臺灣博碩士論文加值系統

本研究利用射頻磁控濺鍍系統沉積氧化鋅共摻鎵與氟(GFZO)薄膜於康寧Eagle XG玻璃上，其中靶材為3 wt% Ga2O3摻雜的氧化鋅靶材，命名為GZO，並且在濺鍍過程通入四氟化碳(CF4)氣體做氟的摻雜。
本實驗所有系列的薄膜皆是以氬氣(Argon)作為背景氣體，改變CF4/Ar的流量比，固定其他參數包括背景壓力、工作壓力、電漿功率、薄膜厚度及工作距離，分別為5×10-6 Torr、5×10-3 Torr、100 W、330 nm及8 cm，以及在CF4為0.2%時在3種不同沉積溫度(RT、100°C、200°C)下沉積GFZO薄膜。在完成薄膜的製備後，將其中在室溫下且CF4 0.2%摻雜量沉積的薄膜使用高溫爐管做後退火處理，進行3種不同溫度的熱退火處理(200°C、300°C、400°C) ，退火時間60分鐘，並透過各種分析來探討其光電特性與結構特性。
所有系列的薄膜中，在可見光範圍的穿透率皆達89%以上，其中GZO摻雜CF4系列在未摻雜CF4時具有最佳的電阻率為3.372×10-3 Ω-cm；而GZO摻雜CF4 0.2%變溫的系列則是在200°C時具有最佳的電阻率為6.465×10-4 Ω-cm。
在室溫下CF4 0.2%摻雜量GFZO薄膜經過退火處理後，由於結晶性的改善，使得電阻率有30%以上的改善。光學穿透率部分在可見光區有2~3%小幅的提升，顯示薄膜在退火處理後有效的提升其光電與結構特性。

In this study, gallium and fluorine co-doped zinc oxide (GFZO) thin films were deposited on Corning EagleXG glass with RF magnetron sputtering system. We used ZnO targets containing 3wt% Ga2O3, named GZO. Then, we introduced doping gas tetrafluoromethane (CF4) into the chamber during sputtering process.
This experiments use Ar as a background gas and vary CF4/Ar flow ratio. Base pressure, working pressure, plasma power, film thickness, and working distance were fixed at 5 × 10-6 Torr, 5 × 10-3 Torr, 100 W, 330 nm and 8 cm. GFZO thin films with CF4/Ar 0.2% were deposited on glass at the different substrate temperatures of RT, 100°C, 200°C. After thin film deposition, the films prepared at room temperature and CF4 0.2% were annealed at 200°C, 300°C, and 400°C. Effects of F content, substrate temperature, and annealing on electrical, optical and structural properties of thin films were explored.
In all films, the transmittance in the visible range was over than 89%. For RT-deposited and CF4-doped GFZO series, the lowest resistivity of 3.372×10-3 Ω-cm was obtained without CF4 doping, and for CF4 0.2% at the different substrate temperature series, the lowest resistivity of 6.465×10-4 Ω-cm was obtained with substrate temperature at 200°C.
For the RT-deposited and annealed samples, the crystallinity of all thin films was improved, and resistivity decreased >30%. The transmittance showed a slight improvement (2~3%) at visible region. The findings showed furnace annealing enhanced the electrical, optical and structural properties of the films.

致謝 i
摘要 ii
Abstract iii
目錄 iiv
圖目錄 vi
表目錄 viii
第一章 緒論 1
1.1前言 1
1.2研究動機與目的 1
第二章 基礎理論與文獻回顧 3
2.1氧化鋅晶體結構與特性 3
2.2 共摻雜鎵氟之氧化鋅(GFZO)薄膜 5
2.2.1 電學性質 5
2.2.2 光學性質 6
2.3電漿基礎原理 7
2.4射頻磁控濺鍍 8
2.4.1 濺鍍原理 8
2.4.2 直流與射頻濺鍍 9
2.4.3 磁控濺鍍 10
第三章 實驗步驟與方法 11
3.1實驗製程與流程分析 11
3.2基板切割與清洗流程 12
3.3薄膜沉積 13
3.3.1 薄膜沉積設備 13
3.3.2 共摻雜鎵氟之氧化鋅(GFZO)薄膜製程參數 13
3.3.3 真空後退火處理參數 15
3.4薄膜量測分析 16
3.4.1 薄膜結構分析 16
3.4.2 薄膜電性量測 18
3.4.3 薄膜光學量測 19
3.4.4 元素成分分析 20
3.4.5 二次離子質譜儀分析 20
第四章 結果與討論 21
4.1 CF4/Ar流量比對於薄膜特性之影響 21
4.1.1 薄膜沉積速率 21
4.1.2 薄膜XRD分析 22
4.1.3 薄膜SEM分析 24
4.1.4 薄膜AFM分析 28
4.1.5 薄膜電性分析 29
4.1.6 薄膜穩定度分析 31
4.1.7 薄膜光學分析 32
4.1.8 薄膜XPS分析 38
4.2 後退火處理對於GFZO薄膜之影響 44
4.2.1 後退火處理之薄膜XRD分析 44
4.2.2 後退火處理之薄膜SEM分析 46
4.2.3 後退火處理之薄膜AFM分析 50
4.2.4 後退火處理之薄膜電性分析 50
4.2.5 後退火處理之薄膜穩定度分析 53
4.2.6 後退火處理之薄膜光學分析 54
4.2.7 後退火處理薄膜之二次離子質譜儀分析 60
4.2.8 後退火處理薄膜之XPS分析 63
第五章 結論 70
參考文獻 72

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