臺灣博碩士論文加值系統

隨著先進元件的關鍵尺寸逐漸縮小至奈米尺度，一維金屬奈米線由於其在各式先進微電子及磁性元件方面具備很大的應用潛力，因此其相關研究吸引了相當大的注意。然而，若以傳統方法製作週期排列奈米線陣列，不僅需要的製程設備成本昂貴且其產率通常不高，所以本研究主要將著重於在發展不需複雜的微影設備即可製備出大量金屬奈米線之低成本高產率製程技術。
為製作尺寸可調變的鎳金屬奈米線陣列，首先將利用兩次陽極處理製程製備出一系列具有均勻且規則排列之孔洞結構的氧化鋁奈米模板。在本研究中藉由改變不同電解液組成、操作溫度和工作電壓調控，已可掌握製備20-50 nm各種均勻孔徑大小之氧化鋁奈米模板。進一步在控制適當電鍍條件並結合氧化鋁奈米模板技術後，我們成功地合成出大量純鎳金屬奈米線。這些鎳金屬奈米線的尺寸，可分別對應於所使用之氧化鋁奈米模板的孔洞大小和長度，其奈米線直徑和長度可調控在約20-50 nm和60-67 ?m範圍。根據穿透式電子顯微鏡(TEM)與選區電子繞射(SAED)分析，可發現所合成的鎳金屬奈米線皆為多晶，且這些多晶鎳金屬奈米線擁有FCC的晶格結構。另一方面，研究中也發現鎳金屬奈米線對外加磁場的變化十分敏感。本研究中我們實驗證明，利用外加磁場的控制，鎳金屬奈米線會沿著磁場的方向在矽晶基材上組裝排列出大面積二維規則之奈米結構圖案。

As the critical dimensions for advanced devices continue to scale towards the nanometer regime, one-dimensional (1-D) metal nanowires have attracted much attention due to their potential applications in advanced microelectronic and magnetic devices. However, the conventional methods used to fabricate periodic nanowires arrays are usually high-cost consuming and low output efficiency. Therefore, this study mainly focused on the synthesis of large-scale nickel metal nanowires at low-cost and high-throughput without complex lithography.
To fabricate the size-tunable Ni metal nanowire arrays, the anodic alumina oxide (AAO) templates with 2-D periodic nanopore structures were firstly prepared by the two-step anodizing process. In this work, the pore sizes of AAO templates can be tuned from 20-50 nm by varying the component of electrolyte, the processing temperature, and the applied anodic voltage. Under controlled electrodeposition conditions, a large amount of pure Ni metal nanowires were successfully synthesized by using the AAO template technique. The diameters and lengths of the as-synthesized Ni nanowires were measured to be about 20-50 nm and 60-67 ?m, respectively, corresponding to the pore sizes and thickness of AAO templates. Based on the TEM and SAED analysis, it is found that all the prepared Ni nanowires were polycrystalline, and these polycrystalline Ni nanowires possess a FCC structure. On the other hand, the as-synthesized Ni nanowires were found to be very sensitive to the magnetic field. In this study, we experimentally demonstrated that by applying external magnetic fields, these Ni nanowires can be controlled to align along the directions of applied magnetic fields and assemble into a 2-D ordered pattern on Si substrate.

第1章 緒論 1
1-1 前言 1
1-2 陽極氧化鋁模板 2
1-3 金屬奈米線的製備 6
1-4 金屬奈米線電性性質 9
1-5 研究動機 9
第2章 實驗步驟 11
2-1 氧化鋁模板製備 11
2-1-1 利用草酸作為陽極處理溶液製作氧化鋁模板 11
2-1-2 利用硫酸作為陽極處理溶液製作氧化鋁模板 12
2-2 鎳金屬奈米線沈積 13
2-3 鎳金屬奈米線磁性排列 14
2-4 鎳金屬奈米線電性量測分析 14
2-4-1 原子力顯微鏡 14
2-4-2 掃描式電子顯微鏡 15
2-4-3 穿透式電子顯微鏡 15
2-4-4 高分辨穿透式電子顯微鏡與X光能量散佈光譜儀 16
2-4-5 半導體量測分析儀 16
第3章 結果與討論 17
3-1 氧化鋁模板 17
3-1-1 商用氧化鋁濾膜 17
3-1-2 草酸製程 17
3-1-3 硫酸製程 22
3-2 電化學沈積鎳金屬奈米線 24
3-3 鎳金屬奈米線磁性排列 27
3-4 鎳金屬奈米線電性量測 28
第4章 結論與未來展望 29
4-1 結論 29
4-2 未來展望 29
4-2-1 不同形狀之奈米線及奈米管和其他奈米結構研究 29
4-2-2 奈米散熱器 30
4-2-3 直立於矽晶基材上之金屬奈米線/奈米管陣列 30
參考文獻 31

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