臺灣博碩士論文加值系統

本研究利用奈米多孔隙陽極氧化鋁模板轉移技術製作新型感測器，利用此一技術設計、分析與製作新型壓阻式感測器之應用，分別為溫度感測器、應變感測器及曲率感測。而現今微機電系統 (Micro-Electro-Mechanical System, MEMS) 技術，主要是利用半導體微製程技術製作微元件於矽基板之上，而近年隨著尺度趨於縮小進入奈米結構尺寸，傳統製作奈米結構設備昂且鎖時成為製作奈米元件的最大問題。因此本文整合金屬薄膜沉積於奈米多孔隙陽極氧化鋁模板形成奈米質地結構於矽基板及PET可撓性基板上，用於開發新型感測特性之感測器，透過金屬薄膜沉積於陽極氧化鋁薄膜上形成奈米質地結構作為壓阻感測特性，並利用二階段陽極氧化法製程技術以及微奈米加工術方法改善可撓性基板之金屬薄膜附著性。本研究成功的開發新型壓阻感測型式之壓阻式感測器，並對於新型溫度感測器、應變感測器及曲率感測進行特性分析與模擬驗證，未來可做為後續研究新型低溫製程壓阻式感測器之起端。

This study, we present nanoporous anodic aluminum template transformation technique to fabricate novel sensor. Using this technique to design, analysis and fabricate novel pizeoresistance sensors. They are temperature sensor, strain sensor and bending curvature sensor. Now the day, the technology of Micro- Electro- Mechanical System (MEMS) is primary using the semiconductor manufacture technology to manufacture micro system on silicon substrate. These days, with scale is going down to nano scale structure, the facilities of traditional manufacture in nano structure are expensive and spend lots of time becoming the largest problem in manufactory nano devices. Therefore, in this paper, we integrate metal thin film deposited on np-AAO template formatting nano-texture structure on silicon substrate and flexible PET substrate to develop sensor of novel sensing characteristics. By using two step anodizing fabrication process and micro/nano fabrication process to improve the adhesion between flexible substrate and metal thin film. This study has been succeed developed novel type of pizeorsistane of pizeoresistance sensor. The novel temperature sensor, strain and bending curvature have been analyzed characteristic and simulation verified. In the future, it could be used for novel low temperature fabrication process for pizeoresistance sensors in the future.

摘要 i
Abstract ii
目　錄 iii
圖目錄 v
表目錄 ix
第一章 序論 1
1-1 前言 1
1-2 研究動機 3
1-3 文獻回顧 4
1-3.1 陽極氧化鋁模板 4
1-3.2 溫度感測器 6
1-3.3 壓阻式應變規 7
1-4 研究目標 9
第二章 以陽極氧化鋁為模板之壓阻式感測器 18
2-1 電阻式溫度感測器設計與製造 18
2-1.1 陽極氧化鋁模板轉移設計溫度感測器 20
2-2 壓阻式應變規之原理與設計 21
2-2.1 陽極氧化鋁模板轉移設計應變規感測器 22
第三章 製程結果 36
3-1 陽極氧化鋁模板製作 36
3-2溫度感測元件製作 37
3-3 應變規感測元件製作 38
3-4 元件製程結果與討論 39
第四章 量測結果與分析 51
4-1 溫度感測能力之量測 51
4-1.1負溫度係數探討 52
4-2 應變感測能力之量測 55
4-3 彎曲曲率感測性能之量測 57
第五章 結論與未來工作 72
5-1 結論 72
5-2 未來工作 73
參考資料: 75

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