臺灣博碩士論文加值系統

本篇論文分成三大部分：準相位匹配和光參振盪器原理的介紹、光參振盪和倍頻藍光雷射晶體之設計與研製，以及光參振盪器系統架設與藍光產生器腔內倍頻實驗分析。
理論部分，吾人先闡述非線性頻率轉換與準相位匹配理論，接著介紹光參振盪以及倍頻轉換理論。利用鉭酸鋰晶體在不同操作溫度下，設計滿足準相位匹配所需週期大小。接著採用本實驗室發展的鎳金屬內擴散配合高壓電致極化反轉製程技術，應用於厚度0.5mm之共熔鉭酸鋰晶片製作。實驗中設計光參-倍頻藍光雷射晶片，在倍頻部分做了單週期、三週期、變跡結構與扇形結構的設計，光參部份的週期為7.7576um，而倍頻部份：單週期為4.9865um；三週期為為4.9514um、4.9865um、5.0218um；變跡結構為4.9164um漸變到5.0749um，而扇形結構為並聯4.9024um至5.0606um，以此研製出長度為20mm的寬頻藍光雷射晶片。
光學量測部分，利用奈秒(~14ns) 1064nm紅外光雷射做為泵浦源，設計一共振腔可共振930nm將所研製完成之雷射晶片置入，測量此光參振盪器之出光轉換效率。本論文除了討論倍頻單週期、三週期與變跡結構的比較，還以752mW綠光搭配準相位匹配光參-級聯狀扇形結構倍頻藍光雷射晶片，以及雷射共焦腔之設計，實現頻寬1.9nm，斜線效率8.3%之465nm的寬頻藍光雷射，並得到26.8mW的藍光輸出，藍光轉換效率為3.56%。

This thesis is composed of three parts：an introduction of the theory of quasi-phase-matching (QPM) and the principle of the optical parametric oscillator (OPO), the fabrication technique of one-dimensional periodically poled congruent grown lithium tantalite (LiTaO3) for cascade OPO-SHG 465nm blue laser and the measurement and analysis of OPO-SHG blue light generators.
First of all, the mechanism of nonlinear frequency conversion and QPM theory, and its application to the optical parametric oscillator and second harmonic generation (SHG) are introduced. By using Sellmeier equation, the QPM period of periodically poled LiTaO3 (PPLT) for the above application is designed. By taking advantage of the nickel-diffusion with high-voltage poling process, cascaded OPO-SHG devices on 0.5mm-thick congruent LiTaO3 substrate is fabricated. For cascaded OPO-SHG PPLT device, a multi-period SHG segment composed of single period, three periods , apodized and fan-out structure design for QPM-SHG is proposed. The period for OPO is 7.7576um, and the period for SHG is 4.9865um with single period；4.9514 um, 4.9865 um, and 5.0218 um with three periods；gradually changing from 4.9164um to 5.0749 um with an apodized structure design and gradualy changing from 4.9024 um to 5.0606 um with a parallel fan-out structure design. With this design, a 20mm-long chipwafer for generating OPO-SHG broadband blue light can be achieved.
Using a 1064nm infrared laser with 14ns pulse width as the pump source, a cascaded OPO-SHG chip in a concave laser cavity is shown to generate a 465nm broadband blue laser. Discussing the comparison of the optical measurement between single period, three periods, and apodized structure design for SHG, this work also includes the optical measurement of fan-out structure design . An average output power of 26.8 mW blue light laser has been achieved under a 752 mW input green power, which corresponds to a conversion efficiency of 3.56% . The spectrum is shown to have a 1.9 nm bandwidth and 8.3% slope efficiency.

口試委員會審定書 I
致謝 II
中文摘要 VII
英文摘要 VIII
目錄 X
表目錄 XIV
圖目錄 XV
第一章 緒論 1
1.1 研究背景 1
1.2 非線性晶體 5
1.3 鉭酸鋰晶體介紹 7
1.3.1 基本特性 7
1.3.2 相變化 8
1.3.3 長晶技術 8
1.4 極化反轉製程介紹 11
1.4.1 鋰離子外擴散法 11
1.4.2 特殊金屬內擴散法 11
1.4.3 質子交換法 11
1.4.4 高電壓致極化反轉法 11
1.4.5 淺層反轉混合高電壓致極化反轉法 12
1.5 非線性頻率轉換 13
1.5.1 倍頻產生簡介 13
1.5.2 光學參量振盪器簡介 13
1.6 論文內容概述 14
第二章 相位匹配理論 16
2.1 非線性頻率轉換與相位匹配 16
2.2 雙折射相位匹配理論 20
2.3 準相位匹配理論 22
2.3.1 一維空間的準相位匹配 22
2.3.2 開孔率對一維、二維結構的影響 25
2.4 光學參量振盪器理論21 28
2.4.1 傳統光參理論 28
2.4.2 準相位匹配光參理論 30
2.4.3 光學參量振盪器理論 32
第三章 晶體設計與製程 34
3.1 倍頻晶體的週期設計 34
3.2 光參振盪器晶體週期設計 37
3.3 級聯型串聯多週期與扇形結構光參倍頻寬頻藍光晶片設計 40
3.3.1 級聯型串聯多週期寬頻藍光設計 40
3.3.2 級聯型扇形結構寬頻藍光設計 50
3.3.3 寬溫度操作設計 52
3.4 高電壓致極化反轉 57
3.4.1 極化反轉模型 59
3.4.2 高電壓波形 60
3.4.3 反轉時間及電壓 62
3.4.4 液態電極與夾具設計 62
3.4.5 金屬電極定義方式 63
3.5 鎳金屬內擴散機制定義週期性結構 65
3.5.1 定義鎳金屬圖形 68
3.5.2 高溫熱處理 70
3.5.3 高電壓成核時間控制 71
3.5.4 共熔鉭酸鋰製程成果 72
3.6 共熔鉭酸鋰極化反轉研究分析 74
3.6.1 矯頑電場計算 74
3.6.2 側擴速率的計算與分析 75
第四章 光學量測與分析 79
4.1 光學量測架構 79
4.1.1 泵浦雷射 79
4.1.2 系統架構 79
4.2 光參振盪寬頻藍光產生器之量測與分析 82
4.2.1 實驗目的 82
4.2.2 晶片設計 82
4.2.3 倍頻串聯多週期藍光實驗結果與分析 85
4.2.4 倍頻扇形並聯結構藍光實驗結果與分析 93
第五章 結論與未來展望 98
5.1 結論 98
5.2 未來展望 100
參考文獻 101

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