臺灣博碩士論文加值系統

隨著產品短小輕薄的發展趨勢，所使用的材料及元件也越來越短小輕薄，而這些材料及元件的熱性質及對溫度的反應常影響著產品的性能，如要研究這些微小測試片對於熱及溫度的反應，微型加熱爐則扮演重要的輔具作用。如果將微型加熱爐與其他檢測儀器搭配，更能發揮即時檢測的功用，譬如：將微型加熱爐放置於光學顯微鏡底下進行檢測，則可研究微小測試片隨溫度的改變或在高溫下隨時間所產生的影響。目前市面上已有各式樣的微型加熱爐，各有其功用，然而如何能更方便拿取及放置微小測試片於加熱爐中，並保持固定及穩定性，常是在操作微型加熱爐時可進一步改善的地方。本文將針對本實驗室現有微型加熱爐(Linkam TS1500)加以修改，在仍保有原加熱爐的使用功能下，增加微小測試片持放的治具(holder)，達到方便取置微小測試片的目的。本文完成裝置的修改後，利用熱電偶量測器及紅外線熱影像儀測量微型加熱爐的溫度分布，以作為日後使用時的參考依據。本文亦將改良後的微型加熱爐，結合本實驗室的探針台(Probe station)進行一些實驗操作，顯示其改良後的操作便利性。

Along with the developmental trends of tiny and thin products, the applied materials and elements are also smaller and thinner. The thermal properties and the reaction to the temperature of those materials and elements usually affect the product performance, so microscopic heating chamber plays an important role on researching the reactions from the micro test pieces to heat and temperature. If the microscopic heater is coupled with the other test instruments, the real-time test will be more functional. By placing the microscopic heater onto an optical microscope and processing the test, for an instance, we can study the effects of micro piece under different temperatures and time at high temperature. Now there are various microscopic heating chambers with specific function on the market; however, there are more improved spaces on how to take and load the micro test piece more conveniently onto the heating chamber and keeping the robustness and stability under operating the microscopic heating chamber. The purpose of this paper is to achieve easier take and load micro test piece after modifying the current microscopic heating chamber (Linkam TS1500) in the laboratory with micro test piece holder under the same original functions of heating oven. After modifying the settings, this paper will be the base for reference in the future for using the thermocouple measurer and far infrared ray thermal image instrument to measure the temperature distribution of microscopic heaters. This paper also shows the operation convenience of the modified microscopic heating chamber when integrated with the probe station from this laboratory for processing the experiment.

誌 謝 i
摘 要 ii
Abstract iii
目 錄 v
圖目錄 vii
表目錄 xi
一、緒論 1
1.1前言 1
1.2文獻回顧 2
1.3研究目的與目標 16
1.4論文架構 18
二、原有之微型加熱爐的構造與操作介紹 19
2.1加熱爐的構造介紹 19
2.2加熱爐的功能介紹 21
2.3各項功能操作介紹 24
2.4尚待改良的地方說明 28
三、微型加熱爐的改良設計與製造 30
3.1改良的地方說明 30
3.2設計時的困難點及解決 35
3.3設計圖呈現及說明 40
3.4加工製作 40
3.5加工材料說明 43
3.6加工製造時的困難點及解決 45
四、實驗量測及討論 47
4.1實驗儀器說明 47
4.2實驗參數設定 53
4.3 Type-K型熱電偶-溫度量測 54
4.4 紅外線熱像儀–溫度量測 58
4.5 Type-K型熱電偶和紅外線熱像儀溫度比較 63
4.6 Type-K型熱電偶-含水冷系統溫度量測 70
4.7 紅外線熱像儀–含水冷系統溫度量測 74
4.8 Type-K型熱電偶和紅外線熱像儀溫度比較-含水冷系統 79
4.9 結果討論 87
4.10微加熱爐結合光學影像檢測 89
五、結論與未來展望 91
參考文獻 92
附錄一 TMS93/94控制器各項功能操作介紹 94
附錄二 TES-1313電子溫度計各項功能操作介紹 96

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