臺灣博碩士論文加值系統

本論文主要利用聚苯乙烯奈米球自我組裝的特性，製作出單層、有序且低缺陷的奈米球陣列光子晶體薄板，並以此奈米球陣列製作銀銀奈米球殼。在實驗中主要分成兩個部分探討：(1) 利用旋轉塗佈法於氮化矽薄膜上製作緊密排列的單層奈米球陣列，並利用濺鍍的方式製作銀銀奈米球殼。 (2) 光子晶體穿透光譜的波導模態共振，銀奈米球殼的表面電漿共振，並以平面波展開法分析光子晶體的能帶結構。
在製程的部分，基板利用電漿進行表面改質，並將界面活性劑Triton X-100 和異丙醇以1:400的比例混合後，再以1:1的比例加入奈米球原液。以600 rpm旋轉塗佈，即可塗佈出單層均勻分布之奈米球陣列。將此一奈米球濺鍍上銀，即可得到銀奈米球殼。
在量測的部分，分別量測了奈米球光子晶體薄板與銀奈米球殼的穿透光譜，並且利用RSoft軟體分析光子晶體的能帶結構，結果顯示實驗數據與理論計算相符合。

In this thesis, the fabrication and optical properties of nano-sphere assembled photonic crystal slab (PCS) have been investigated experimentally and theoretically. The experiment includes two parts: (1) the fabrications of single-layer close-packed nano-sphere array and silver shell on silicon nitride (SiN) membrane; (2) the studies of guiding-mode resonance and surface plasma resonance (SPR). In the simulation, the bend structures have been studied by utilizing plane wave method (PWM).
In the fabrication part, the substrate was surface modified by reactive ion etching (RIE). The surfactant Triton X-100 is mixed with IPA by the ratio 1:400, and then the mixture mixed with nano-sphere solution by the ratio 1:1. After Spin-coating onto the substrate with spin rate 600 rpm, the single, uniformly nano-sphere arrays can be take. By Sputtered silver onto the nano-sphere array, the silver nano shell can be take.
In the transmittance measurement, the spectrums were measured. By utilizing RSoft BandSolve, the band structure has been studied, and it matches with the measurement results.

中文摘要 I
ABSTRACT II
誌謝 III
目錄 IV
圖目錄 VII
表目錄 X
第1章 緒論 - 1 -
第2章 文獻回顧與理論探討 - 4 -
2-1 光子晶體薄板 - 4 -
2-2 平面波展開法 - 7 -
2-3 表面電漿 - 11 -
2-4 奈米球之自我組裝特性 - 14 -
第3章 實驗製程與量測架設簡介 - 15 -
3-1 製程設備簡介 - 15 -
3-1-1 超音波震洗機 - 15 -
3-1-2 旋轉塗佈機 - 15 -
3-1-3 對準曝光機 - 17 -
3-1-4 反應式離子蝕刻機 - 19 -
3-1-5 濕蝕刻反應槽 - 20 -
3-1-6 離子束濺鍍機 - 21 -
3-1-7 掃描式電子顯微鏡 - 22 -
3-1-8 微量滴管 - 26 -
3-2 製程簡介 - 27 -
3-3 量測架設 - 31 -
3-3-1 光源（Arc Lamp） - 32 -
3-3-2 單光儀（Monochromator） - 33 -
3-3-3 光強度偵測系統 - 34 -
第4章 結果與討論 - 35 -
4-1 奈米球薄膜品質探討 - 35 -
4-1-1 基板表面改質 - 36 -
4-1-2 旋轉塗佈轉速 - 39 -
4-1-3 界面活性劑 - 40 -
4-2 穿透光譜量測 - 41 -
4-2-1 表面改質對穿透光譜之影響 - 42 -
4-2-2 自組裝奈米球光子晶體之穿透光譜探討 - 43 -
4-2-3 銀奈米球殼之穿透光譜 - 45 -
第5章 結論 - 47 -
參考資料 - 48 -

圖目錄
圖 1.1 Denkov等人在Langmuir上所提出的架構 [2]，用來研究奈米球自我組裝的機制。(1)懸浮微粒（latex suspension）, (2) 玻璃平板（glass plate）, (3) 鐵氟龍環（Teflon ring）, (4) 黃銅平板（brass plate）, (5) 螺絲（screws）, (6) 顯微鏡平台（microscope table）, (7) 玻璃蓋（glass cap）, (8) 顯微鏡目鏡（microscope objective）. - 2 -
圖 1.2氮化矽薄膜上的光子晶體 [27] - 3 -
圖 2.1 (a)正方晶格的柱狀型光子晶體薄板 (b)孔洞型光子晶體薄板 - 6 -
圖 2.2 相近奈米球因毛細作用力而形成晶種 [2] - 14 -
圖 2.3 對流作用力將奈米球帶往晶種區 [2] - 14 -
圖 3.1 超音波震洗機 - 16 -
圖 3.2 旋轉塗佈機 - 16 -
圖 3.3 光罩對準機（Karl Suss, MJB3） - 18 -
圖 3.4 反應式離子蝕刻機 - 20 -
圖 3.5 濕蝕刻反應槽 - 21 -
圖 3.6離子束濺鍍機 - 21 -
圖 3.7掃描式電子顯微鏡架構 [27] - 24 -
圖 3.8 Hitachi S-3000H 掃描式電子顯微鏡 - 24 -
圖 3.9 Hitachi S-4300SE 場發射掃描式電子顯微鏡 - 25 -
圖 3.10 Hitachi TM3000掃描式電子顯微鏡 - 25 -
圖 3.11 微量滴管 - 26 -
圖 3.12 氮化矽薄膜製程 - 28 -
圖 3.13 奈米球陣列塗佈製程 - 30 -
圖 3.14 奈米金屬球殼製程 - 30 -
圖 3.15 自行架設的光學量測系統 - 31 -
圖 3.16 量測系統架構圖 - 32 -
圖 3.17 光源系統（取自Newport Corp.網站） - 33 -
圖 3.18 單光儀（取自Newport Corp.網站） - 33 -
圖 3.19 光強度偵測系統 - 34 -
圖 4.1單層緊密排列之奈米球陣列的SEM照片 - 35 -
圖 4.2 常見的奈米球陣列排列情形 (a) 緊密排列（放大20000倍） (b) 點缺陷（放大50000倍） (c) 雙層、錯位缺陷、點缺陷（放大6000倍） - 36 -
圖 4.3 接觸角示意圖 - 38 -
圖 4.4 表面改質前後接觸角的差異圖 (a) 表面改質前液滴凝聚成珠狀 (b) 表面改質後液滴擴散成水膜 - 38 -
圖 4.5 表面改質前後塗佈結果SEM圖 (a) 表面改質前奈米球幾乎不會停留在基板上 (b) 表面改質後奈米球排列成單層最密排列 - 38 -
圖 4.6不同轉速塗佈結果的SEM圖(a) 100 rpm，出現雙層結構 (b) 500 rpm 排列整齊，單層結構(c) 1000 rpm 分布稀疏，有大面積缺陷 - 39 -
圖 4.7 添加不同比例界面活性劑的奈米球塗佈結果之SEM圖 (a) 添加S=1:2界面活性劑 (b) 添加S=1:1界面活性劑 (c) 添加S=2:1界面活性劑 - 40 -
圖 4.8 同一片氮化矽薄膜重複量測的穿透光譜 - 41 -
圖 4.9 氮化矽薄膜經電漿表面改質前後之穿透光譜比較 - 42 -
圖 4.10 奈米球光子晶體薄板之穿透光譜，箭號為量測波谷所在位置 - 43 -
圖 4.11 以平面波展開法模擬奈米球光子晶體薄板之Band Structure - 44 -
圖 4.12 銀奈米球殼與奈米球光子晶體薄板之穿透光譜，紅色箭號為波峰的位置，黑色箭號實線為EOTair的理論波峰位置，黑色虛線箭號為EOTPS的理論波峰位置 - 45 -

表目錄
表 3.1 奈米球的材料參數 - 27 -
表 4.1 奈米球光子晶體薄板波谷波長位置對應表 - 44 -
表 4.2 銀奈米球殼波峰波長位置對應表 - 46 -

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