臺灣博碩士論文加值系統

現今的工程量測技術，針對中等尺寸的機械元件，使用傳統三次元量測儀量測已能完全達到大多數的尺寸精度要求，然而對於量測微小工件尺寸（<< 1mm），卻往往無法得到較高的精度，其原因主要受限於量測探頭系統的性能。各國研究機構為了解決探頭系統性能的極限，紛紛使用價格昂貴的感測設備與費用高昂的製造技術，有鑒於此，如何以較低成本開發微小化接觸式量測探頭系統為本論文的主要研究方向。
在接觸式探頭方面，本論文提出一種創新的製程方法，使用市售的光纖熔接機加以改良，利用尖端放電與表面張力收縮的物理現象自然形成微小探頭圓球。在感測器方面，將已商業化的DVD讀寫頭加以改良研發，最終再配合機構的設計和組裝完成一輕量化、接觸力小、解析度高及重複性佳的微小化接觸式量測探頭。

In modern metrological technology, traditional coordinate measuring machine is suitable for measuring almost all median size workpiece’s three-dimensional features. But in micro-size scale, it is always not to fit higher precision and lower uncertainties demands. In almost all cases, the probing system is the limiting factor of the measurement. In order to overcome the limits of the probing system’s performance, many research centers use so expensive instruments as sensors and invest in manufacturing a probe. Therefore, how to research a high precision touch trigger probing system in limited funds is this study’s aim.
About manufacturing a probe, we use the cleaning feature of a commercial fiber fusion splicer to manufacture 3D micro probes. By utilizing the arc discharging energy and the surface tension of the melting optical fiber, a micro sphere is formed at the tip of the optical fiber. About the sensor, we use the commercial pickup head of DVD player. By the mechanical design with the pickup head, a touch trigger probing system with lightweight, low probing force, high resolution, fine repeatability will be developed.

摘要 Ⅰ
Abstract Ⅱ
目錄 Ⅲ
圖表目錄 Ⅵ
第一章 緒論 1
1-1 研究動機與目的 1
1-2 文獻回顧 2
1-3 研究方法與內容概要 15
第二章 DVD讀取頭的介紹與感測原理 16
2-1 前言 16
2-2 DVD讀取頭內部關鍵元件簡介 17
2-2-1 雷射二極體 17
2-2-2 四象限光感測器 21
2-3 DVD讀取頭光學原理 24
2-3-1 光學分析 24
2-3-2 光學聚焦方式的探討 27
2-3-3 失焦誤差訊號曲線的量測架設 30
第三章 接觸式光纖探頭的製作 33
3-1 前言 33
3-2 製作原理與概念的介紹 33
3-2-1 表面張力 33
3-2-2 表面張力基本方程式 34
3-3 光纖探頭的製作 37
3-3-1 實驗方法與裝置架構 37
3-3-2 實驗流程與步驟 39
3-3-3 實驗結果與量測 42
3-3-4 實驗結論與討論 47
第四章 探頭機構的設計組裝與分析 48
4-1 前言 48
4-2 接觸式探頭系統的架構介紹 48
4-3 DVD聚焦探頭的改良與性能測試校正 50
4-3-1 DVD聚焦探頭的改良與誤差估計 50
4-3-2 DVD聚焦探頭的性能測試與失焦誤差訊號曲線校正 54
4-4 懸臂樑式感測平台的有限元素分析 58
4-5 感測平台與光纖探頭的製作與組裝 63
4-6 剛體假設下之感測平台三聚焦光點垂直位移與探頭受力方向向量數學關係式推導 65
第五章 接觸式探頭觸發性能實驗 69
5-1 前言 69
5-2 感測平台的調校 69
5-3 性能測試實驗 70
5-3-1 系統測試實驗架設 70
5-3-2 測試結果 71
5-3-3 誤差來源分析 75
第六章 結論與未來展望 77
6-1 結論 77
6-2 未來展望 78
參考文獻 82
附錄 87
A 各國微小化三次元量測儀比較表 87

【1】Dong-Yea Sheu, “Micro-spherical probes machining by EDM,” Journal of Micromechanics and Microengineering, Vol. 15, pp. 185-189, 2005.
【2】Sheu, D. Y., “Multi-spherical probe machining by EDM: Combining WEDG technology with one-pulse electro-discharge,” Journal of Materials Processing Technology, Vol. 149, No. 1-3, (2004), pp. 597-603.
【3】K. Takamasu, S. Ozawa, T. Asano, A. Suzuki, R., “Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution),” Japan-China Bilateral Symp. on Advanced Manufacturing Eng., pp.155-158, 1996.
【4】K. Takamasu, M. Hiraki, K. Enami, S. Ozono, “Development of Nano-CMM and Parallel-CMM - CMM in the 21th Century,” Int. Dimensional Metrology Workshop, 1999.
【5】K. Takamasu, M. Fujiwara, H. Naoi, S. Ozono, “Friction Drive System for Nano-CMM,” Proc. Mechatronics 2000, pp. 565-568, 2000.
【6】K. Enami, C. C. Kuo, T. Nogami, M. Hiraki, K. Takamasu, S. Ozono, “Development of nano-Probe System Using Optical Sensing,” IMEKO-XV World Congress, pp. 189-192, 1999.
【7】K. Enami, M. Hiraki, K. Takamasu, “Nano-Probe Using Optical Sensing,” IMEKO-XVI World Congress, pp. 345-348, 2000.
【8】http://www.nano.pe.u-tokyo.ac.jp/xpneumatic-e.html
【9】T. Oiwa, H. Nishitani, “Three-dimensional touch probe using three fiber optical displacement sensors,” Meas. Sci. Technology, Vol. 15, pp. 84-90, 2004.
【10】T. Oiwa, T. Tanaka, “Miniaturized three-dimensional touch trigger probe using optical fibre bundle,” Meas. Sci. Technol, Vol. 16, pp. 1574-1581, 2005.
【11】R. Leach, et. al, “Advances in Traceable Nanometrology at the National Physical Laboratory,” Nanotechnology, Vol. 12, pp. R1-R6, 2001.
【12】G. N. Peggs, A. J. Lewis, S. Oldfield, “Design for a Compact High-Accuracy CMM,” Annals of the CIRP, Vol. 48, No. 1, pp. 417-420, 1999.
【13】A Weckenmann, G Peggs, J Hoffmann, “Probing Systems for Dimensional Micro and Nano Metrology,” Proc. of the 7th ISMTII, Huddersfield UK, 2005.
【14】U. Brandt, T. Kleine Besten, H. Schwenke, “Development of a Special CMM for Dimensional Metrology on Microsystem Components,” Proc. of the 2000 Annual Meeting of the ASPE, Scottsdale USA, pp. 361-364, Oct, 2000.
【15】H. Schwenke, et. al, “Opto-Tactile Sensor for 2D and 3D Measurement of Small Structures on Coordunate Measuring Machines,” Annals of the CIRP, Vol. 50, No. 1, pp. 361-364, 2001.
【16】H. Schwenke, et. al, “Future Challenges in Coordinate Metrology： Addressing Metrological Problems for Very Small and Very Large Parts,” Proc. of IDW Workshop, Knoxville, pp. 2-12, May, 2001.
【17】M. M. P. A. Vermenulen, et. al, “Design of a High-Precision 3D-Coordinate Measuring Machine,” Annals of the CIRP, Vol. 47, No. 1, pp. 447-450, 1998.
【18】W. O. Pril, et. al, “Development of 2D Probing System with Nanometer Resolution,” Proc. of 16th ASPE, pp. 438-442, 1997.
【19】H. Haitjema, et. al, “Development of a Silicon-Based Nanoprobe System for 3-D Measurements,” Annals of the CIRP, Vol. 50, No. 1, pp. 365-368, 2001.
【20】Wim P. van Vliet, Peter H. J. Schellekens, “Development of a fast mechanical probe for coordinate measuring machines,” Precision Engineering, Vol. 22, pp. 141-152, 1998.
【21】W. P. van Vliet, P. H. Schellekens, “Accuracy limitations of fast mechanical probing,” Annals of the CIRP, Vol. 45, No. 1, pp. 483-487, 1996.
【22】Lu. R., “ Design of a nanometer capacitive probe,” Mechatronics design report, Eindhoven University, Stan Ackermans Institute, 1999.
【23】S. W. Kim, “New Design of Precision CMM Based upon Volumetric Phase-Measuring Interferometer,” Annals of the CIRP, Vol. 50, No. 1, pp. 357-360, 2001.
【24】F. Meli, M. Fracheboud, S. Bottinelli, M. Bieri, R. Thalmann, J-M. Breguet, R. Clavel, “High precision, low force 3D touch probe for measurements on small objects,” European Int. Topical Conf., Aachen, Germany, Extended abstract, 2003.
【25】Y. Takaya, S. Takahashi, T. Miyoshi, K. Saito, “Development of The Nano-CMM Probe based on Laser Trapping Technology,” Annals of the CIRP, Vol. 48, No. 1, pp. 421-424, 1999.
【26】Y. Takaya, H. Shimizu, S. Takahashi, T. Miyoshi, “Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer,” Measurement, Vol. 25, pp. 9-18, 1999.
【27】T. Masuzawa, Y. Hamasaki, M. Fujino, “Vibroscanning Method for Nondestructive Measurement of Small Holes,” Annals of the CIRP, Vol. 42, No. 1, pp. 589-592, 1993.
【28】J. Lebrasseaur, T. Bourouina, J. B. Pourciel, M. Ozaki, T. Masuzawa, H. Fujita, “Reso-nant-Type Micro-Probe for Vertical Profiler,” Proc. of the Int. Conf. on Modelling and Simulation of Microsystems, San Diego USA, pp. 285-288, 2000.
【29】http://www.mitutoyo.com/
【30】B. Muralikrishnan, J. A. Stone, J. R. Stoup, “Fiber deflection probe for small hole metrology,” Precision Engineering, 2005.
【31】K. E. Drexler, “Building Molecular Machine Systems,” Trends in Biotehcnology, Vol. 17, Issue 1, January, 1999.
【32】R. J. Hocken, D. L. Trumper, C. Wang, “Dynamics and Control of the UNCC/MIT Sub-Atomic Measuring Machine,” Annals of the CIRP, Vol. 50, No. 1, pp. 373-376, 2001.
【33】“Specification of the Nano Measuring and Positioning Machine,” SIOS Corporation, 2001.
【34】R. K. Leach, “NanoSurf IV: Traceable Measurement of Surface Texture at the National Physical Laboratory, UK,” Journal of Machine Tools & Manufacture, Vol. 41, pp. 2113-2121, 2001.
【35】D. R. Halfpenny, D. M. Kane, “Electric-arc cleaning of optical-fiber endfaces,” Journal of Applied Optics, Vol. 35, No. 22, pp. 4516-4517, 1996.
【36】Optical Pickup for DVD-Rom Drive, Model：Hitachi Ho-1161D, Specifications, 2000.
【37】鄭克勇，半導體雷射及應用，光電科技資料叢書之二十四，1993。
【38】蔡夢倫，DVD用650 nm磷化鋁鎵銦雷射二極體的設計與分析，國立彰化師範大學光電科技研究所碩士論文，2004。
【39】朱朝居，光電讀寫頭之光學系統模擬與測試（上下），光電資訊，第9期，1991。
【40】D. G. Kocher, “Automated Foucault test for focus sensing”, Journal of Applied Optics, Vol. 22, No. 12, pp.1887-1892, 1983.
【41】T. Masuzawa, M. Fujino, K. Kobayashi, “Wire electro-discharge grinding for micro machining,” Annals of CIRP - Manufacturing Technology, Vol. 34, pp.431-434, 1985.
【42】M. Yamamoto, I. Kanno, S. Aoki, “Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films,” Proc. of the 13th Int. Conf. on Micro Electro Mechanical System , pp.23-27, Jan. 2000.
【43】Z. Yu, T. Masuzawa M. Fujino, “Micro-EDM for three-dimensional cavities development of uniform wear method,” Annals of CIRP - Manufacturing Technology, Vol. 47, pp.169-172, 1998.
【44】D. Y. Sheu, “Micro-spherical probes machining by EDM”, Journal of Micromechanics and Microengineering, Vol. 15, pp. 185-189, 2005.
【45】D. Y. Sheu, “Multi-spherical probe machining by EDM: Combining WEDG technology with one-pulse electro-discharge”, Journal of Materials Processing Technology, Vol. 149, No. 1-3, pp. 597-603, 2004.
【46】D. R. Halfpenny, D. M. Kane, “Electric-arc cleaning of optical-fiber endfaces,” Journal of Applied Optics, Vol. 35, No. 22, pp. 4516-4517, 1996.
【47】I. Hatakeyama, H. Tsuchiya, “Fusion splices for optical fibers by discharge heating,” Journal of Applied Optics, Vol. 17, No. 12, pp. 1959-1964, 1978.
【48】M. Tachikura, “Fusion mass-splicing for optical fibbers using electric discharges between two pairs of electrodes”, Journal of Applied Optics, Vol. 23, No. 3, pp. 492-498, 1984.