臺灣博碩士論文加值系統

在本論文中，我們提出應用電光調變進行相位檢測之積體光學表面電漿共振感測器，可用於檢測液體之折射率以及生化物質之濃度。所提出的電光調變式表面電漿共振感測器是製作在鈮酸鋰晶片上，其元件結構是由鈦擴散光波導、一對電極與感測區所構成。感測區中所使用的表面電漿激發層有兩種，分別由金膜以及金膜上鍵結奈米金粒所構成。感測區中的生化感測層是利用自組裝薄膜技術，將人血清球蛋白鍵結固定於表面電漿激發層上，可即時檢測出治療冠狀心臟疾病之藥物－乙型阻斷劑的濃度，以及其與人血清球蛋白之交互作用的強度，以了解藥物在人體內作用的機制。在元件操作上，是利用鈮酸鋰的電光效應調變表面電漿共振所伴隨的相位變化，使待測物的特性可藉由相位隨外加電壓變化的情形而被檢測出來。元件中利用奈米粒子的表面積效應，以增加人血清球蛋白在奈米金粒表面的覆蓋面積，進而提高感測器的靈敏度，相較於傳統的強度檢測方式，所提出的生化感測器具有：準確性高、敏感度高、操作容易等優點，未來可望與其他多樣化之功能性元件整合在單一晶片上，構成生化檢測之光積體電路，達到大量平行檢測的目的。

In this study, we present a novel integrated-optic surface-plasmon-resonance (SPR) biosensor by electro-optically modulation, which can be used to measure the refractive index of sensing liquid and the concentration of biochemical material. Its device structure consists of a titanium-diffused waveguide, one pair of electrode, and a sensing region. Two kinds of excited layer of surface plasmon, gold film and gold nanoparticle on gold film, are adopted in the sensor, respectively. In order to specifically sense the concentration of biochemical material, human-serum-albumin (HSA) bonded on the excited layer of surface plasmon by the self-assembling method is used as the biolayer and can be used to real-time sense the concentration of beta-blocker, which is a kind of medicine for heart disease. During the sensor measurement, the SPR phase can be tuned by electro-optic effect in lithium niobate and the property of the sensing material can be detected by the relation between the phase and the voltage. Because of the surface effect of nano particles, gold nano particles are used on the biosensor to increase the surface coverage of human-serum-albumin. In comparison with the conventional SPR sensor, the proposed SPR sensor has many advantages, such as: high accuracy, high sensitivity, and easy operation. The integration of the proposed integrated-optic SPR biosensor with other functional devices in one single lithium niobate chip will facilitate the processing of optical sensing signal to further reduce the system volume and to achieve high-throughput screening.

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 前言 1
1.2 鈮酸鋰之材料特性 3
1.3 研究動機與目的 9
1.4 內容概述 10
第二章 表面電漿共振理論及外差干涉儀原理 11
2.1 表面電漿共振簡介 11
2.2 表面電漿波之激發原理 13
2.3 光學激發表面電漿共振 18
2.4 表面電漿共振的量測方式 22
2.5 外差干涉術簡介 22
2.5.1 外差光源 23
2.5.2 反射光之相位差 24
2.6 生化檢測原理 25
第三章 鈮酸鋰光波導製程 26
3.1 金屬擴散式鈮酸鋰光波導之特性 26
3.2 質子交換式鈮酸鋰光波導之特性 27
3.3 金屬擴散鈮酸鋰的數學模型 27
3.4 金屬擴散式鈮酸鋰光波導之製程步驟 31
3.4.1 晶片切割 31
3.4.2 晶片清潔 33
3.4.3 黃光微影製程 33
3.4.4 金屬薄膜蒸鍍 34
3.4.5 薄膜掀離與蝕刻 35
3.4.6 高溫擴散 36
3.4.7 晶片研磨拋光 37
3.5 質子交換式鈮酸鋰光波導之製程步驟 37
3.6 元件之光學量測 38
第四章 新型電光調變式積體光學表面電漿共振生化感測器 42
4.1 操作原理 42
4.2 電光調變式表面電漿共振生化感測器之元件設計 44
4.3 電光調變式表面電漿共振生化感測器之元件製作 46
4.3.1 奈米金粒之製備 50
4.3.1.1 奈米金粒合成 51
4.3.1.2 固定奈米金粒在金膜表面及選區成長 52
4.3.2 自組裝薄膜技術 54
4.3.3 乙型阻斷劑濃度之調配 57
4.4 光相位差量測裝置 57
第五章 結果與討論 59
5.1 表面電漿共振折射率感測器 59
5.2 使用金膜之表面電漿共振生化感測器 63
5.3 使用奈米金粒之表面電漿共振生化感測器 67
5.3.1 金膜厚度為5nm 67
5.3.2 金膜厚度為10nm 72
5.3.3 金膜厚度為20nm 75
第六章 結論 80
參考文獻 82
中英文名詞對照表 87
附錄：
A 發表於2004年台灣光電科技研討會之論文 91
B 發表於2005年台灣光電科技研討會之論文 94

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