臺灣博碩士論文加值系統

本論文旨在藉由氮元素的摻雜以縮短二氧化鈦薄膜的能隙，讓薄膜在可見光波段仍有光觸媒效果。
　　本實驗分作兩部分，第一部分先用冷陰極電漿電弧法先鍍製二氧化鈦薄膜，以了解其基本特性。並利用電子顯微鏡、原子力顯微鏡觀察薄膜表面結構，且建立橢圓偏振儀的最佳擬合模型，求出其光學常數。接著再以不同分壓的通氮量為變因，製備摻氮的二氧化鈦薄膜，以先前最佳的橢圓偏振儀模型予以擬合，探究各種氮分壓的光學性質變化。實驗結果發現，折射率與鍍率會隨著通氮量的增加而遞增，但在氮分壓4.4×10-3Torr的時候，折射率出現轉折向下。
　　第二部分為薄膜的能隙、光觸媒效果及鍵結方式之研究。由於本研究鍍製的薄膜均為非晶向性，故使用橢圓偏振儀的TL-model擬合能隙之大小。實驗結果顯示，當通氮量增加時能隙會逐步縮小，而當氮分壓上升到3.0×10-3 Torr時，上升的趨勢改變。同時亞甲基藍實驗也證明了這種情況。此時，摻氮二氧化鈦薄膜的鍵結方式已經有了改變，亦能從X光光電子能譜儀佐證這個轉折的變化。本研究已有效的將原本二氧化鈦薄膜的能隙縮小，並以亞甲基藍實驗證實光觸媒效果。

The purposes of this studyis to reduce the energy gap of TiO2 films by doping nitrogen, so that the films can still have phtocatalytic effect in visible light.
This experiment consists of two parts. At the first part, we deposit TiO2 film by arc ion plating to understand its general characteristic. At the same time ,we observe the films surface structure by Electron Microscope(SEM) and Atomic Force Microscope(AFM) and find the best ellipsometry model to fit Optical constant. And then we use different nitrogen pressure to deposit the N-doped TiO2 films and fitting by the best ellipsometry model. Research the relationship between nitrogen pressure and optic characteristic. The results show that index of refraction and deposition rate increase as the flux of nitrogen increases, but index of refraction turn down when the nitrogen pressure is 4.4×10-3 torr.
At the second part, we research the energy gap of film, phtocatalytic effect and binding . Because all the film in this research are amorphous, we use the ellipsometry TL-model fitting band gap. The results show that when the flux of nitrogen increases, the energy gap is gradually narrowing, but it will turn up when nitrogen pressure up to3.0x10-3torr. Besides, we proved the accordingly by photocatalyst Methylene Blue test, and when the above-mentioned happened, the N-doped TiO2 films binding had been changed. We can also evidence the change with XPS.
In conclusion, we have been narrowed the original TiO2 film energy gap effectively, and confirmed the phtocatalytic effect through Methylene Blue test in this research.

中文摘要 i
英文摘要 ii
誌謝 iv
目錄 v
圖目錄 viii
表目錄 xi
第一章緒論 1
1.1　前言 1
1.2　材料特性 2
1.3　文獻回顧-元素摻雜對TiON之影響 3
第二章實驗理論 4
2.1　能隙 4
2.2　光觸媒 7
2.3　比耳-藍伯定理（Beer-Lambert Law） 9
2.4　薄膜沉積 10
2.4.1　薄膜沉積理論 10
2.4.2　物理氣相沈積法 12
2.5　冷陰極電弧電漿沉積法 12
第三章實驗儀器與量測裝置 15
3.1　實驗流程 15
3.2　實驗設置及參數設定 16
3.3　量測儀器 17
3.3.1　Varian Cary 5E光譜儀 18
3.3.2　橢圓偏振儀（Ellipsometer） 21
3.3.3　場發射掃描式電子顯微鏡（FEG-SEM） 28
3.3.4　原子力顯微鏡（AFM） 28
3.3.5　 X-ray繞射儀（XRD） 29
3.3.6　 X光光電子能譜儀（XPS） 31
第四章實驗結果與討論 35
4.1　氮氧化鈦薄膜研究 35
4.2　實驗方法 35
4.2.1　二氧化鈦薄膜與摻氮氣之氮氧化鈦薄膜 35
4.2.2　亞甲基藍溶液分解實驗 36
4.3　光學常數之模擬與分析 41
4.4　光學特性之研究 51
4.4.1　TiON薄膜穿透光譜 51
4.4.2　TiON薄膜之XRD分析 53
4.4.3　TiON薄膜之能隙計算 55
4.5　X光光電子能譜儀之分析 57
4.5.1　氧元素之XPS分析 58
4.5.2　鈦元素之XPS分析 61
4.5.3　氮元素之XPS分析 63
4.6　亞甲基藍實驗結果分析 65
4.7　實驗結果討論 66
第五章結論 68
參考文獻 69

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