臺灣博碩士論文加值系統

由於奈米金屬結構的表面電漿性質,可使光聚縮到奈米等級、操控 表面電場分佈等諸多光學特性,電漿子學在奈米光子學的領域中有非 常好的應用前景,這篇論文我們將探討金屬介電質奈米複合光柵結構 的表面電漿性質,並提出利用奈米壓印顯影術製作此大面積特殊結構 的方法。在實驗與模擬變入射角反射光譜的分析中,發現此結構有位 於可見光波段的法布裡 -珀羅共振性質,且與理論有相當好的一致性, 也對表面電漿極化子與法布裡 -珀羅共振的電漿子偶合現象做出定性的 解釋。此元件的共振腔結構具有強電場增強、高品質因子及高敏感度 的特性,在電漿子積體電路、生物感測元件或原子陷阱等應用方面有 很好的潛力。

Plasmonics metallic nanostructures can confine and manipulate light down to nanoscale, and give promising scenarios for nanophotonic applications. In this thesis, we have designed and fabricated a new hybrid nanostructure, dielectric-embedded metallic grating, via large patterning nanoimprimt lithog- raphy technique. The plasmonics properties of Fabry-Perot resonance in such device are investigated both experimentally and theoretically. The anticross- ing behavior due to the strong coupling between the surface plasmon polari- tons and Fabry-Perot resonace is observed and explained qualitatively quite well. Our newly designed geometry possesses high electric field enhance- ment, high quality factors and great sensitivity, which will open up a new potential in applications such as integrated plasmonic circuits, bio sensing, atom-trap, etc.

口試委員會審定書 i
致謝 ii
中文摘要 iv
Abstract v
Contents vi
List of Figures viii
1 Introduction 1
2　Theory of surface plasmon polaritons in metallic nano-structures 9
2.1 Definitionofplasmon...................9
2.2 Surface plasmon polaritons at interface between dielectric and metal . . . 11
2.3 Fieldconfinement.............................. 15
2.4 Surface plasmon polaritons in planar multilayer waveguides . . . . . . . 17
2.5 Metal-insulator-metal and insulator-metal-insulator geometries . . . . . . 21
3 Experiment 26
3.1 Angle-resolvedspectroscopy.................. 26
3.2 Atomicforcemicroscopy.......................... 29
3.3 Scanningelectronmicroscopy ....................... 33
4 Plasmonic properties of dielectric-embedded metallic grating 36
5 Conclusions and future work 53

Chapter 1
[1] R.H.Ritchie.Plasmalossesbyfastelectronsinthinfilms.Phys.Rev.,106:874--881, Jun 1957.
[2] E. N. Economou. Surface plasmons in thin films. Phys. Rev., 182:539--554, Jun 1969.
[3] Lukas Novotny and Niek van Hulst. Antennas for light. Nat Photon, 5(2):83--90, 02 2011.
[4] Dmitri K. Gramotnev and Sergey I. Bozhevolnyi. Plasmonics beyond the diffraction limit. Nat Photon, 4(2):83--91, 02 2010.
[5] JonA.Schuller,EdwardS.Barnard,WenshanCai,YoungChulJun,JustinS.White, and Mark L. Brongersma. Plasmonics for extreme light concentration and manipu- lation. Nat Mater, 9(3):193--204, 03 2010.
[6] William L. Barnes, Alain Dereux, and Thomas W. Ebbesen. Surface plasmon sub- wavelength optics. Nature, 424(6950):824--830, 08 2003.
[7] Ekmel Ozbay. Plasmonics: Merging photonics and electronics at nanoscale dimen- sions. Science, 311(5758):189--193, 2006.
[8] Rashid Zia, Jon A. Schuller, Anu Chandran, and Mark L. Brongersma. Plasmonics: the next chip-scale technology. Materials Today, 9(7--8):20 -- 27, 2006.
[9] H.A.Atwater.Thepromiseofplasmonics.ScientificAmerican,296(4):56--62,2007.
[10] Thomas W. Ebbesen, Cyriaque Genet, and Sergey I. Bozhevolnyi. Surface-plasmon circuitry. Physics Today, 61(5):44--50, 2008.
[11] Jeffrey N. Anker, W. Paige Hall, Olga Lyandres, Nilam C. Shah, Jing Zhao, and Richard P. Van Duyne. Biosensing with plasmonic nanosensors. Nat Mater, 7(6): 442--453, 06 2008.
[12] Mark L. Brongersma and Vladimir M. Shalaev. The case for plasmonics. Science, 328(5977):440--441, 2010.
[13] J. Heber. Surfing the wave. Nature, 461(7265):720--722, 2009. [14] R.R.Chance,A.Prock,andR.Silbey.MolecularFluorescenceandEnergyTransfer
Near Interfaces, pages 1--65. John Wiley & Sons, Inc., 2007.
[15] W. L. Barnes. Electromagnetic crystals for surface plasmon polaritons and the ex- traction of light from emissive devices. J. Lightwave Technol., 17(11):2170, Nov 1999.
[16] J. Bellessa, C. Bonnand, J. C. Plenet, and J. Mugnier. Strong coupling between surface plasmons and excitons in an organic semiconductor.Phys. Rev. Lett., 93:036404, Jul 2004.
[17] T. K. Hakala, J. J. Toppari, A. Kuzyk, M. Pettersson, H. Tikkanen, H. Kunttu, and P. Torma. Vacuum rabi splitting and strong-coupling dynamics for surface-plasmon polaritons and rhodamine 6g molecules. Phys. Rev. Lett., 103:053602, Jul 2009.
[18] J. B. Pendry. Negative refraction makes a perfect lens. Phys. Rev. Lett., 85:3966-- 3969, Oct 2000.
[19] Nicholas Fang, Hyesog Lee, Cheng Sun, and Xiang Zhang. Sub-diffraction-limited optical imaging with a silver superlens. Science, 308(5721):534--537, 2005.
[20] H. Raether. Surface plasmons. Springer-Verlag Berlin, 1988.
[21] S. C. Kitson, W. L. Barnes, and J. R. Sambles. Full photonic band gap for surface modes in the visible. Phys. Rev. Lett., 77:2670--2673, Sep 1996.
[22] W. L. Barnes, S. C. Kitson, T. W. Preist, and J. R. Sambles. Photonic surfaces for surface-plasmon polaritons. J. Opt. Soc. Am. A, 14(7):1654--1661, Jul 1997.
[23] T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff. Extraordinary optical transmission through sub-wavelength hole arrays. Nature, 391(6668):667-- 669, 02 1998.
[24] Angela De Leebeeck, L. K. Swaroop Kumar, Victoria de Lange, David Sinton, Reuven Gordon, and Alexandre G. Brolo. On-chip surface-based detection with nanohole arrays. Analytical Chemistry, 79(11):4094--4100, 2007.
[25] Debashis Chanda, Kazuki Shigeta, Tu Truong, Eric Lui, Agustin Mihi, Matthew Schulmerich, Paul V. Braun, Rohit Bhargava, and John A. Rogers. Coupling of plasmonic and optical cavity modes in quasi-three-dimensional plasmonic crystals. Nat Commun, 2:479, 09 2011.
[26] H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia- Vidal, and T. W. Ebbesen. Beaming light from a subwavelength aperture. Science, 297(5582):820--822, 2002.
[27] Aurelien Drezet, Cyriaque Genet, and Thomas W. Ebbesen. Miniature plasmonic wave plates. Phys. Rev. Lett., 101:043902, Jul 2008.
[28] Nanfang Yu, Qi Jie Wang, Christian Pflugl, Laurent Diehl, Federico Capasso, Tadataka Edamura, Shinichi Furuta, Masamichi Yamanishi, and Hirofumi Kan. Semiconductor lasers with integrated plasmonic polarizers. Applied Physics Letters, 94(15):151101, 2009.
[29] Werayut Srituravanich, Liang Pan, Yuan Wang, Cheng Sun, David B. Bogy, and Xiang Zhang. Flying plasmonic lens in the near field for high-speed nanolithography. Nat Nano, 3(12):733--737, 12 2008.
[30] RashidZia,MarkD.Selker,PeterB.Catrysse,andMarkL.Brongersma.Geometries and materials for subwavelength surface plasmon modes. J. Opt. Soc. Am. A, 21(12): 2442--2446, Dec 2004.
[31] B. Sturman, E. Podivilov, and M. Gorkunov. Eigenmodes for metal-dielectric light- transmitting nanostructures. Phys. Rev. B, 76:125104, Sep 2007.
[32] ŞukruEkinKocabaş,GeorgiosVeronis,DavidA.B.Miller,andShanhuiFan.Modal analysis and coupling in metal-insulator-metal waveguides. Phys. Rev. B, 79:035120, Jan 2009.
[33] FuziYangandJ.R.Sambles.Resonanttransmissionofmicrowavesthroughanarrow metallic slit. Phys. Rev. Lett., 89:063901, Jul 2002.
[34] F.J.Garcia-Vidal,H.J.Lezec,T.W.Ebbesen,andL.Martin-Moreno.Multiplepaths to enhance optical transmission through a single subwavelength slit. Phys. Rev. Lett., 90:213901, May 2003.
[35] Y. C. Jun, R. D. Kekatpure, J. S. White, and M. L. Brongersma. Nonresonant en- hancement of spontaneous emission in metal-dielectric-metal plasmon waveguide structures. Phys. Rev. B, 78:153111, Oct 2008.
[36] Young Chul Jun, Ragip Pala, and Mark L. Brongersma. Strong modification of quantum dot spontaneous emission via gap plasmon coupling in metal nanoslits†. The Journal of Physical Chemistry C, 114(16):7269--7273, 2010.
[37] Zongfu Yu, Georgios Veronis, Shanhui Fan, and Mark L. Brongersma. Design of midinfrared photodetectors enhanced by surface plasmons on grating structures. Ap- plied Physics Letters, 89(15):151116, 2006.
[38] Pieter Neutens, Pol Van Dorpe, Iwijn De Vlaminck, Liesbet Lagae, and Gustaaf Borghs.Electrical detection of confined gap plasmons in metal-insulator-metal waveguides. Nat Photon, 3(5):283--286, 05 2009.
[39] Georgios Veronis, Zongfu Yu, Sukru Ekin Kocabas, David A. B. Miller, Mark L. Brongersma, and Shanhui Fan. Metal-dielectric-metal plasmonic waveguide devices for manipulating light at the nanoscale. Chin. Opt. Lett., 7(4):302--308, Apr 2009.
[40] Amir Hosseini and Yehia Massoud. Nanoscale surface plasmon based resonator using rectangular geometry. Applied Physics Letters, 90(18):181102, 2007.
[41] Yousuke Matsuzaki, Toshihiro Okamoto, Masanobu Haraguchi, Masuo Fukui, and Masatoshi Nakagaki. Characteristics of gap plasmon waveguide with stub structures. Opt. Express, 16(21):16314--16325, Oct 2008.
[42] Wenshan Cai, Justin S. White, and Mark L. Brongersma. Compact, high-speed and power-efficient electrooptic plasmonic modulators. Nano Letters, 9(12):4403--4411, 2009. PMID: 19827771.
Chapter 2
[1] C. Kittel and P. McEuen. Introduction to solid state physics, volume 7. Wiley New York, 1976.
[2] H. Raether. Surface plasmons. Springer-Verlag Berlin, 1988. [3] P. B. Johnson and R. W. Christy. Optical constants of the noble metals. Phys. Rev.
B, 6:4370--4379, Dec 1972. [4] Surbhi Lal, Stephan Link, and Naomi J. Halas. Nano-optics from sensing to waveg-
uiding. Nat Photon, 1(11):641--648, 11 2007.
[5] Stefan A. Maier and Harry A. Atwater. Plasmonics: Localization and guiding of electromagnetic energy in metal/dielectric structures. Journal of Applied Physics, 98(1):011101, 2005.
[6] J. J. Burke, G. I. Stegeman, and T. Tamir. Surface-polariton-like waves guided by thin, lossy metal films. Phys. Rev. B, 33:5186--5201, Apr 1986.
[7] Jonathan Hu and Curtis R. Menyuk. Understanding leaky modes: slab waveguide revisited. Adv. Opt. Photon., 1(1):58--106, Jan 2009.
[8] E. N. Economou. Surface plasmons in thin films. Phys. Rev., 182:539--554, Jun 1969.
[9] RashidZia,MarkD.Selker,PeterB.Catrysse,andMarkL.Brongersma.Geometries and materials for subwavelength surface plasmon modes. J. Opt. Soc. Am. A, 21(12): 2442--2446, Dec 2004.
[10] J. A. Dionne, L. A. Sweatlock, H. A. Atwater, and A. Polman. Plasmon slot waveg- uides: Towards chip-scale propagation with subwavelength-scale localization. Phys. Rev. B, 73:035407, Jan 2006.
[11] Dror Sarid. Long-range surface-plasma waves on very thin metal films. Phys. Rev. Lett., 47:1927--1930, Dec 1981.
[12] ThomasNikolajsen,KristjanLeosson,IldarSalakhutdinov,andSergeyI.Bozhevol- nyi. Polymer-based surface-plasmon-polariton stripe waveguides at telecommuni- cation wavelengths. Applied Physics Letters, 82(5):668--670, 2003.
[13] YangHyunJoo,MyoungJinJung,JaewoongYoon,SeokHoSong,HyongSikWon, Suntak Park, and Jung Jin Ju. Long-range surface plasmon polaritons on asymmetric double-electrode structures. Applied Physics Letters, 92(16):161103, 2008.
Chapter 3
[1] X.D.Hoa,M.Martin,A.Jimenez,J.Beauvais,P.Charette,A.Kirk,andM.Tabrizian. Fabrication and characterization of patterned immobilization of quantum dots on metallic nano-gratings. Biosensors and Bioelectronics, 24(4):970 -- 975, 2008.
[2] C Symonds, C Bonnand, J C Plenet, A Brehier, R Parashkov, J S Lauret, E Deleporte, and J Bellessa. Particularities of surface plasmon--exciton strong coupling with large rabi splitting. New Journal of Physics, 10(6):065017, 2008.
[3] J Gomez Rivas, G Vecchi, and V Giannini. Surface plasmon polariton-mediated en- hancement of the emission of dye molecules on metallic gratings. New Journal of Physics, 10(10):105007, 2008.
[4] PiersAndrewandWilliamL.Barnes.Molecularfluorescenceabovemetallicgratings. Phys. Rev. B, 64:125405, Sep 2001.
[5] G.K. Bennig. Atomic force microscope and method for imaging surfaces with atomic resolution, February 9 1988. US Patent 4,724,318.
[6] M. Von Ardenne. Das elektronen-rastermikroskop. Zeitschrift fur Physik A Hadrons and Nuclei, 109(9):553--572, 1938.
Chapter 4
[1] K L Lai, M H Hon, and I C Leu. Pattern formation on polymer resist by solvent- assisted nanoimprinting with pdms mold as a solvent transport medium. Journal of Micromechanics and Microengineering, 21(7):075013, 2011.
[2] P. B. Johnson and R. W. Christy. Optical constants of the noble metals. Phys. Rev. B, 6:4370--4379, Dec 1972.
[3] M. W. Klein, T. Tritschler, M. Wegener, and S. Linden. Lineshape of harmonic gen- eration by metallic nanoparticles and metallic photonic crystal slabs. Phys. Rev. B, 72:115113, Sep 2005.
[4] Amitabh Ghoshal and Pieter G. Kik. Theory and simulation of surface plasmon exci- tation using resonant metal nanoparticle arrays. Journal of Applied Physics, 103(11): 113111, 2008.
[5] U.FANO.Thetheoryofanomalousdiffractiongratingsandofquasi-stationarywaves on metallic surfaces (sommerfeld''s waves). J. Opt. Soc. Am., 31(3):213--222, Mar 1941.
[6] A. Hessel and A. A. Oliner. A new theory of wood''s anomalies on optical gratings. Appl. Opt., 4(10):1275--1297, Oct 1965.
Chapter 5
[1] RandolphKirchainandLionelKimerling.Aroadmapfornanophotonics.NatPhoton, 1(6):303--305, 06 2007.
[2] C. Garcia-Segundo, H. Yan, and M. S. Zhan. Atom trap with surface plasmon and evanescent field. Phys. Rev. A, 75:030902, Mar 2007.
[3] A.Cuche,O.Mahboub,E.Devaux,C.Genet,andT.W.Ebbesen.Plasmoniccoherent drive of an optical trap. Phys. Rev. Lett., 108:026801, Jan 2012.
[4] ChristianStehle,HelmarBender,ClausZimmermann,DieterKern,MonikaFleischer, and Sebastian Slama. Plasmonically tailored micropotentials for ultracold atoms. Nat Photon, 5(8):494--498, 08 2011.