臺灣博碩士論文加值系統

晶圓廠建廠初期詳細周延的晶圓搬運系統設計，可提昇生產力、降低在製品庫存、避免在量產時發生晶圓儲存系統超載情況。然而，在設計的階段，必須考慮該產業之相關特性與限制條件，方能符合晶圓廠生產現況。
在新廠試產期間或將來量產時，生產線上常存在著優先客戶產品(A Class Customer Lot) 、工程產品(Engineering Lot)或實驗產品(Experiment Lot)等，在本論文概稱為優先晶舟(Prioritized Lot)，因為優先晶舟數量的管理機制，在目前自動化搬運控制系統設計，缺乏詳細的有效規劃，往往影響到一般產品(Normal Lot)的正常運作。茲以0%、10%、20%、30%之優先晶舟數量，以ARENATM3.5為分析工具探討晶圓廠之優先晶舟數量對Intra Bay常用的三種控制法則之影響，以提供Intra bay懸吊式無人搬運車(Overhead Hoist Transporter；OHT)之系統設計參考。
其結果顯示最短運送距離與優先晶舟指定控制法則組合(SD-PLA)，在優先晶舟佔10%情況下，優先晶舟的生產週期、在製品庫存、OHT使用率傾向於較佳，尤其是縮短了產品生產週期，有助於改善對客戶產品交貨滿意度及新產品製程研發時程，但隨著優先晶舟比例(20%)增加，而在製品庫存貨亦增加，無形增加在製品成本。在一般晶舟100%情況下，其顯示最短運送距離與先進先服務控制法則(SD-FIFS)之績效指標傾向優於SD-PLA控制法則，表示不考慮優先晶舟的情況下，控制法則較佳，但不符合生產現況。LD-LIFS控制法則之績效指標明顯劣於其他兩種法則，對優先晶舟造成負面影響。
在晶圓製造過程中，有效縮短晶片搬運距離、降低製程交互污染現象發生及增加產出率(Through out)，常為採購半導體生產設備時的重要績效評估指標，因此，在最後一章論及叢聚式(Cluster)半導體設備作業平台之模擬分析做為未來努力的方向。

Exhaustive design of the Automatic Material Handling System(AMHS) for semiconductor fab. can promote productivity, lower WIP inventory and to avoid overload of wafer stocker while mass-production stage. It is important to take properties and constrains of the semiconductor industry into consideration to meet realistic production activity.
Normal lot , A class customer lot, Engineering lot, or Experiment lot are existing in production line during the stages of pilot run and volume production. They are all categorized into Priority lot in this thesis except normal lot. Quantities of 0%,10%, 20% and 30% of priority lot are chosen as factors to be utilized in ANERATM 3.5 to analyze the effects of various quantity of priority lot upon three control systems of Intra bay to provide parameters of design of Overhead-Hoist-Transport(OHT) system in Intra bay.
Shortest Travel Distance/Priority Lot Assign(SD-PLA) with quantity of 10 % of prioritized lot condition is trend to the most efficient way for cycle time , also for lower WIP inventory and utilization of OHT. It can be of help to improve customers satisfaction and improve the schedule of new product developing . Performance index of Shortest Travel Distance/First In First Service(SD-FIFS) is better than of SD-PLA and LD-LIFS under 100% Norma lots condition. Therefore, SD-FIFS is just good performance for normal lot except Prioritized lot condition. Performance of LD-LIFS is worst case study for simulation. It will effect to Prioritized lot seriously. In wafer production cycle, Major goals are to reduce cross contamination occurred during the process, to increase productivity, and shortest distance of wafer transferring. Therefore, Analysis of simulation for cluster platform of semiconductor equipment mentioned addressed in the last chapter is future goal.

中文摘要i
Abstractii
致謝iii
目錄iv
圖目錄vi
表目錄vii
第一章緒論1
1-1研究背景與動機1
1-2研究目的1
1-3研究範圍與限制條件2
1-4研究方法與步驟3
1-5章節概要5
第二章文獻探討6
2-1 晶圓廠物料自動搬運系統之相關文獻6
2-1-1晶圓廠設施佈置與AMHS之關係6
2-1-2暫存區之相關文獻研究7
2-2無人搬運車派工法則相關文獻回顧15
2-3製造系統投料策略文獻16
第三章系統描述17
3-1 Intra Bay 搬運系統之組成與作業方式17
3-2假設與績效指標定義21
3-2-1假設條件21
3-2-2績效指標定義22
3-3 Intra Bay系統控制方式與優先晶舟指定22
第四章Inter Bay系統模擬架構24
4-1模擬實驗目標及參數諸元24
4-1-1 模擬實驗目標24
4-1-2模擬實驗參數25
4-1-2 參數設定28
4-2模擬軟體模與擬模式構建29
4-2-1 資料模組圖(圖 4-1)29
4-2-2 軌道網路模組圖(圖 4-2)29
4-2-3 OHT控制邏輯圖(圖 4-3)29
4-2-4 優先晶舟控制邏輯圖(圖 4-4)29
第五章模擬結果與分析35
5-1優先晶舟比例對控制法則35
5-1-1 Average Flow Time(平均流量時間)35
5-1-2 Average OHT Utilization(平均車輛使用率)38
5-1-3 Average WIP(平均在製品存貨)39
5-1-4 Through out(產出數目)39
5-2信賴區間分析40
5-2-1 Average Flow Time(平均流量時間)40
5-2-2 Average OHT Utilization(平均車輛使用率)42
5-2-3 Average WIP(平均在製品存貨)43
5-2-4 Through out(產出數量)43
5-3模擬分析與建議44
第六章結論與未來研究方向46
參考文獻48
附錄一51
附錄二55

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