臺灣博碩士論文加值系統

矽晶棒切割成晶圓的過程產生了大量的切割廢料，若能回收處置，可達到環保與降低成本的目的。為了提升所回收的矽與碳化矽粒子之後續應用價值，金屬的去除非常重要。本實驗結果發現離心法可分選矽、碳化矽；然而，輔以磁力作用時，僅在廢料/稀釋劑比值為3/7下，方能使富矽粉體中的鐵初步被去除。酸洗研究上發現，硫酸對金屬雜質均有良好的去除效果，可達鐵殘餘量28.83ppm；進一步利用擦洗作為前處理可使鐵殘餘量降低至25.99ppm。反應動力學結果可知，硫酸進行酸洗有較高反應階數，亦即對濃度較敏感；檸檬酸會有最低活化能、硝酸則有最高活化能。此外，使用超音波震盪混合可在短時間移除大量的鐵，但是長時間下，採用攪拌器進行混搖的除鐵效果好。本研究成功利用磁力輔助離心力法分選切削廢料中矽與碳化矽，並初步去除鐵雜質；搭配酸洗法可將金屬雜質殘餘量降至100ppm以下，且使用的酸濃度甚低，可免除對環境之傷害，達到製程簡化、成本低廉之目標。

Silicon ingot cut wafer produce abundant silicon sawing waste during the sawing process. If it can be recycled, it can reach the purpose of environmental protection and the reduction of cost. In order to promote the post application value of silicon and silicon carbide, the removal of metal impurities is essential when recycling silicon sawing waste. The experimental results show that silicon and silicon carbide can be separated by using centrifugation. When recycling of silicon sawing waste was performed by using the centrifugation in a magnetic field, the iron can be removed from silicon powders by the ratio of waste to solvent is 3/7. In addition, this study show that H2SO4 aqueous solution could react with the waste rapidly and remove most of metal. The residual iron in the silicon powder could reach 28.83ppm. If the sawing waste was pretreated by use of scrubber, the residual iron could reach 25.99ppm.The analysis of chemical kinetics show that the reaction order for metal oxidation in sulfuric acid is higher than that in hydrochloric acid, citric acid or nitric acid, meaning that the reaction in sulfuric acid is more sensitive to the concentration of hydrogen ion. The reaction of citric acid to metal oxidation has the lowest activation energy. The reaction of nitric acid to metal oxidation has the highest activation energy. The research shows that a ultrasonic cleaner removed most iron in a short period of time. However, in a long period of time, the effectiveness of removing iron by using a stirrer is better than using a shaker or an ultrasonic cleaner. In this research, we separated silicon and silicon carbide and removed iron impurities from the cutting waste successfully by using the centrifugation in a magnetic field. By acid treatment, we can reduce iron impurities to less than 100ppm. Because the concentration of acid is low, it can prevent damage to the environment, and it can realize the target of simplifying the process and reducing cost.

中文摘要 i
英文摘要 ii
誌謝 iv
目錄 v
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 矽基太陽能電池的重要性 1
1.2 矽原料的現況 3
1.3 切割製程與廢料 5
1.4 研究動機和目的 8
第二章 文獻回顧 9
第三章 理論分析與技術 20
3.1 酸洗原理 20
3.2 離心原理 22
3.3 磁作用原理 25
3.4 擦洗原理 27
第四章 實驗設備與方法 28
4.1 實驗藥品與材料 28
4.2 實驗項目與程序 31
4.2.1 矽泥組成分析 32
4.2.2 矽泥離心分選 33
4.2.3 酸洗 34
4.2.4 擦洗 36
第五章 實驗結果與討論 37
5.1 離心法 38
5.2 酸洗法 50
5.2.1 酸的種類和時間效應 50
5.2.2 比例、濃度與溫度效應 56
5.3 酸洗反應動力學 67
5.4 混搖方式對酸洗去除金屬之影響 77
第六章 結論 86
參考文獻 87
符號彙編 90

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