臺灣博碩士論文加值系統

一般傳統上的自動變焦系統是由一系列的透鏡組所組成，再藉由馬達或電磁驅動的方式來移動透鏡的位置達到變焦的效果，然而這種方式需要較大的空間，且重量也相對較重，不太適合現在微型鏡頭的趨勢，因此，我們設計了一款面鏡反射式的變焦系統，反射式的變焦系統除了能夠利用折疊光路來使空間的運用更有效率外，還可以有效降低色散的現象，對於現在的微型鏡頭來說，此設計可以更貼近輕薄短小。
在這裡，我們使用一種離子性高分子金屬複合材料(IPMC)來製作可形變的面鏡，藉由改變面鏡的曲率來達到變焦的效果，利用遮罩的方式，可以定義出任意形狀的可形變面鏡，而因為這種材料的特性，我們可以用較低的電壓來達到較高的形變量，約3伏特就可以驅動。此外，為了使IPMC 的表面能夠當作光學反射面，我們使用聚二甲基矽氧烷(PDMS)來改善IPMC表面的粗糙度，使得粗糙度降低至18 nm 的程度，最後，我們把製作完成的可形變面鏡放入我們設計好的光學變焦模組裡面測試，分析所得的影像。

In order to meet modern requirement, electronic products are made smaller and thinner. We used deformable mirrors (DMs) in optical systems that can make camera modules thinner and lighter in electronic products. An Ionic-Polymer Metal Composite (IPMC) plays the critical role in our design of deformable mirrors. It has good bending feature and can be driven by low voltage (usually less than 5 volts). Other technologies such as liquid lenses, MEMS deformable mirrors, and liquid crystal lens, all need higher voltage to reach similar optical power of IPMC. After fabrication of IPMC deformable mirrors, we used PDMS on one surface to improve the surface roughness before reflective metal is deposited. Key characteristics of IPMC deformable mirror are demonstrated in the paper. By coating a silver layer on the smoothed IPMC surface, the reflection is up to 90%. From simulation results, the zoom ratio of this module can be expected 1.8 times.
Experimentally, the deformable mirror can be changed from flat to 65 diopters (m-1) by only 3 volts. In this paper, we demonstrated a reflective optical zoom module with three mirrors and two deformable mirrors.

誌謝 ii
中文摘要 iii
ABSTRACT iv
CONTENTS v
LIST OF FIGURES vii
LIST OF TABLES xi
Chapter 1. Introduction 1
1.1 Ionic polymer metallic composite 3
1.2 Deformable mirror 8
1.3 Liquid deformable mirror 10
1.4 MEMS deformable mirror 13
1.5 Design the IPMC deformable mirror 15
1.6 Design concept 17
Chapter 2. Fabrication 19
2.1 IPMC fabrication process 20
2.2 Surface improved patterned IPMC deformable mirror 26
Chapter 3. Simulation Results 29
3.1 Optical zoom system design by deformable mirror 29
3.2 Reflective optical zoom system layout 30
3.3 Simulation result 32
3.4 Aberration 37
3.5 Simulation model 39
Chapter 4. Experiment Result 48
4.1 Surface resistance 48
4.2 Surface roughness 49
4.3 The measurement of reflectivity 52
4.4 Center displacement results 56
4.5 Response time 62
4.6 Optical zoom module 64
4.7 Reliability test 66
Chapter 5. Conclusions 68
Chapter 6. References 69

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