臺灣博碩士論文加值系統

軟性觸覺感測器(Tactile Sensor)其可撓曲的特性可應用於人體生理監控的應用例如:脈搏、心跳、血壓等。壓電式觸覺感測器其靈敏度仍有待提升，故本研究提出新穎結構化電極的概念，以提升壓電式觸覺感測器的靈敏度，觸覺感測器元件結構基本上為一三明治結構，利用半導體製程設計製作不同尺寸之結構於壓電薄膜電極上，由兩層軟性基板將感測壓電材料PVDF與結構化電極所夾住，並以激振器(shaker)與力規(force sensor)達到動態週期性之微小力作為觸發源，進而觀察發現在相同面積下，增加結構化感測電極數目較感測點數目少者，可有效提升一倍的輸出電壓。此外建立觸覺系統量測平台，觸覺訊號藉由自行撰寫之LabVIEW程式透過DAQ系統傳送至個人電腦。最後可獲得觸覺影像(tactile image)與觸覺影像之力量分佈圖，進而可辨別正方形與長方形達成即時監控觸覺力量之變化。

The tactile sensor has flexible characteristic that it can be applied in the application with the human body physiological monitoring for example，pulse, heartbeat, blood pressure. However the piezoelectric-type tactile sensor sensitivity needs to be improved. Therefore we introduce the concept of structural electrode for enhancement of the sensitivity of piezoelectric tactile sensor and fabricated structure by MEMS process.
A sandwich structure for flexible tactile sensor consists of top and bottom soft substrates made of Polystyrene, and in between of two soft substrates a piezoelectric thin film, PVDF, and patterned different area, are utilized as sensing material and microstructures, respectively and used shaker and force sensor.
We design our experiment of tactile sensing system. The signal of a contact pressure to the tactile sensor are sensed and processed in the DAQ System. Finally the signals are integrated for taking the force profile. The processed signals of the output of the sensor are visualized on LabVIEW in personal computer in real time. A rudimentary tactile object image measurement procedure for applied loads has been devised to recognize the silhouette of a sharp edge, square, ,circle, the shape and force distribution of the contact object are obtained using two and three-dimensional image in real time.

摘要 iv
英文摘要 v
誌謝 vi
目次 vii
表目錄 x
圖目錄 xi
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 1
1.3 研究動機與目的 5
1.4 研究方法 7
1.5 本文架構 7
第二章 理論基礎 11
2.1壓電材料(Piezoelectric Materials) 8
2.1.1 壓電效應原理 8
2.1.1.1 正壓電效應 8
2.1.1.2 逆壓電效應 11
2.1.2 壓電方程式 12
2.2 PVDF壓電特性 18
2.2.1 PVDF壓電材料結構組成 18
2.2.2 PVDF壓電材料的優缺點 19
2.2.2 PVDF壓電方程式 21
第三章 元件設計與製程 23
3.1觸覺感測器之製作 23
3.1.1 矩陣式軟性觸覺感測器之製作 24
3.1.2 圓形矩陣柱狀結構製作 27
3.2 電荷放大電路與濾波電路之設計與製作 28
3.2.1 電荷放大器之製作 28
3.2.2 濾波電路之製作 30
3.2.3 電路整體組合 32
3.2.4 電路板佈線設計與製作 33
第四章 實驗系統架構與流程 35
4.1實驗儀器 35
4.2實驗架構 38
4.2.1 觸覺感測器性能之量測平台 38
4.2.2 全區量測系統架構 38
4.2.3 微區量測系統架構 40
4.2.3.1 不具PDMS微電極結構之架構 40
4.2.3.2 具PDMS微電極結構之架構 41
4.2.4 形狀辨識系統架構 41
4.3人機介面程式架構 43
4.3.1 力規訊號擷取 43
4.3.2 PVDF觸覺感測器訊號擷取 44
4.3.3 整體人機介面程式架構 44
第五章 結果與討論 46
5.1實驗結果 46
5.1.1 全區量測實驗結果 46
5.1.2 微區量測實驗結果 48
5.1.2.1不具PDMS微電極結構之實驗結果 48
5.1.2.2具PDMS微電極結構之實驗結果 48
5.1.3 形狀辨識實驗結果 49
5.2實驗討論 51
5.2.1 全區量測實驗討論 51
5.2.2 微區量測實驗討論 51
5.2.3 形狀辨識實驗討論 54
第六章 結論與未來展望 55
6.1 結論 55
6.2 未來展望 56
參考文獻 57
附錄 60
A ANALOG DEVICES AD549LH詳細規格 60
B BURR BROWN UAF42詳細規格 61
C MAXIM DG406詳細規格 62

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