臺灣博碩士論文加值系統

本研究的主要目的是發展一低成本、高精度之具即時觀測的三次元量測探頭。本文之三次元量測探頭的研製分為四個主要部份，分別為探棒、懸吊結構、感測器與影像系統。於探棒方面，與別人合作以微放電加工機研製探棒，製作小於100μm的前端圓球，依探棒特性作為設計懸吊結構剛性的根據。而於懸吊結構上，採用微細樑設計，針對所選擇特定的接觸力來設計微細樑直徑、長度與懸吊結構的相關尺寸，並藉由解析公式的理論推導、有限元素軟體ANSYS的分析驗證與實驗測試結果，證明所完成之懸吊結構具有抑制三自由度運動的特性，且搭配所製作的探棒長度，使量測探頭具有各方向等剛性特性，減少觸發時因剛性不同所產生的預行程誤差。
感測器的研製上，採用市售DVD光碟機內的光學讀取頭改良研製而成的光學式位移感測器與角度感測器，做為三次元量測探頭的感測裝置。在探棒前端圓球小於100μm以下已經不易用肉眼辨識，需搭配一影像系統觀察探棒情況。此影像系統運用市售網路攝影機及顯微物鏡加以改良，根據幾何光學來設計所要求的景深、放大率與視野範圍，並利用光學模擬軟體ASAP分析驗證。
當三次元量測探頭的探棒前端圓球碰觸待測物表面，懸吊結構經由探棒所傳達的接觸力而變形，產生的位移量及角度偏擺量，經感測器輸出訊號達到觸發門檻即會產生一觸發訊號，以作為三軸定位平台各軸位移量之依據。同時影像系統觀察探棒前端圓球觸碰情形和探針週遭的表面輪廓情形，當碰到肉眼無法辨識之孔洞時，可以判別探棒該移動位置。
研製而成的三次元量測探頭，經實驗驗證後，具有±2.5μm×±2.5μm×3μm 的X/Y/Z軸量測範圍、不確定度為96.96nm，任意方向觸發時的作用力皆小於0.01mN。

This study develops a low-cost highly sensitive there dimensional touch trigger probe with real-time observation. The development of touch trigger probe is consisted of four parts, which are the stylus with a probe tip, suspension structure, sensors and image systems. The development of probe tip to be smaller than 100μm used Micro-EDM machine, and probe characteristics in accordance with the design of stiffness for the suspension structure. For the design of the suspension structure, this study used micro beam design, and determined the length, and diameter of the micro beam, and the dimension of the suspension structure, according to the selected contact forces. The test results were analyzed and validated with finite element software ANSYS and the theoretic deduction of analytical formula. It proved that the suspension structure has the feature of inhibiting three degree of freedom, lowering the measurement error of the sensor, improving equal stiffness of the entire touch trigger probe with the selected probe length, and reducing the pre-travel error of the touch trigger probe due to different stiffness.
The development of the sensor used optical displacement and angular sensor improved from the pick-up head inside the DVD player available on the market, and used it as the sensory device for the touch trigger probe. The ball is less than 100μm is not easy to identify with the naked eye, the need for an imaging system with a probe to observe the situation. The imaging system using the webcam and microscope, and according to the design of geometrical optics to the required depth of field, magnification and field of view, and to the use of optical simulation software ASAP.
When the probe tip touches the surface of the object to be tested, the resulting contact force would be transmitted from the probe to the suspension structure, and lead to displacement or angular deviation generated by the stiff body connected to the probe, and the sensor records the displacement or angular deviation, and generates a touch-off signal when the deviation reaches the trigger threshold. It would be used as the reference for each axial displacement of the three-axis positioning platform. At the same time, imaging system to observe the probe tip touch the object and surface profile, when it comes to the naked eye does not recognize the holes, you can determine the location of the mobile probe.
Based on the experiment, the X/Y/Z measuring range of the touch trigger probe is ±2.5μm×±2.5μm×3μm, the measuring uncertainty is 96.96nm, probing force is smaller than 0.01mN.

摘要 iv
英文摘要 v
致謝 vii
目次 viii
表目錄 xi
圖目錄 xii
第一章 緒論 1
1.1 研究動機與目的 1
1.2 相關文獻回顧 2
1.3 研究方法與論文大綱 11
第二章 結構設計與分析 12
2.1 簡介 12
2.2 完全碰撞理論 12
2.3 懸吊結構設計與分析 15
2.3.1 探棒的選用準則與製作 15
2.3.2 接觸力設計準則 18
2.3.3 剛性設計準則 20
2.3.4 自然頻率設計準則 21
2.3.5 靜態方程式 21
2.3.6 微細樑與觸發條件的選取 29
2.3.7 懸吊結構設計準則 30
2.4 有限元素分析 32
2.5 懸吊結構加工與組裝 37
第三章 光學感測器之研製 38
3.1 簡介 38
3.2 雷射聚焦探頭簡介 38
3.2.1 讀取頭關鍵元件介紹 39
3.2.2 讀取頭應用原理與光學聚焦方式探討 42
3.2.3 S曲線的量測架設 44
3.2.4 S曲線實際量測與評估 46
3.3 光學式角度感測器之研製 48
3.3.1 量測原理 49
3.3.2 四象限感測器 50
3.3.3 角度感測器量測架設與實驗結果 51
第四章 影像系統之研製 58
4.1 簡介 58
4.2 網路攝影機簡介 58
4.1.1 Webcam關鍵元件介紹 59
4.1.2 網路攝影機應用原理 61
4.3 顯微物鏡介紹與特性 62
4.4 影像系統設計原理 63
4.4.1 影像處理的基本概念 64
4.4.2 鏡頭的光學設計 65
4.4.3 光學模擬分析 73
4.4.4 影像系統製作與測試 74
4.5 三次元量測探頭之組裝 76
第五章 實驗架設與測試結果 78
5.1影像實際觀測 78
5.2 實驗架設與測試結果 79
5.1.1 單方向重複性 84
5.1.2 預行程變化量 85
5.1.3 觸發作用力 89
5.1.4 動態量測實驗 92
第六章 結論與未來展望 94
6.1 結論 94
6.2 未來展望 95
參考文獻 96

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