臺灣博碩士論文加值系統

本研究的主要目的，乃是利用矽沸石前趨物溶膠在硬質的密基材(玻璃試片、矽晶片與高分子塑膠試片，簡稱PES)上製作透明沸石膜層以及利用矽沸石前趨物溶膠當作起始物來合成透明沸石塊材。由原子力顯微鏡所觀察得到的結果，可以知道其沸石膜層是具有良好的透光性及方向結構性。而且藉由實驗條件的改變，可以平版基材上合成出超級疏水(接觸角大於130度)或超級親水(接觸角小於5度)的透明沸石膜層。也可以合成出對n-octane的接觸角小於5度與對純水的接觸角約在30度至40度左右的親油、親水膜。上述這些鍍膜可能應用於觸媒、感測器、半導體工業中低介電常數的鍍膜以及抗刮、抗腐蝕磨、硬鍍膜與低折射率的光學鍍膜。而矽沸石塊材所具有的良好透光度，可能應用於尖端的光學材料的領域中。由實驗中的結果發現位於奈米尺度大小的沸石結晶所組成的沸石膜層是可以具有良好的排列及方向性，而此特殊性質將使這些鍍膜可應用於尖端功能性的材料上的機會便大大地增加了。

Transparent zeolite films on dense substrates (glass, silicon wafer and PES ) and zeolite monolith were made from zeolite sol precursors. The coatings were transparent and in many cases showed a preferred orientation, as observed from AFM. By varying the experimental conditions, super-hydrophobic (contact angle with water greater than 120°) and super-hydrophilc (contact angle less than 5°) could be obtained. Organophilic coatings with water contact angle of 30 ° and 0° for n-octane, could also be prepared. These coatings have potential applications in catalysis, sensor and low-k layer in IC industry as well as for corrosion-resistant, hard-coat, optic and low-RI films. The monolith of silicalite-1 zeolite were optically transparent, which might be important for advanced optozeolitic materials. These results suggest that nanosize zeolites have potential to allow morphological design with applications for advanced functional materials.

摘要........................................................................I
圖目錄......................................................................IV
表目錄......................................................................VII
第一章 緒論...................................................................1
1-1 前言......................................................................1
1-2 沸石簡介..................................................................1
1-3 MFI 沸石..................................................................2
1-4 沸石在基材上的鍍膜........................................................2
第二章 文獻回顧...............................................................4
2-1 沸石鍍膜之製做方法與相關文獻..............................................4
2-2 直接含浸水熱法............................................................4
2-3 二次成長法................................................................7
2-4 氣相轉化法................................................................9
2-5 研究方向..................................................................9
第三章 矽沸石膜及矽沸石塊材之製作............................................11
3-1實驗藥品與相關儀器及基材..................................................11
3-2 基材前處理步驟...........................................................12
3-3 沸石前趨物溶膠之製備......................................................2
3-3.1 純矽沸石前趨物溶膠(silicalite-1 precursor sol)之製備...................13
3-3.2 鈦-矽沸石前趨物溶膠(titanium-silicalite-1 precursor sol)之製備.........13
3-4不同濃度及比例之鍍膜液之製備..............................................14
3-5 沸石鍍膜於平版基材上.....................................................14
3-6 透明矽沸石塊材之製作.....................................................15
第四章 平版基材與塊材之結果與討論............................................18
4-1 鍍膜液是否濃縮對沸石膜成長的影響.........................................19
4-2 沸石前趨物沒有經過80℃真空濃縮...........................................24
4-3 提高鍍膜液濃度對沸石膜成長的影響.........................................28
4-3.1 以中高濃度之前趨物溶膠為鍍膜液.........................................28
4-4 不同的蒸汽條件對沸石膜層成長之影響.......................................33
4-4.1 一段式蒸汽處理之結果...................................................33
4-5 不同的界面活性劑對沸石膜層成長之影響.....................................40
4-5.1 以CTABr當作界面活性劑，以兩段式蒸汽處理所得結果........................40
4-5.2 以P-123當作界面活性劑，以兩段式蒸汽處理所得之結果......................41
4-5.3 以tween 60當作界面活性劑以兩段式蒸汽處理所得之結果.....................42
4-6 不同之沸石前趨物溶膠添加界面活性劑對沸石膜成長之影響.....................43
4-7透明沸石塊材之結果與討論..................................................44
4-8不同實驗條件所得沸石膜層之性質總整理......................................47
第五章 總結..................................................................48
參考文獻.....................................................................49
附錄一 SPA-400 DFM中文操作手冊...............................................51

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