臺灣博碩士論文加值系統

本論文以體型微細加工(bulk micromachining) 研究設計出一種以靜電驅動的微光機電系統(MOEMS)，利用靜電驅動來改變鏡面之變形，達到改變焦距之目的。為了探討此聚焦鏡的性能，本文利用數值模擬來分析，並利用微機電製程實作出元件。
在模擬分析方面，本文以COMSOL Multiphysics多重物理量耦合有限元素工程分析軟體，針對不同鏡面形做數值分析模擬，最後可獲得不同鏡面變形與不同的驅動電壓產生鏡面位移關係與焦距關係等模擬分析結果。
在製程實作方面，利用體型微細加工製作出上電極(鏡面結構)與下電極(鏡面結構緩衝區與接地端)，藉由光阻AZ4620的黏著性以晶片接合技術(Wafer Bounding)將上下電極接合，由此得到完整之靜電驅動微聚焦鏡。

An electro-statically actuated Micro-optical-electromechanical systems (MOEMS) device is designed in this thesis by bulk micromachining. This MEMOS device with deformable mirror can change mirror’s profile to focus light by applying voltage. To investigate the performance of the deformable mirror, numerical analysis is using as analytic method. And the device is made by MEMS fabrication process.
In the simulation, a multiphysical coupling software COMSOL by finite element method is used. Several mirror shapes are analyzed to obtained the relationship between mirror deformation, driving voltage and focal length.
In fabrication process, the top mirror structure and the lower mirror structure are both made by bulk micromachining. By the good adhesion ability of photoresist AZ4620, these two Wafers are bonded to become an electrostatically driven micro deformable mirror.

致謝 I
摘要 II
ABSTRACT III
目錄 IV
表目錄 VII
圖目錄 VIII
第一章 緒 論 1
1-1 前言 1
1-2 研究動機與目的 2
1-3 文獻回顧 4
1-4 內容簡介 9
第二章 微可調變鏡設計與相關理論 10
2-1 微可調變鏡之設計 10
2-2 焦距長度與鏡面結構開口大小及深度之計算 11
2-3 微可調變鏡之板殼理論 12
2-4 微可調變鏡之靜電分析 14
第三章 模擬分析 15
3-1 微調變鏡之分析 15
3-2 微調變鏡模型選擇與參數設定 17
3-2-1 選擇解題模組 17
3-2-2 建立實體模型 19
3-2-3 設定邊界條件 20
3-2-4 實體模型網格化 21
3-2-5 決定解的輸出方式 23
3-3 COMSOL 模擬結果 25
3-3-1 完整鏡面 25
3-3-2 鏡面十字圖形比較 26
3-3-3 鏡面米字圖形比較 29
3-3-4 鏡面同心圓圖形比較 31
3-3-5 鏡面孔洞圖形 35
第四章 製程分析 36
4-1 微調變鏡製程規劃 36
4-2 微懸臂樑體型微加工製程 37
4-2-1 上電極 37
4-2-2 下電極 41
4-2-3 結合結構 45
4-2 光罩配置圖 47
4-3 製程結果 50
4-3-1 成品結果 50
4-3-2 製程問題討論 54
第五章 結果與討論 58
5-1 量測與分析比較 58
5-2 最佳鏡面選擇 60
5-3 最佳鏡面組之應力 61
5-4 驅動電壓引起鏡面變形之關係 65
第六章 結論與展望 71
6-1 本文主要成果 71
6-2 未來展望 72
參考文獻 73

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