臺灣博碩士論文加值系統

這項研究提出適用於智能工具機之精準三維物件輪廓隨機光斑量測系統的發展，包括一個隨機雷射光斑光學探頭之設計和具創新的三維邊緣偵測演算法。數位影像關聯（digital image correlation, DIC）是一個廣泛運用於基準面內、外動態機械結構分析的全域光斑量測技術。然而直到今日，在數位影像關聯仍然存在準確邊緣偵測的關鍵問題，此乃肇因於兩個相鄰不同高度的邊緣周遭投射的隨機雷射光斑，受到陰影和繞射等影響而嚴重變異。一般來說，此種量測邊緣破碎的狀況很常在DIC三維量測結果中觀察到。為解決這個問題，本研究自行研製一個隨機雷射光斑的光學探頭來投射高品質的比對光斑樣式，並且開發全新的隨機光斑數位影像處理演算法，它是通過依照邊緣搜尋方向，採用新設計的邊界影像子集(subset)或是角落影像子集來進行邊緣搜尋，並提出一個調適邊緣閥值(adaptive edge threshold)來評估個別物件邊緣的搜尋結果，以確定具有正確高度的精準邊緣量測結果。以精準矩形塊規及一個經校準的圓形目標來驗證開發演算法的準確量測能量，量測結果以高準確度三次元量測儀(coordinate measuring machine，CMM)為基準比較顯示關鍵尺寸的最大量測誤差小於全量測範圍的3.2％，而一個標準差可以保持小於1％的範圍內，相較傳統數位影像關聯的結果，開發方法的結果至少改善了388%。

This study presents a development of precision 3-D profile speckle measurement system for intelligent machine tool including a compact random laser speckle measuring probe and a 3-D edge detection algorithm. Digital image correlation (DIC) has been surged as a full-field speckle measurement technique for in-plane and out-of-plane dynamic mechanical structure analyses. However, up to date, one of the key issues in DIC is still remained in boundary edge detection since a surface edge is not detectable between two discrete neighboring height jumps due to undesired pattern deformation caused by optical occlusion or diffraction. Generally, it is common to observe undesirable noisy measured data along measured surface edges obtained from the traditional DIC-based surface 3-D profilometry. To resolve this, a random laser speckle project optical probe is developed to produce high quality speckle patterns for achieving measuring accuracy while a novel random speckle images processing method is established by developing a new algorithm by employing both the boundary subset and the corner subset search to determine the best edge location as well as accurate height reconstruction. A rectangle gauge block and a pre-calibrated circle target were measured to verify the feasibility on accurate edge measurement of the methodology. The measured results are shown that the maximum measured error on critical dimension can be controlled less than 3.2% of the overall measuring range while one standard deviation can be kept within less than 1%. Compared to the measurement result of traditional DIC, the minimum improvement of developed method is better than 388%.

摘要 i
ABSTRACT iii
誌謝 v
目錄 vi
表目錄 ix
圖目錄 x
第1章 緒論 1
1.1 研究背景 1
1.2 研究動機與目的 9
1.3 預期研究成果 10
1.4 論文架構 11
第2章 文獻回顧 12
2.1 數位影像關聯 12
2.2 影像子集尺寸 17
2.3 光斑品質 20
2.4 影像子集形狀 29
2.5 立體視覺發展的影像比對方法 33
2.6 Kinect®的紅外線光斑 36
2.7 以樣式(pattern)量測三維形貌的方法 38
2.8 雷射光斑的光學原理 46
2.8.1 光斑成像 46
2.8.2 光斑尺寸 49
2.8.3 繞射 50
2.8.4 陰影 56
2.8.5 量測表面粗糙度對雷射光斑的影響 57
2.9 文獻回顧之總結 60
第3章 研究方法 64
3.1 三維雷射光斑量測系統設計及原理 64
3.2 雷射光斑設計及品質提昇 69
3.2.1 數位影像處理法強化光斑的評估 70
3.2.2 產生結構光斑方式的品質評估 72
3.2.3 光學元件對光斑品質影響的評估 74
3.3 雷射光斑量測的挑戰分析 82
3.3.1 傳統三維數位影像關聯遭遇的問題 82
3.3.2 邊緣處雷射光斑分析 86
3.4 精密三維表面邊緣偵測方法 89
3.4.1 概念及流程 89
3.4.2 調適品質閥值 94
3.4.3 初始邊緣點 94
3.4.4 調適邊緣搜尋閥值 96
3.4.5 精密邊緣搜尋 97
第4章 系統架構與實驗結果 101
4.1 實驗系統之架構設計 101
4.2 物件三維形貌重建及準確度分析 103
4.2.1 以經校正目標驗證量測精度 103
4.2.2 工件量測的可行性測試 109
4.2.3 自由曲面的能力測試 114
4.3 實驗結論 116
第5章 結論與未來展望 118
5.1 結論 118
5.2 未來展望 121
參考文獻 123
符號彙編 130

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