臺灣博碩士論文加值系統

本研究首次在Z切鈮酸鋰基板上以鋅鎳金屬擴散法製作出1×2多模干涉光功率分離器，並且利用此光功率分離器作為分光結構設計馬赫任德電光調變器。此外，並成功製作出利用截角式Y形光波導結構取代原先Y形光波導結構的馬赫任德電光調變器。由實驗結果發現，藍光鋅鎳擴散式波導寬度在1.6μm時為單模態；當鎳與鋅的厚度分別為100Å與500Å時，以830°C的溫度擴散90分鐘之波導具有最佳的光場侷限性。操作在藍光波段下的鋅鎳擴散式1×2多模干涉光功率分離器在多模干涉結構寬度為20μm，長度為600μm下有最好的TM模態傳輸率為75.12%，利用此多模干涉結構分光的馬赫任德電光調變器，在電極長度1公分時，半波電壓為8.9伏特，而訊熄比則約為12.9dB。利用截角式Y形結構分光的馬赫任德電光調變器，在截角距1μm且電極長度1公分時，半波電壓為6.4伏特，而訊熄比為9.8dB。

In this work, Zn-Ni:LiNbO3 1×2 multimode interference power splitters and two kinds of Mach-Zehnder modulators operating at blue-laser wavelength are demonstrated for the first time. To support the fundamental mode only, the linewidth of the Zn-Ni co-diffused waveguides is found to be 1.6µm, and the optimal optical confinement of the waveguides is obtained by diffusing at 830ºC for 90 min when the thicknesses of nickel and zinc are 100 Å and 500 Å, respectively. The best 1×2 multimode interference power splitter exhibits a transmission of 75.12% as the width and the length of multimode interference region are 20μm and 600µm, respectively. The proposed Mach-Zehnder modulators with multimode interference structures operating at blue-laser wavelength are also demonstrated, and the halfwave voltage and the extinction ratio of the device are found to be 8.9V and 12.9dB, respectively. Moreover, the halfwave voltage and the extinction ratio of the Mach-Zehnder modulators with truncated branch structures are found to be 6.4V and 9.8dB, respectively.

中文摘要 Ⅰ
英文摘要 Ⅱ
圖目錄 Ⅴ
表目錄 Ⅶ
第一章 緒論 1
1-1 研究背景 1
1-2 鈮酸鋰晶體簡介 3
1-3 研究動機 4
1-4 內容簡介 5

第二章 波導特性簡介 6
2-1 鈦擴散式鈮酸鋰光波導簡介 7
2-2 鎳擴散式鈮酸鋰光波導簡介 7
2-3 鋅鎳擴散式鈮酸鋰光波導簡介 8
第三章 1× 2多模干涉光功率分離器 10
3-1 多模干涉原理 10
3-1.1 多模干涉效應 10
3-1.2 自我影像效應 12
3-1.3 重疊影像多模干涉現象 14
3-2 元件設計 17
3-3 製作流程 19
3-3.1 晶片切割 20
3-3.2 光微影術 21
3-3.3 金屬薄膜蒸鍍 21
3-3.4 掀離法 22
3-3.5 高溫擴散 22
3-3.6 研磨拋光 23
3-3.7 量測系統 24
3-4 實驗結果與討論 26
3-4.1 1× 2多模干涉光功率 分離器製作結果討論 26
3-4.2 1× 2多模干涉光功率分離器量測結果與討論 27
第四章 藍光鋅鎳擴散式馬赫任德電光調變器之研製 31
4-1 元件原理簡介 31
4-2 利用1× 2多模干涉光功率分離器分光之馬赫任德電光調變器 39
4-2.1 元件設計 39
4-2.2 製程步驟 40
4-2.3 量測系統架設 42
4-2.4 製程討論與量測結果 43
4-2.4.1 製程討論 43
4-2.4.2 調變訊號之量測 44
4-3 利用截角式Y形光波導分光之 馬赫任德電光調變器 46
4-3.1 元件設計 46
4-3.2 製作與量測結果討論 47
4-4 兩種馬赫任德電光調變器比較與討論 51

第五章 結論與未來展望 54
5-1 結論 54
5-2 未來展望 54
參考文獻 56
中英對照 59

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