臺灣博碩士論文加值系統

本論文乃針對多晶矽薄膜太陽電池利用金屬誘發結晶化技術進行製程研發。由於金屬誘發結晶法擁有低溫、低成本、製程簡單、可大面積化之優點，故本研究利用不同厚度比例之鋁、矽薄膜，在低於600℃條件下退火，讓鋁與矽得以置換，使非晶矽結晶變成多晶矽，作為種晶層（seed layer）以利後續之矽薄膜沉積；此外，配合便宜之玻璃基板可降低成本。本研究運用FE-SEM、XRD、Raman、AES、SIMS等量測分析儀器觀察並探討退火後之鋁、矽薄膜置換情形，及矽薄膜之轉晶情形等。此外，本研究之太陽電池採p-i-n結構，為了有效提昇太陽電池的轉換效率，其i層比p、n層來的厚，藉以降低載子之復合而獲得較高之光電流；正面電極選用ITO透明導電氧化物，以增加入射光有效進入電池元件的比例；背面電極則採用鋁薄膜，此一鋁薄膜同時兼具背面反射層之作用，使入射光能再反射回電池當中被吸收，從而增加電池之光電流。

The processing of the poly-crystalline silicon thin film solar cells with metal-induced crystallization（MIC）method has been investigated in this work. MIC process has the advantages of low-temperature, low-cost, simple, and capable for large-scale production. In this work, the aluminum and a-Si thin films of various thickness ratios were annealed below 600℃ to form the poly-Si film as the seed layer for the subsequent silicon film depositions. Besides, glass substrates were used to reduce the device cost. The FE-SEM, XRD, AES, SIMS and Raman spectrometry were used to characterize the exchange of the Al and Si films, and the recrystallization of the MIC process. The proposed structure of the thin film solar cell is p-i-n with i-layer much thicker than the p- and n-layers. This can reduce the carrier recombination rate that enhances the photo-current and the conversion efficiency of the solar cell. Transparent ITO film is used as the front metal contact to enhance the light absorption. Aluminum film is used as the rear contact metal and the back surface reflector (BSR) that can enhance the long wavelength photon absorption for the cell.

目錄 頁次
中文摘要 ………………………………………………………………… i
英文摘要 ………………………………………………………………… ii
誌謝 ………………………………………………………………… iii
目錄 ………………………………………………………………… iv
表目錄 ………………………………………………………………… v
圖目錄 ………………………………………………………………… vi
一、 緒論…………………………………………………………… 1
1-1. 前言…………………………………………………………… 1
1-2. 研究目的……………………………………………………… 2
二、 基本理論……………………………………………………… 3
2-1. 太陽電池發電理論…………………………………………… 3
2-2. 光電流與暗電流……………………………………………… 3
2-3. 開路電壓與短路電流………………………………………… 4
2-4. 太陽電池效率轉換…………………………………………… 5
2-5. 效率之提升…………………………………………………… 6
2-6. 文獻探討……………………………………………………… 7
三、 研究方法與實驗……………………………………………… 12
3-1. 研究方法……………………………………………………… 12
3-2. 太陽電池之製作……………………………………………… 12
3-3. 量測方法……………………………………………………… 13
四、 結果與討論…………………………………………………… 16
4-1. SEM量測結果探討…………………………………………... 16
4-2. XRD量測結果探討…………………………………………... 17
4-3. Raman量測結果探討………………………………………… 19
4-4. AES量測結果探討…………………………………………… 20
4-5. SIMS量測結果探討………………………………………….. 22
五、 結論…………………………………………………………… 23
六、 未來展望……………………………………………………… 24
參考文獻 ………………………………………………………………… 25
附錄一 ………………………………………………………………… 76
作者簡歷 ………………………………………………………………… 117

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