臺灣博碩士論文加值系統

本實驗使用水熱法(Hydrothermal)合成氧化鎢奈米桿(WO3 Nanorods)，再使用氣相傳輸法(Vapor Solid Transportation)合成出氧化鎢-碲(WO3-Te)的奈米複合結構材料。水熱法透過調整水溶液的酸鹼值，並且在水溶液中進行反應，以固定的時間、溫度可以穩定得到直徑約250-300nm的WO3奈米桿。再將WO3奈米桿的水溶液，均勻滴定在固定大小的矽基板之上，利用水平高溫管狀爐，以Te粉末作為原料進行高溫氣相傳輸，獲得WO3奈米棒表面，覆滿壁厚為100nm的Te奈米片。
合成的產物利用SEM、XRD、TEM的觀察分析，確認產物的組成，之後使用網版印刷的方式製作出簡易且穩定的電路元件，將固定濃度的產物與電路元件結合，以長時間烘烤的方式，製作出可以針對NO2濃度偵測的氣體感測元件。
實驗結果顯示，WO3奈米棒以方向性聚合的機制沿著[001]方向成長。藉由XRD得知，WO3以及Te的繞射訊號相當明顯；經由EDS針對WO3-Te奈米材料的能譜分析，得到Te奈米片重量比有89%，原子占比約83.7%，間接證明此複合材料是以類似核-殼結構的包覆組成。NO2氣體感測方面，WO3-Te奈米複合結構於200℃有最佳的靈敏度及最佳的回復速率。另外，WO3-Te奈米複合結構於室溫操作對5ppm的NO2靈敏度也達到30，這是單一材料WO3無法達到的效果。

Tunsteng oxide nanorods (WO3 Nrds) were synthesized through hydrothermal method which was reacted in solvent and was adjusted to pH2 , then heated at certain temperature for 24hr. and then tungsten oxide-tellurium (WO3-Te) heterogeneous nanostructure were grown on silicon (Si) substrate with WO3 nanorods covered, tungsten oxide-tellurium by which were synthesized through vapor transport (VS) method in a horizontal high-temperature tube furnace, with telluriun powder material. And Te nanosheet with radius from 100 to 300 nm were obtained on WO3 nanorods, the most appropriate process for the WO3-Te heterostructure were determined from morphology and composition analysis. Scanning electron microscopy (SEM) was used to observe the morphology of nanostructures, with X-ray diffraction analyzer (XRD) for the composition detected, and transmission electron microscope (TEM) were used to conferm the composition of the nanostructure .
The result of TEM analysis showed that WO3 nanorods were grown with OA (Oriented aggregation) mechanism with the direction [001], and XRD analysis for the congregation nanostructure has display the distributed element of Te, which is more percentage of atomic about 89% on WO3-Te congregations.
We have detected NO2 gas from 5 to 50ppm successfulyu by using WO3 and WO3-Te nanostructrues , specially WO3-Te could operated in room temperature, and receiving a distinguished sensitivity for 5ppm of NO2.

摘要................................................................................................................................i
Abstract..........................................................................................................................ii
目錄...............................................................................................................................iii
圖目錄........................................................................................................................... v
表目錄..........................................................................................................................vii

第一章 緒論................................................................................................................1

第二章 文獻回顧........................................................................................................2
2.1 環境中的二氧化氮(NO2).............................................................................2
2.2 氣體感測器.................................................................................................. 2
2.3 金屬氧化半導體的氣體感測機制...............................................................2
2.3.1金屬氧化半導體的氣體感測方法及定義...................................................6
2.4 WO3一維奈米結構研究與製備..................................................................7
2.5 一維奈米Te的研究與製備.........................................................................9
2.6 奈米金屬氧化半導體氣體感測元件的發展.............................................10
2.6.1操作溫度對氧化金屬半導體靈敏度的影響...........................................10
2.6.2奈米結構對靈敏度的影響.......................................................................11
2.6.3 p-n接面對氧化金屬半導體感測NO2氣體的影響...............................13
2.7 研究動機.............................................................................................................15

第三章 實驗方法與步驟..........................................................................................16
3.1 實驗設計及流程.........................................................................................16
3.2 水熱法合成WO3奈米桿...........................................................................17
3.3 實驗前基板處理………………….............................................................17
3.4 氧化鎢奈米桿與碲奈米片的合成.............................................................17
3.5 表面形貌觀察及材料成分分析.................................................................19
3.6 氣體感測元件的製作與量測.....................................................................19

第四章 結果與討論...................................................................................................21
4.1 WO3奈米桿的合成與材料分析.................................................................21
4.2 WO3-Te複合材料的合成與材料分析..................................................... ..27
4.3 氣體感測的特性及定義..............................................................................37
4.3.1 WO3的NO2氣體感測結果……………………..…………………….......37
4.3.2 WO3及WO3-Te的NO2氣體感測結果.....................................................43

第五章 結論...............................................................................................................50
參考文獻.......................................................................................................................51

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