臺灣博碩士論文加值系統

雖然LIGA製程、類LIGA製程已發展多年，但是，微結構多為平面基板的三維微結構，對於製作曲面基板的微結構製程探討並不多。本研究即是以微機電系統的製造技術—類LIGA製程的UV-LIGA製程技術，在曲面基板上製作出光阻微結構，經微電鑄製程後，翻模出具微結構的鎳金屬模仁，製作出適用於微射出成型的曲面模仁。實驗以壓克力、不鏽鋼板、鋁基板和鍍鎳鋁基材作為基板，將各材質基板加工為三種不同的曲面，其曲面半徑分別為150mm、130mm和100mm，以乾膜光阻於曲面基板上製作出高度為110μm圓柱狀微結構，再配合鎳微電鑄製程，翻模出射出成型用金屬模仁。本研究主要在改善製作曲面金屬模仁的製程：比較溼式光阻和乾膜光阻在曲面基板上使用的限制和優缺點，並改善、解決乾膜光阻在微影製程時產生的問題，以及曲面基板在微電鑄時產生的現象探討，並以ANSYS作微電鑄實驗的電場分析，將模擬結果和實驗結果做比較。

Although LIGA process and LIGA-Like process have been developed for many years, most microstructures are defined and fabricated on planar substrates. There are few research focusing on micro structures with curved substrates. In this study, UV-LIGA technique is used to pattern photoresist microstructures on a curved substrate. By using micro electroforming process, molds with microstructures on curved surface can be fabricated for the process of micro-injection molding. In this experiment, the substrate materials including PMMA, stainless steel, aluminum and nickel plating are studied. Three different curvatures, 150mm, 130mm and 100 mm are employed respectively. By pasting the dry film photoresist and using micro electroforming process, we could form mold inserts for micro-injection molding. The objective of this research is to investigate the related parameters of processes, such as comparing the dry and wet film photoresist on the curved substrates, solving the problems caused by dry film photoresist on a curve surface during lithography process, discussing the phenomena of curved substrates electroforming, analyzing electric field by ANSYS, comparing the electroforming results of simulations and experiments.

目錄
表目錄 III
圖目錄 IV
第一章、緒論 1
1-1前言 1
1-2簡介 2
1-2-1 LIGA製程技術[1][2] 2
1-2-2 LIGA-like製程技術[1][2] 3
1-3研究動機與目的 5
1-4文獻回顧 5
1-5研究方法 7
第二章、實驗原理 8
2-1微影技術原理[1][12][13] 8
2-2微電鑄成型原理[1][2][14] 19
第三章、實驗設計與製程 26
3-1微結構物模仁製作 26
3-1-1曲面基板製作 26
3-1-2微影實驗製程 28
3-1-3微影製程使用儀器介紹 35
3-2微電鑄成型實驗 37
3-3 ANSYS電場分析 44
第四章、結果與討論 45
4-1光阻微結構物基板製作結果與討論 45
4-2微電鑄成型模仁製作結果與討論 54
4-2-1微電鑄成型模仁製作實驗討論 54
4-2-2微電鑄成型模仁製作ANSYS電場分析 70
第五章、結論與建議 86
參考文獻 90
自述 94
著作權聲明 95

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