臺灣博碩士論文加值系統

本論文以微機電製程導入田口方法來製作精良之長週期光纖光柵應變感測器，該感測器之應用材料為SU-8 50，並以PDMS作為封裝素材。完成後以四點彎曲、Load cell拉伸實驗及拉伸試驗機等進行實驗，並以頻譜圖及線性分析圖等探討封裝型長週期光纖光柵之特性。
在四點彎曲比對過程中，底座型長週期光纖光柵在光柵週期對應波長關係圖中經常出現非線性關係，探討其原因是底座型長週期光纖光柵黏貼於鋁金屬薄板時，膠水會進入光柵的區域導致頻譜紊亂。本文針對底座型長週期光纖光柵實驗過程之問題加以改良，利用田口方法穩定開發封裝型長週期光纖光柵，確保所有製程參數之正確性與一致性，再由四點彎曲、Load cell拉伸實驗及拉伸試驗機等來驗證封裝型長週期光纖光柵製成的穩定性。
在傳統的實驗中很容易忽略交互作用的情報，當因子數增加時，其實驗次數將以 (水準數) 因子數成長，如此將浪費大量的時間、人力甚至是金錢，讓實驗變的很繁雜，不但不經濟且沒有效率。在現今的社會裡講求的是效率，且在電腦軟體發達的時代，這些數據的運算都可輕而一舉的經由套裝軟體算出，經分析出的數據正可作為製程改善的依據。因此，本研究以光纖直徑、光柵週期、光柵長度及寬度作為製程參數，來探討製作封裝型長週期光纖光柵時靈敏度與R平方之正確參數。所得之靈敏度最佳參數組合為光纖直徑(d)為60μm，光柵週期( Ʌ)為650nm，光柵長度(L)為2.5cm，光阻結構寬度(W)為 2mm，靈敏度最大為0.0369。R平方之最佳參數組合為光纖直徑(d)為72μm， 光柵週期( Ʌ)為660nm，光柵長度(L)為2cm，光阻結構寬度(W)為 1.5mm，R平方為0.984。

The thesis is about using thick photoresist stacking technique and etching process to make adhesive long period fiber grating (LPFG) Strain Sensor. The grating structure of the sensor is SU-8 50, and the material for encapsulation is poly-dimethylsiloxane (PDMS). With the combination of the above two materials, we produced Packaged-sandwich long period fiber grating (P-SLPFG). In addition, strain sensing can be conducted by tensile, finite element analysis, and tensiletesting machine; plus, with four points bending interrogation, we probed into optical properties of the packaged-sandwich long period fiber grating.
By applying thick photoresist stacking technique, we could produce different types of Long period fiber grating, such as base-shaped, box-shaped, and packaged-sandwich LPFG. However, with four points bending interrogation, it showed that the relation between grating period and resonance wavelength of B-SLPFG was nonlinear. According to SEM’s observation, when B-SLPFG was bonded, the glue would overflow into fiber grating structure and would interfere with the result of optical investigation.
The thesis focused on the bad effects of B-SLPFG, and tried to improve it. Through Taguchi Method, we created Packaged-sandwich long period fiber grating; though Tensile, finite element analysis, and Tensile Testing Machine, we verified that long period fiber grating did not affect light transmission and it can also remain optical properties.
In traditional experiment plans, it was common to neglect interactions. When there is one more factor included, the number of times for experiment will increase in (factor standard) (controlling element), which would take plenty of time, human resources, and cost much money, and the experiment would become less economic and inefficient. Nowadays, what people concern is efficiency, so we have to apply efficient and organized methods to the improvement of experiment assumptions. Moreover, in the era of computers, all data can be calculated easily and the analyzed information can be evidence for process improvement. Therefore, the thesis used fiber diameter, grating period and the length and width of sensor grating as process parameter to probe into correct process parameter when producing Packaged-sandwich long period fiber grating. This can also be reference for further studies of our team.
Base on the analysis of variance results, the optimization of parameters for Sensitivity are that Fiber diameter at 60 μm, Period 650 nm,Grating length is 2.5 cm and Photoresist structure width 2 mm. Sensitivity is -0.0369. The optimization of parameters for R square are tha Fiber diameter at 72 μm, Period 660 nm,Grating length is 2 cm and Photoresist structure width 1.5 mm. R square is 0.984.

摘要 I
ABSTRACT II
誌謝 IV
目錄 V
表目錄 VIII
圖目錄 X
第一章、緒論 1
1-1研究動機 1
1-2研究背景 2
1-2.1 長週期光纖光柵製程文獻回顧 2
第二章、理論與實驗方法介紹 11
2-1長週期光纖光柵之理論 11
2-1.1光柵原理 11
2-1.2長週期光纖光柵相位匹配 12
2-1.3 封裝型長週期光纖光柵之折射率分佈 12
2-2四點彎曲 14
2-3田口方法 16
2-3.1直交表 16
2-3.2 田口分析步驟 17
2-3.2 變異數分析步驟 17
第三章、研究方法與步驟 19
3-1封裝型長週期光纖光柵製作流程 19
3-1.1光纖蝕刻步驟 19
3-1.2封裝型長週期光纖光柵製程 19
3-2 LOAD CELL拉伸實驗流程 20
3-3四點彎曲實驗流程 22
3-4長週期光纖光柵於拉伸試驗機載重應變感測實驗 23
3-5 田口方法參數設計 25
第四章、實驗結果與討論 30
4-1 底座型長週期光纖光柵感測器實驗結果與討論 30
4-1.1 不同週期結構之底座型長週期光纖光柵四點彎曲實驗 31
4-2封裝型長週期光纖光柵感測器實驗結果與討論 63
4-2.1 不同週期結構之封裝型長週期光纖光柵Load cell拉伸實驗 64
4-2.2封裝型長週期光纖光柵於拉伸實驗機實驗結果與討論 108
4-3封裝型長週期光纖光柵田口法最佳化設計 111
4-3.1封裝型長週期光纖光柵靈敏度實驗結果與討論 111
4-3.2 封裝型長週期光纖光柵R平方實驗結果與討論 116
4.3.3 田口分析綜合討論 120
第五章、結論 123
5-1長週期感測器製程結果與討論 123
5-2拉伸試驗機拉伸結果與討論 123
5-3利用田口方法開發長週期感測器製程結果與討論 123
5-3.1靈敏度結果與討論 123
5-3.2 R平方結果與討論 124
第六章、未來展望 126
6-1以共振波長位置為目標之封裝型長週期光纖光柵感測器 126
6-2 開發並改良光阻型長週期光纖光柵感測器種類 126
6-3可黏貼式長週期光纖光柵拉伸試驗 126
6-4 更新實驗設備 126
參考文獻 128

[1]A. M. Vengsarkar, et al. , 1996, "Long-period fiber gratings as band-rejection filters" ,Lightwave Technology, Journal of, vol. 14, pp. 58-65.
[2]R. Yun-Jiang, et al. , 2003, "Novel fiber-optic sensors based on long-period fiber gratings written by high-frequency CO2 laser pulses", Lightwave Technology, Journal of, vol. 21, pp. 1320-1327.
[3]B. Li, et al. , 2011, "Femtosecond laser fabrication of long period fiber gratings and applications in refractive index sensing", Optics & Laser Technology, vol. 43, pp. 1420-1423.
[4]I. K. Hwang, et al. , 1999, "Long-period fiber gratings based on periodic microbends" , Optics Letters, vol. 24, pp. 1263-1265.
[5]J. Yoonchan, et al. , 2000, "Electrically controllable long-period liquid crystal fiber gratings", Photonics Technology Letters, IEEE, vol. 12, pp. 519-521.
[6]M. L. von Bibra, et al. , 2001, "Fabrication of long-period fiber gratings by use of focused ion-beam irradiation", Optics Letters, vol. 26, pp. 765-767.
[7]B. Rout, et al. , 2002, "Ion beam implantation for fabrication of periodic structures in optical fibres", Smart Structures, Devices, and Systems, Melbourne, VIC., Australia, pp. 172-177, December 16, 2002 - December 18.
[8]O. V. Ivanov, 2005, "Fabrication of long-period fiber gratings by twisting a standard single-mode fiber", Optics Letters, vol. 30, pp. 3290-2.
[9]M. Vaziri , C. Chin-Lin, 1992, "Etched fibers as strain gauges", Lightwave Technology, Journal of, vol. 10, pp. 836-841.
[10]S. Savin, et al. , 2000, "Tunable mechanically induced long-period fiber gratings", Optics Letters, vol. 25, pp. 710-712.
[11]T. Mizunami, et al. , 2009, "Long-period fiber-gratings produced by exposure with a low-pressure mercury lamp and their sensing characteristics", Optics Communications, vol. 282, pp. 4699-4705.
[12]H. Jung, et al. , 2009, "Mask-free hybrid long-period fiber grating fabrication by self-assembled periodic polymerization in silica hollow optical fiber" , Optics Letters, vol. 34, pp. 2745-2747.
[13]C. C. Chiang, et al. , 2009, "Sandwiched long-period fiber grating filter based on periodic SU8-thick photoresist technique", Optics Letters,vol. 34, pp. 3677-9.
[14]K. Hyun-Joo, et al. , 2009, "Fabrication of a surface long-period fiber grating based on a D-shaped photonic crystal fiber" ,OptoElectronics and Communications Conference, 2009. OECC 2009. 14th, pp. 1-2.
[15]W. Yi-Ping, et al. , 2007, "Strain Characteristics of CO2-Laser-Carved Long Period Fiber Gratings", Quantum Electronics, IEEE Journal of, vol. 43, pp. 101-108.
[16]A. Malki, et al. , 2003, "Investigation of the Writing Mechanism of Electric-Arc-Induced Long-Period Fiber Gratings", Applied Optics, vol. 42, pp. 3776-3779.
[17]M. Fujimaki, et al. , 2000, "Fabrication of long-period optical fiber gratings by use of ion implantation" , Optics Letters, vol. 25, pp. 88-89.
[18]C. Y. Lin and L. A. Wang, 1999, "Loss-tunable long period fibre grating made from etched corrugation structure", Electronics Letters, vol. 35, pp. 1872-1873.
[19]C.-Y. Lin, et al. , 2001, "Periodical Corrugated Structure for Forming Sampled Fiber Bragg Grating and Long-Period Fiber Grating with Tunable Coupling Strength", J. Lightwave Technol., vol. 19, p. 1212.
[20]C.-Y. Huang, et al. , 2009, "Packaged symmetric/asymmetric corrugated long period fiber gratings for refractive index sensing applications" ,in 20th International Conference on Optical Fibre Sensors, October 5, 2009 - October 9, 2009, Edinburgh, United kingdom. pp. 75031C-75031C.
[21]J. L. Arce-Diego, 2001, et al., "Optical fiber transducer based on LPFG and microbends for multi-parameter sensing", in Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE, pp. 782-783 vol.2.
[22]M. Yokota, et al. , 2002, "Mechanically induced long period fiber grating and its application for distributed sensing" , Optical Fiber Sensors Conference Technical Digest, 2002. Ofs 2002, 15th, pp. 135-138 vol.1.
[23]K. R. Sohn and K. T. Kim, 2005, "Thermo-optically tunable band-rejection filters using mechanically formed long-period fiber gratings" , Optics Letters, vol. 30, pp. 2688-2690.
[24]G. A. Cárdenas-Sevilla, et al. , 2009, "Mechanically induced long-period fiber gratings on tapered fibers", Optics Communications, vol. 282, pp. 2823-2826.
[25]C.-C. Chiang, 2010, "Fabrication and characterization of sandwiched optical fibers with periodic gratings" , Applied Optics, vol. 49, pp. 4175-4181.
[26]ASTM Standard G39, 1999(2005) , "Standard Practice for Preparation and Use of Bent-Beam Stress-Corrosion Test Specimens," ed.
[27]李輝煌，2004，田口方法—品質設計的原理與實務，高立圖書公司。
[28]林庭瑋，2011，以光阻堆疊技術建構可黏貼式長週期光纖光柵應變感測器，高雄應用科技大學，碩士論文。
[29]陳政傑，2012，可調式電鑄型長週期光纖光柵之製作與應用，高雄應用科技大學，碩士論文。
[30]曾千嘉，2013，蝕刻型長週期光纖光柵應用於二氧化碳及氧化氮之氣體感測研究，高雄應用科技大學，碩士論文。
[31]黃嘉瑩，2013，長週期光纖光柵蛋白質免疫感測器的研究，高雄應用科技大學，碩士論文。
[32]劉洸銓，2013，彎曲干涉式光纖感測器之製作及應用，高雄應用科技大學，碩士論文。
[33] 謝作生，2007，高張力鋼材微孔放電加工表面特性之研究，崑山科技大學，碩士論文。
[34] 蘇朝墩，2002，田口式品質工程，清華大學工業工程與工程管理系。
[35] 蘇朝墩，2005，品質工程，中華民國品質學會。