臺灣博碩士論文加值系統

光學尺主要是用來量測位移量，但若光學尺與移動軸不平行則會產生阿貝誤差，導致在量測位移量時，會產生誤差使得讀值不正確。因此本文提出三自由度光學尺，可以在量測位移的同時，即時量測出阿貝誤差，並加以補償使位移量測的結果更為準確。三自由度雷射光學尺系統於2mm行程中，滾動度誤差最大約0.6arsec、搖擺度誤差最大約0.81arsec，而線性位移誤差最大約為0.4μm，未來對於微小化與商品化非常有潛力。

Encoders are widely used as the positioning sensors. If the encoders and moving axis not to match, it were produced ABBA error. Three-degree-of-Freedom Laser Linear Encoder based on diffraction and interference is presented. The displacement field is measured using a polarization interference technique and the angle is measured using a near-axis optical theorem. We have developed a laser linear encoder that can detect displacements relative to an external grating scale with residual error of 200 nm and can detect angle error relative to quadrant detectors measure with residual error of 0.4 arsec.

中文摘要 i
英文摘要 ii
目錄 iii
表目錄 v
圖目錄 iv
第一章研究目的、背景與重要性 1
背景 1
1-1研究目的與本文架構 2
1-2平台的定位與偏擺誤差概論 4
1-3文獻回顧 6
第二章 基礎理論及系統元件介紹 9
2-1光學理論 9
2-2系統主要元件介紹 10
第三章 移動平台的誤差來源 17
3-1靜態誤差 17
3-2 熱變形誤差 17
3-3 機構幾何誤差 18
3-4移動平台運動誤差之原因 19
第四章 三自由度雷射光學尺量測系統 21
4-1 量測目的與系統架構 21
4-2 量測原理 22
4-3滾動度、搖偏度誤差數學推導 28
4-4 線性位移量測數學模型 29
4-5 四象限位置感測器校正架構與原理 34
4-6 四象限位置感測器校正實驗方法與結果 36
4-7 量測系統實驗與結果 39
4-8 DVD讀頭角度驗證 50
4-9 四象限位置感測器角度驗證實驗結果 51
4-10 使用DVD讀頭搖偏度（Yaw）、滾動度（Roll）與定位（Px）誤差檢測 54
第五章 結論與未來展望 62
5-1 結論 62
5-2 未來發展 63
參考文獻 64

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