臺灣博碩士論文加值系統

本研究是結合黃光微影製程技術及軟式翻模將光柵製作在脊樑式波導上及兩側壁，因以往的光柵長度較長，製作在脊樑式波導上能使光柵長度縮短得到較佳的濾波效果，也能使元件微小化。
製程中將以簡單複製製程將布拉格光柵製作在高分子脊樑式波導上及兩側壁上，並以此高分子光柵波導元件配合微模轉印技術之微接觸成形技術來製作軟式光柵波導元件模仁，接著利用前述之軟式光柵元件模仁，以軟式印刷技術之複製成形技術，配合OG高分子材料製作出高分子脊樑式波導光柵濾波器。

This study is a combination of the photolithography process technology and micro-mold transfer to fabrication a three face grating of polymer Bragg grating filters.
A simple replication process is used to produce Bragg grating on the three side of the polymer ridge waveguide. A micro-contact method with the micro-mold transfer technology is also used to produce a soft grating waveguide components mold , following by the use of the aforementioned soft mold method. A OG polymer ridge waveguide Bragg grating filters is fabricated.

摘 要..................................................i
Abstract..............................................ii
誌 謝................................................iii
目 錄.................................................iv
表目錄.................................................vii
圖目錄...................................................viii
第一章 緒 論..............................................1
1.1 前言 ................................................1
1.2 研究目的與方法 ........................................1
1.3 論文架構..............................................2
第二章 研究背景與理論探討....................................3
2.1 光波導簡介............................................3
2.1.1 光波導之基本理論.....................................4
2.1.2 光波導元件種類介紹....................................6
2.2 繞射光柵概述..........................................8
2.2.1 光柵的結構..........................................8
2.2.2 光柵的種類..........................................8
2.2.3 光柵的製作及其相關文獻................................9
2.3 微影技術.............................................10
2.3.1 光阻簡介...........................................11
2.3.2 微影對準與曝光技術...................................12
2.4 高分子之軟式微影技術....................................14
2.4.1 微接觸印刷 (Microcontact Printing, μCP).............14
2.4.2 微轉印成形 (Microtransfer Molding, μTM..............16
2.4.3 複製成形 (Replica Molding, REM......................17
2.4.4 毛細管微成形 (Micromolding in capillaries, MIMIC)....18
第三章 脊樑式波導光柵元件製作.................................19
3.1 實驗流程介紹...........................................19
3.1.1 實驗儀器介紹........................................ 20
3.2 脊樑式波導光柵結構製作..................................24
3.2.1 Ultra-i 123光阻特性探討.............................25
3.2.2 脊樑式波導結構元件製作................................25
3.2.3 SU-8厚膜光阻特性探討.................................27
3.2.4 脊樑式波導光柵結構元件製作.............................29
第四章 高分子脊樑式波導光柵濾波器製作..........................31
4.1 微模轉印製程...........................................31
4.1.1 PDMS特性探討........................................31
4.1.2 PDMS製程條件........................................32
4.1.3 UV高分子OG-146特性探討...............................34
4.2 PDMS微模轉印高分子脊樑式波導光柵元件製作...................36
4.3 高分子脊樑式波導光柵濾波器元件保護層製作....................38
4.4 高分子脊樑式波導光柵濾波器轉印之結果量測....................39
4.5 高分子脊樑式波導光柵濾波器元件之光頻譜量測..................41
第五章 結 論..............................................43
參考文獻..................................................44
Extended Abstract........................................46
簡 歷....................................................49

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