臺灣博碩士論文加值系統

在這篇論文當中，我們運用離子高分子材料來運用做為光學系統中的可形變面鏡，以達到自動變焦以及放大的功能。 離子高分子材料跟傳統的電驅動高分子材料(EAP) 比較，在三個方面上都顯示出了更佳的在可形變鏡面應用上的潛力: 更好的可撓性、更大的形變量以及更低的制動電壓 (約1-3伏特)。 在這篇論文當中，我們應用有限元素法(FEM)來模擬並預測離子高分子可形變鏡面的設計。 我們可以以應用灰盒模型近似 (gray-box model approximation) 的有限元素分析法來得到解析解。接著，我們以三個以上不同設計的量測結果來確認模擬值的正確性，另外更多細節以及複雜的設計將會在後段的章節加以討論。 大部分的模擬結果都能夠符合光學系統中對可形變面鏡的要求

In this thesis, Ionic Polymer Metal Composite is used as Deformable mirror in an optical system for auto-focus and zoom functions. Ionic Polymer Metal Composite or IPMC shows greater potentials equivalent to or better than the conventional Electro-active polymer (EAP) as deformable mirror in these three aspects; more flexible, large deformation displacement (comparable to conventional one), low input voltage (1-3V to activate). Finite Element Method or FEM was used in this thesis for simulation process and prediction of IPMC Deformable Mirror (DM) design. From FEM analysis with gray box model approximation, the analytical solution can be obtained. Then, verification process with more than three different designs is conducted to confirm the correctness of the analytical solution. In addition, more details and complex design are reported in the latter chapter. Most of the simulation process seems to be satisfied the requirements as Deformable Mirror in optical system.

口試委員會審定書 #
Acknowledgement i
中文摘要 ii
ABSTRACT iii
CONTENTS iv
LIST OF FIGURES vi
LIST OF TABLES x
Chapter 1 Introduction 1
1.1 Ionic Polymer Metal Composite 3
1.2 Freeform MEMs Deformable Mirror 8
Chapter 2 Design 19
2.1 FEM simulation model used in ANSYS APDL software 19
2.2 FEM simulation model used in ANSYS Workbench software 24
2.3 The Verification process 27
Chapter 3 Fabrication process 32
3.1 Standard IPMC Fabrication Process 32
3.2 Photolithography based and patterned IPMC fabrication process 35
3.2.1 Lithography based IPMC fabrication process 35
3.2.2 Patterned IPMC fabrication process 38
3.3 Methodology to solve analyrical resultant surface force for simulation processes 40
Chapter 4 Simulation results & Improvement 42
4.1 Verification Results 42
4.2 Improvement in designs 50
4.3 Collaborated work related to Freeform MEMs Deformable Mirror 61
Chapter 5 Conclusion and Future Work 63
5.1 Conclusion for IPMC DM part 63
5.2 Conclusion for Freeform DM collaborated work 65
5.3 Future Work 65
REFERENCE 66
APPENDIX 68

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