臺灣博碩士論文加值系統

本研究探討各種同軸式光柵(in-line grating)在光學讀寫頭(optical pickup head, OPH)作循軌偵測時所產生之差動推挽(differential push-pull, DPP)訊號特性。同軸式差動推挽法有別於傳統差動推挽法，其優點在於不需考慮各種碟片軌道間距與各繞射階間所對應之夾角關係。藉由本研究，我們獲得各種同軸式光柵之循軌誤差訊號(tracking error signal, TES)品質，並探討適用於光學讀寫頭應用之同軸式光柵圖型。
利用Matlab數值分析軟體，首先對同軸式光柵進行相位分佈設計。接著對該相位分佈作快速傅立葉轉換(fast Fourier transform, FFT)，模擬出零階與正、負一階繞射光之強度分佈與碟片軌道相對關係。並模擬出同軸式光柵之推挽訊號干涉分佈。進而依照各類不同碟片之軌道間距進行循軌誤差訊號之計算，並比較各種同軸式光柵在物鏡偏移時對循軌誤差訊號品質所造成之影響。經由模擬得知，DVD-R與BD-R碟片之循軌誤差訊號具有相同趨勢。減少同軸式光柵中間區域寬度所佔的面積，可獲得較佳的循軌誤差訊號。
最後，我們將所模擬的各種同軸式光柵圖型，以黃光微影(photolithography)與蝕刻(etching)製程製作成元件，驗證其光學繞射效率使與原設計相符合，並架設兩個光學讀寫頭之光路架構，經實驗觀察推挽訊號之明暗變化。

This study investigated various types of in-line gratings on generating the differential push-pull (DPP) signal for the tracking detection of an optical pick head (OPH). The method of in-line DPP is different from that of the conventional DPP. The advantage is that it doesn’t need to consider the relation between the track pitch of each disk type and the corresponding angle of diffraction orders. With the study, we obtained the quality of the tracking error signals (TESs) for various types of in-line gratings, and discussed the in-line grating patterns that are applicable to the OPH applications.
By using the numerical analysis software of Matlab, we first designed the phase profiles of the in-line gratings. The fast Fourier transform was then applied to simulate the intensity distributions of the zeroth, positive-first, and negative-first diffraction orders. Besides, we simulated the interference distributions of the push-pull signals for the in-line gratings. Furthermore, the TESs were calculated according to the track pitch of different disk types. Also, the comparisons between the TES quality and the shifting effect of the objective lens were performed for various types of in-line gratings. After the simulation, we found that the TESs of DVD-R and BD-R disks have the same tendency. A better TES could be obtained by reducing the width of the intermediate region of an in-line grating.
Finally, the devices of all simulated in-line grating patterns were fabricated by using the photolithography and etching processes. Their optical diffraction efficiencies were verified for being consistent with the original designs. The dark and bright variations of the push-pull signal were also experimentally observed by setting up two OPH configurations.

摘要 I
Abstract II
致謝 IV
目錄 V
圖目錄 VII
表目錄 XII
第一章 緒論 1
1.1. 研究背景與目的 1
1.2. 文獻回顧 2
1.3. 論文架構 7
第二章 相關理論說明 8
2.1. 循軌誤差訊號檢測技術 8
2.1.1. 推挽法(push-pull method) 8
2.1.2. 差動推挽法(differential push-pull method) 9
2.1.3. 同軸式差動推挽法(in-line differential push-pull method) 11
2.2. 繞射光柵理論 12
2.3. 傅立葉級數 14
2.3.1. 振幅型傅立葉級數 14
2.3.2. 相位型傅立葉級數 15
2.4. 快速傅立葉轉換理論 17
第三章 各種型態同軸式光柵之模擬與分析 20
3.1. 參考文獻模擬與研究分析 20
3.2. 同軸式光柵模擬流程簡介 22
3.3. 同軸式光柵圖型模擬分析 25
3.3.1. 文獻光柵(A)之模擬分析 27
3.3.2. 文獻光柵(B)之模擬分析 29
3.3.3. 同軸式新型光柵(1)之模擬分析 31
3.3.4. 同軸式新型光柵(2)之模擬分析 33
3.3.5. 同軸式新型光柵(3)之模擬分析 35
3.3.6. 同軸式新型光柵(4)之模擬分析 37
3.4. 各種推挽訊號計算 39
3.4.1. 物鏡偏移之計算方式簡介 39
3.4.2. 文獻光柵(A)之推挽訊號計算 41
3.4.3. 文獻光柵(B)之推挽訊號計算 43
3.4.4. 同軸式新型光柵(1)之推挽訊號計算 46
3.4.5. 同軸式新型光柵(2)之推挽訊號計算 49
3.4.6. 同軸式新型光柵(3)之推挽訊號計算 51
3.4.7. 同軸式新型光柵(4)之推挽訊號計算 54
3.5. DPP訊號隨物鏡偏移之關係 57
3.5.1. 文獻光柵(B) DPP訊號隨物鏡偏移關係 57
3.5.2. 同軸式新型光柵(1)~光柵(4) DPP訊號隨物鏡偏移關係 59
3.5.3. 文獻光柵(B)之循軌偏移量與物鏡偏移 61
3.5.4. 同軸式新型光柵(1)~光柵(4)之循軌偏移量與物鏡偏移 62
第四章 同軸式新型光柵製程與實驗驗證 65
4.1. 黃光微影製程技術 65
4.2. 電漿離子蝕刻製程技術 66
4.3. 同軸式新型光柵製作與蝕刻深度計算 67
4.4. 推挽訊號明暗變化實驗驗證 74
4.4.1. 光學讀寫頭系統光路架構 74
4.4.2. 推挽訊號明暗變化(1) 76
4.4.3. 推挽訊號明暗變化(2) 77
第五章 結論與未來展望 79
5.1. 結論 79
5.2. 未來展望 80
參考文獻 81

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