臺灣博碩士論文加值系統

摘要

本文係利用有限元素法之ANSYS分析軟體，分析模擬矽微懸臂樑受到集中力作用產生彎曲時應力與應變的關係，並探討集中負載的施力點位置在寬度方向偏移時對微懸臂樑所能承受之負載的影響；以文獻的實驗所獲得的S-N曲線當做微懸臂樑的疲勞性質，假設在相同的反覆力及循環週期下，模擬不同長度及厚度的微懸臂樑所能承受的疲勞損傷。
分析結果顯示，施力點位置偏離中心越遠，微懸臂樑所能承受之集中力越小，越容易破壞；疲勞損傷分析結果，截面相同的微懸臂樑，在相同的反覆力及循環週期下，所累積的疲勞損傷隨著長度的增加而增大；相同長度而不同厚度的微懸臂樑，厚度較大的微懸臂樑所累積的疲勞損傷較低，相對的疲勞壽命較高。

Abstract

This thesis utilizes Finite Element software ANSYS, to analyze and simulate flexural stress-strain behavior of Si micro-cantilever beam subjected to concentrated loading without and with offset. With fatigue S-N curve obtained from experiment in literature as the property of the beam, the micro-cantilever beam with different length and thickness is simulated to subjected several fatigue periods with various amplitude fatigue cycle, and fatigue accumulated damage is calculated.
The analysis result shows that the more the concentrated loading is offset from the center, the less the micro-cantilever beam can bear the concentrated loading. For micro-cantilever beams with the same cross section under the fatigue periods, the fatigue accumulated damage increases with increase of the length, but decreases with increase of thickness. The fatigue life is inversely proportional to the fatigue accumulated damage.

目錄

中文摘要……………………..……………………………………………Ⅰ
英文摘要…………………………………………………………………..Ⅱ
目錄………………………………………………………………...………Ⅲ
表目錄……………………………...………………………………………Ⅴ
圖目錄…………………………………...…………………………………Ⅷ
第一章 緒論…….……………………….…………………………………1
1.1 前言……….………………………..………………………………1
1.2 文獻回顧………………………………...…………………………2
1.3 研究動機與目的………………………..…………………….……4
1.4 研究方法…….…………………………..…………………………5
1.5 章節提要…….…………………………..…………………………5
第二章 理論基礎…….……………..………………………………………7
2.1 彎曲理論( Bending theory)……..………….……...……………7
2.2 疲勞破壞理論………………...………………….……….………11
2.3 累積損傷理論…………….…………..………….…….…………19
第三章 ANSYS軟體參數化程式設計……………..…………..…...………22
3.1 基本假設………………..…..….…….…………………………...22
3.2 S-N曲線轉移…..………..…..….……..………………………...24
3.3 有限元素法分析步驟法………………..…………...……………37
3.4 程式編寫介紹……………………..………….……..……………41
3.5單晶矽微懸臂樑彎曲試驗分析……..………….……..….………50
3.5單晶矽微懸臂樑疲勞試驗分析……..……….….……..…………57
第四章 理論分析結果與討論………..…………….…..…………………59
4.1樑長度與彎曲應力之關係……………….….…...………………..59
4.2理論分析與實驗結果之比較……………….….…...……………60
4.3 疲勞損傷理論分析預測微懸臂樑之耐疲勞性…..……...………62
4.4 理論分析預測探針施力位置對彎曲應力的影響……....…….…66
第五章 結論與未來展望…………………………..……………..………94
5.1結論……………………………………..………….……...………94
5.2 未來展望……………………………....………….………………95
附錄A………………………………………....…………....………………98
附錄B ……………....…………..…………...……. ……………..………105
誌謝………………………..…………....…………..….………………107

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