臺灣博碩士論文加值系統

本論文複製具蛾眼結構的奈米模具。首先以聚二甲基矽氧烷翻出負模，以敏化活化方式在PDMS模具上吸附無電鍍鎳沈積時所需之催化晶種，接著以無電鍍鎳技術得到鎳合金奈米結構的正模。以電鍍方式增加鎳層的厚度，最後順利將PDMS負模與鎳正模分離。實驗有系統的變化鍍液成分、析鍍時間、溫度、pH值、敏化及活化處理時間，以光學顯微鏡觀察晶粒型貌及結構之變化。SEM分析顯示鎳層表面全部都是週期性的結構，AFM分析進一步顯示柱狀之奈米結構成功的被複製。

This thesis replicated a nano mold with moth-eye structure. Firstly polydimethylsiloxane (PDMS) was used to replicate a negative mold. The catalytic seeds needed in electroless nickel plating were adsorbed on the negative mold by sensitization and activation of the mold, then nickel alloy positive nano mold was obtained through electroless nickel plating. The thickness of the nickel layer was increased by plating. Finally, the PDMS negative mold could be separated from the nickel positive mold successfully. The bath composition, time of deposition, temperature, pH value of the bath and time of sensitization and activation were investigated systematically. The grain morphology and structure were observed by optical microscope. SEM analysis showed that the nickel layer surface was all periodic structure. AFM analysis further showed that the nano-columnar structure was copied successfully.

摘要 i
Abstract ii
目錄 iii
表目錄 iv
圖目錄 v
第一章 緒論 1
第二章 原理及文獻回顧 2
2.1 蛾眼結構 2
2.2 PDMS特性及應用 3
2.3 無電鍍技術 4
2.4 無電鍍之前處理 5
2.5 無電鍍液組成及性質 6
2.6 無電鍍鎳 7
2.7 無電鍍鎳穩定性及管理 9
2.8電鍍鎳 10
第三章 實驗設備及實驗方法 12
3.1實驗藥品及設備 12
3.1.1 實驗藥品 12
3.1.2 實驗設備 13
3.2蛾眼結構翻膜 13
3.3 PDMS試片前處理 14
3.4 無電鍍鎳 15
3.4.1表面鍍前處理 15
3.4.2無電鍍鎳 16
3.5電鍍鎳 17
第四章 結果與討論 19
4-1 酸鹼鍍液無電鍍鎳磷對PDMS表面沉積之影響 19
4-2 pH值與溫度對鎳析出之影響 20
4-3 敏化活化時間對晶粒大小之影響 24
4-4 翻模後鎳金屬膜表面形貌 26
第五章 結論 37
第六章 參考文獻 38

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