臺灣博碩士論文加值系統

本篇論文是利用微機電系統技術製作微型多樣本定量取樣器，其中研究的主題，為製做出不同口徑的噴嘴，搭配微流道、微幫浦和微閥門的設計應用，來讓噴嘴噴出定量的液滴，藉由微幫浦氣壓的控制，來決定液滴的重量，微流道則可輸入不同的樣本，而樣本與樣本之間不互相汙染，實驗中也選擇不同黏滯係數的流體，來觀察液滴的變化。
此取樣晶片整合了微流道、微幫浦和微閥門等元件，利用氣壓的方式來驅動微幫浦和微閥門，透過頻率控制器及電磁閥控制ON/OFF開關的時脈，當微幫浦作動時，可把儲存於腔體內的流體樣本，經過薄膜的壓縮，把樣本經由噴嘴滴出，形成液滴，主要的控制條件是氣體壓力、噴嘴的口徑尺寸和不同黏滯係數之流體，當條件的改變，液滴的大小重量也跟著變化。
本研究所開發的晶片，分成上下兩層，上層是利用黃光微影製成搭配負光阻SU-8，製作出微幫浦和微閥門的母模，下層則是利用CNC壓克力板製作出有深淺分別的微流道母模，再利用PDMS翻模；由於PDMS材料固化後為軟性材料，即使在翻模時造成結構產生裂痕，但經由PDMS的熱融合過程能可修復此裂痕，因而能維持結構的完整性。因此本研究所發展出的技術僅需翻模一次，即可製造出晶片，而且母模完成後可重覆翻模製作，克服微機電技術製作三微流體結構的困難度。
上述的微流體檢測系統可以在生物醫學、藥物分析和微液滴等樣本檢測作業有廣泛的應用，此晶片可以比傳統檢測技術更節省時間及經費成本，未來經過技術及元件的改良，精準的控制液滴的輸出，並將實驗室晶片實現到日常生活中，製作成可攜式檢測晶片，應用於日常生活。

The main purpose of this research is fabrication of multiple quantitative micro-sampler using micro-electro-mechanical-system (MEMS) technology. This micro-sampler includes three major components: microfluidic channel, micro-pump/micro-valve and nozzles with different diameters. The applications of micro-system are (1) quantitative droplets by micro-pump pressure control (2) weight of droplets (3) different samples without contamination. Experiment was also conducted by choosing different viscosity of the fluid to observe the change of droplets.
This multiple sampling micro-fluidic chips integrated micro-pump, micro-valve and other components. By controlling the frequency controller and solenoid valve ON / OFF switch of the clock, pressure is the primary power source to drive the pump and micro-valve. Micro-pump actuation is first taken to store fluid sample in the body cavity. After film compression, the sample ejects out through the nozzle to form sample droplets. The main control conditions in this study are air pressure, the size of nozzle and the viscosity of the fluid. When the control conditions change, droplet size and sample weight are consequently changed.
The chips developed by this study are divided into two parts, the upper section is made to use photolithography with a negative photoresist SU-8, to produce micro pump and micro-valve of the mother mold, the lower acrylic sheet is produced using a CNC there were shades of the micro flow channel master mode, re-use of PDMS molds; PDMS material as soft materials after curing, even in the molds from cracks caused by the structure; however, the heat fusion process by the PDMS is able to fix cracks, which can maintain structural integrity.Therefore, the technology developed in this study only molds once, you can create a chip, and can be repeated after the mother mold making molds, MEMS technology to overcome the production of three microfluidic structure difficult.
The micro-fluidic detection system can be applied in biomedical, pharmaceutical analysis and micro-droplet detection operations. It not only gets results faster than the traditional detection techniques, but also lessens funding costs. future improvements through technology and components, available at everyday application development.

中文摘要I
ABSTRACT III
誌謝V
符號說明VI
總目錄VII
圖目錄IX
表目錄XI
第一章 緒論1
1-1 前言1
1-1-1 微機電系統1
1-1-2 微機電系統與微流體技術2
1-2 文獻回顧3
1-2-1 微型檢測晶片3
1-2-2 蠕動式微幫浦5
1-2-3 微閥門6
1-3 研究目的與動機7
1-4 論文架構7
第二章 理論分析9
2-1 基礎流體力學概念9
2-1-1 黏滯性9
2-1-2 表面張力10
2-1-3 液滴物理性質12
2-1-4 可調式氣閥晶片作動原理13
2-1-5 薄膜變形理論14
第三章 微型多樣本定量取樣晶片16
3-1 晶片設計原理16
3-2 微流體晶片製程17
3-2-1 微流道製作18
3-2-2 晶片封裝25
3-3 實驗準備29
3-3-1 控制器29
3-3-2 噴嘴口徑以及氣體壓力的準備30
3-3-3 樣本的準備31
3-4 實驗架設31
第四章 結果與討論33
4-1 液滴的形成33
4-2 不同的壓力及噴嘴口徑之液滴關係34
4-3 不同的黏滯係數液體對液滴大小的影響37
第五章 結論與未來展望39
5-1 結論39
5-2 未來展望39
參考文獻40
(附件一)單晶片控制器程式碼44
作者簡介61
圖目錄
圖1.1 三維微流體結構圖[13]4
圖1.2 多重微型檢測晶片示意圖[14]5
圖1.3 多重檢測微型生醫晶片示意圖[14]5
圖1.4 蠕動式微幫浦作動剖面示意圖[16]6
圖2.1 介於兩平行板之間的流體行為[28]10
圖2.2 毛細管現象作用於小管子之效應[28]11
圖2.3 作用於半顆液滴的自由體圖[28]12
圖2.4 微幫浦及微閥門作動圖[30]14
圖3.1 微幫浦和微閥門設計(上層)16
圖3.2 流道、儲液槽和噴嘴設計(下層)17
圖3.3 晶片完成設計圖17
圖3.4 黃光微影製程流程圖18
圖3.5 旋轉塗佈機19
圖3.6 旋鍍轉速與薄膜厚度關係圖20
圖3.7 熱墊板20
圖3.8 曝光機22
圖3.9 超音波震盪機23
圖3.10 抽真空幫浦與容器25
圖3.11 壓克力母模(上蓋跟下蓋)25
圖3.12 電漿清洗機26
圖3.13 微型混合器之製作流程圖26
圖3.14 製作完成晶片圖27
圖3.15 晶片完整製程示意圖。(a)切割矽晶圓底材(b)塗佈SU-8(c)曝光(d)顯影(e)PDMS灌模(f)將翻膜後的流道貼合在玻璃上27
圖3.16 噴嘴之放大圖28
圖3.17 噴嘴口徑圖。(a)400μm；(b)600μm；(c)800μm 28
圖3.18 儲水槽、流道圖28
圖3.19 微幫浦、微閥門圖29
圖3.20 控制器圖。按鍵A設定ON的時間頻率；按鍵B設定OFF的時間頻率；按鍵C設定完成；按鍵D開始動作。29
圖3.21 電磁閥圖30
圖3.22 氣壓源圖30
圖3.23 壓克力母模(紅圈處為針頭對位孔)31
圖3.24 微型多樣本定量取樣晶片實驗架構示意圖32
圖4.1 樣本填滿流道及儲液槽圖33
圖4.2 樣本填滿噴嘴圖33
圖4.3 以水為樣本之口徑關係圖34
圖4.4 以油為樣本之口徑關係圖34
圖4.5 噴嘴口徑800μm(油)36
圖4.6 噴嘴口徑600μm，樣本為水。(a)30psi；(b)15psi 36
圖4.7 噴嘴口徑400μm，樣本為油。(a)30psi；(b)15psi 36
圖4.8 噴嘴口徑600μm，樣本為油。(a)15psi；(b)30psi 37
圖4.9 噴嘴口徑400μm，油跟水的液滴大小圖37
圖4.10 噴嘴口徑600μm，油跟水的液滴大小圖38
表目錄
表3.1 軟烤時間對照表21
表3.2 曝光強度對照表22
表3.3 曝後烤時間對照表22
表3.4 顯影時間對照表23

中文部份
[1]莊達人, 1995, 「VLSI製造技術」, 高立圖書,台北縣。
[2]陳宣穆，「旋轉體薄殼之大變形分析」，國立成功大學土木工程科學系，碩士論文，2007。
[3]黃俊維， 「微流體晶片系統應用於細胞培養與精確取樣」， 國立成功大學， 博士論文，2007。
[4]楊桂通，「彈性力學」，中國高等教育出版社，1997。
英文部份
[1]A. S. Utada, E. Lorenceau, D. R. Link, P. D. Kaplan, H. A. Stone and D. A. Weitz, “Monodisperse double emulsions generated form a microcapillary device,” Science, 308, 537-541, 2005.
[2]C. T. Chen and G. B. Lee, “Microfluidic systems for formation of micro-droplets inLiquids utilizing active pneumatic choppers,” 第九屆奈米工程暨微系統技術研討會, 2005.
[3]D. J. Harrison, K. Fluri, Z. Fan, C. S. Effenhauser and A. Manz, “Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip,” Science, 261, 895-897, 1993.
[4]Donald F. Young, Bruce R. Munson, Theodore H. Okiishi and Wade W. Huebsch, 2008, 「流體力學精編本」, 學銘圖書, 台北縣。
[5]H. Willaime, V. Barbier, L. Kloul, S. Maine and P. Tabeling, “Arnold tongues in a microfluidic drop emitter,” Phys. Rev. Lett., 96, 054501-054501, 2006.
[6]http://www.niea.gov.tw/analysis/publish/month/44/44th2-1.htm
[7]I. Kobayashi, S. Mukataka and M. Nakajima, “Novel Asymmetric Through-Hole Array Microfabricated on a Silicon Plate for Formulating Monodisperse Emulsions,” Langmuir, 21, 7629-7632, 2005.
[8]J. B. Yoon, C. H. Han, E. Yoon, and C. K. Kim, “Monolithic Integration of 3-D Electroplated Microstructures with Unlimited Number of Levels Using Planarization with a Sacrificial Metallic Mold (PSMM),” 12th IEEE International Conference on MEMS, Jan. 17-21, 624-629, 1999.
[9]J. G. Spencer, “Piezoelectric Micropump With Three Valves Working Peristaltically,” Sensor and Actuators A, 21-23,1990 pp. 203-206.
[10]Julian W. Gardner,Vijay K. Varadan,Osama O. Awadelkari 2005, 「微機電元件」, 滄海書局,台中市。
[11]K. Seiler, D. J. Harrison and A Manz, “Planar chips technology for miniaturization and integration of separation techniques into monitoring systems,” Journal of Chomatography, 593, 253-258, 1992.
[12]M. A. Burns, B. N. Johnson, S. N. Brahmasandra, K. Handique, J. R. Webster, M. Krishnan, T. S. Sammarco, P. M. Man, D. Jones, D. Heldsinger, C. H. Mastrangelo and D. T. Burke, “An Integrated Nanoliter DNA Analysis Device,” Science, 282, 484-487, 1998.
[13]M. A. Unger, H. P. Chou, T. Thorsen, A. Scherer and S. R. Quake, “Monolithic microfabricated valves and pumps by multilayer soft lithography,” Science, 288, pp. 113-116, 2000.
[14]M. U. Kopp, A. J. de Mello and A. Manz, “Chemical Amplification: Continuous-Flow PCR on a Chip,” Science, 280, 1046-1048, 1998.
[15]N. Maluf, “An Introduction to Microelectromechanical Systems Engineering,”Boston:Artech House, 1, 2000.
[16]Q. Xu and M. Nakajima, “The generation of highly monodisperse droplets through the breakup of hydrodynamically focused microthread in a microfluidic device,” Appl. Phys. Lett., 2004.
[17]R. Feynman, “Infinitesimal Machinery”, Journal of Micro Electro Mechanical Systems, 2, pp. 4-14, 1993.
[18]R. Feynman, “There’s Plenty of Room at the Bottom”, Journal of Micro Electro Systems, 1, pp. 60-66, 1992.
[19]S. J. Haswell and V. Skelton, “Chemical and Biochemical Microreactors,” Trends in Analytical Chemistry, 19, 389-395, 2000.
[20]S. M. Joscelyne and G. Trägårdh,”Membrane emulsification — a literature review, “Journal of Membrane Science, 169, 107–117, 2000.
[21]S. Quake and A. Scherer, “From Micro- to Nanofabrication With Soft Materials,” Science ,290, 2000, pp.1536-1540.
[22]S. Sugiura, M. Nakajima, K. Yamamoto, S. Iwamoto, T. Oda, M. Satake and M. Seki, “Preparation characteristics of water-in-oil-in-water multiple emulsions using microchannel emulsification,” Journal of Colloid and Interface Science, 270, 221-228, 2004.
[23]Sergej Fatikow Ulrich Rembold, 「微機電概論」, 高立圖書,台北縣。
[24]T. Kawakatsu, H. Komori, M. Nakajima, Y. Kikuchi and T. Yonemoto, “Production of Monodispersed Oil-in-Water Emulsion Using Crossflow-Type Silicon Microchannel Plate,” Journal of Chemical Engineering of Japan, 32, 241-244, 1999.
[25]T. Kawakatsu, Y. Kikuchi and M. Nakajima, “Regular-Sized Cell Creation in Microchannel Emulsification by Visual Microprocessing Method,” Journal of the American Oil Chemists’ Society, 74, 317-321, 1997
[26]T. McCreedy, “Fabrication Techniques and Materials Commonly Used for the Production of Microreactors and Micro Total Analytical Systems,” Trends in Analytical Chemistry, 19, 396-401, 2000.
[27]Y. C. Tan, J. S. Fisher, A. I. Lee, V. Cristini and A. P. Lee, “Design of microfluidic channel geometries for the control of droplet volume, chemical concentration, and sorting,” Lab Chip, 4, 292-298, 2004.
[28]Y. C. Tan, V. Cristini and A. P. Lee, “Monodispersed microfluidic droplet generation by shear focusing microfluidic device,” Sensors and Actuators, B: Chemical, 114, 350-356, 2006.