奈米棒。

In recent years, the nanomaterial is gradually noticeable, and the researchs about the iron oxide nanorod are very much. The majority of study is discussing that temperature and oxygen content to the iron oxide nanorod being influenced, and the structure of the iron oxide nanorod. But the formation mechanism of the iron oxide nanorod was not explained clearly.We use the Sputtering System to grow the thin films of Fe on the Si(100) substrate which thickness are 50nm and 500nm, and use the Molecular Beam Epitaxy to grow the thin films of Fe on the single crystal substrates including MgO (100) , (110) , (111) orientations which thickness are 50nm. Put these samples in opening oven at constant temperature and heat to 350℃ for 10 hours in order to oxidize. After those process, we make some data for analysis of SEM , XRD , and TEM. The result is as following：
1. The quantity and length of the iron oxide nanorod are relate to thickness. The iron film is thin , the quantity of the iron oxide nanorod is less, and the length of the iron oxide nanorod is relatively short. The iron film is thick, the quantity of the iron oxide nanorod is more, and the length is relatively long. If the iron film is relatively thick , and when the low temperature is oxidized, it is apt to change nanorod into nanoblet.
2. The formation of the nanorod relates to the crystalline directions of the substrates and iron film. Almost there is no formation of nanorod on the substrate MgO(100) orientation,but there are some nanorod on the substrate MgO (110)、(111) orientation. It is among them with (111) peaks, and the length is the longest. Can be found out by the iron film crystalline grain direction on the substrate, the iron film Fe ( 100) peak grows of nanorod, and the iron film Fe (110 ), (211 ) are easy to grow nanorod.
3. During the process of iron turns into ?Fe2O3, the iron will be oxidized into other iron oxide first , mainly on Fe3O4. In the crystalline grain direction, it may be relatively easy to form ?Fe2O3 nanorod on the film Fe (110) orientation, and the formation of nanorod is easy to grow on ?Fe2O3 [110] direction and growth a ?Fe2O3 (110) surface.

致謝…………………………………………...……Ⅰ
摘要…………………………………………...……Ⅱ
Abstract...................................................................Ⅲ
第一章 序 論 …………………………………………...…1
1.1 前言 ……………………………………………..1
1.2 研究動機 ……………..…………………………5
第二章 理論基礎與參考文獻 …..…..………….…..6
2-1 氧化鐵理論基礎…………………………….……6
2-1-1 Fe3O4結構簡介…………………………….6
2-1-2 Fe3O4的結構討論…………………………...8
2-1-3 Fe2O3的結構……………………………….9
2-1-4 鐵氧化物相轉換之可能機制……………….11
2-2 關於形成氧化鐵奈米棒的討論………………...14
第三章 實驗儀器與實驗步驟……………..………….19
3-1 實驗儀器………………………….………..……19
3-1-1 高真空濺鍍系統(Sputtering System) ……….19
3-1-2 分子束磊晶系統（Molecular Beam Epitaxy，MBE）
……………………………………………21
3-1-3 X光繞射儀（X-ray diffraction，XRD）…..24
3-1-4 場發掃描電子顯微鏡（Field-emission Scanning Electron Micriscopy
，FE-SEM）…………………………………26
3-1-5 穿透式電子顯微鏡 (Transmission Electron Microscopy，TEM)
…………………………………................27
3-2 實驗步驟…………………………………..…….30
第四章 實驗結果……………………………………..32
4-1不同厚度之鐵薄膜形成氧化鐵的結果…………..32
4-2不同晶格方向之鐵膜形成氧化鐵的結果………41
4-3 奈米棒量測的實驗結果………………………...48
4-5 結果討論…………………………………………53
第五章 結論………………………………………...64
Reference …………………………………………65

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