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If a microhole with diameter less than 50μm is fabricatedby
traditional tooling system , the tiny tools are worn out or
broken very often , and professional technicians are necessary.
Especially ,it is extremel difficult to perform micromachining
in some materials , e.g. SUS304 or Tungusten Carbide . The
technique of electrodischarge machining E.D.M provides more
advantages than traditional machining in this application area.
By the heat produced by electrodischarge arc ,localized melting
occurs on the surface of working parts.and the andesired mater-
ials are removed . E.D.M , has been one of the most important
manufaturing techniques for certain materials which are diffi-
cult to fabricated . This research has an important contribu-
tion in the field of precision micromachining , at the current
sytage of progress in Taiwan manufacturing industry . In this
research, a multifunctional micromachining center is established
, by integrating E.D.M and servo control system , which can
operate continuously from the preparation of microtools to the
fabrication of micro f elements.The measuring microscope and
SEM are used to investigate the parts made in the machine,in
order to optimize the the machining conditions . In the machine
developed in the laboratory microholes with diameter as
30SYMBOL 109 \f "Symbol"m and depth as 30μm have successfully
fabricated . Besides promoting the technological level in the
field , this research can extend vanious applications .
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