臺灣博碩士論文加值系統

薄膜電晶體平面液晶顯示器結構中以彩色濾光片所佔成本最高，也是液晶顯示器能夠全彩化之關鍵零組件。目前彩色濾光片主要是以顏料分散法將紅、藍、綠三原色之彩色光阻液利用旋轉塗佈法將彩色光阻液旋塗於玻璃基板表面。實驗中將測試三種不同的注液方式對液晶顯示器玻璃基板覆膜之影響，並測試旋轉塗佈過程中各種參數對彩色光阻液覆膜之影響。結果得知以移動式注液旋塗玻璃基板；試圖達到減少彩色光阻液使用量是不可行的，因為彩色光阻液的高揮發特性使得連續螺旋狀液膜未擴展時就開始揮發了。實驗結果得知靜置後旋塗比直接注液覆膜所需之彩色光阻液量少，且覆膜所耗費的時間也較短，因此推論靜置後旋塗近似為注液速率很大的旋塗模式，所以靜置後旋塗比直接注液的覆膜效果好。另藉由提升轉速可有效的增加液膜波前擴展速度，如此可增加完整覆膜的可能性。

目 錄
摘要Ⅰ
目錄Ⅱ
表目錄IV
圖目錄V
第一章 緒論1
1-1 前言1
1-2 文獻回顧2
1-2-1 液晶顯示器2
1-2-2 旋轉塗佈相關研究10
1-2-3 不穩定手指狀流相關研究12
1-2-4 薄膜平坦度相關研究17
1-2-5 風剪效應相關研究18
1-3 研究動機19
第二章 實驗設備與方法21
2-1 彩色光阻液旋轉塗佈系統21
2-1-1 真空吸引式玻璃基板變轉速控制系統21
2-1-2 彩色光阻液注液系統23
2-1-3 影像擷取分析系統24
2-2 實驗方法25
第三章 實驗結果與討論29
3-1 移動式注液對覆膜之影響29
3-2 轉速與注液速率對旋塗液膜擴展之影響31
3-2-1 轉速對旋塗液膜擴展之影響31
3-2-2 注液速率對旋塗液膜擴展之影響33
3-3 靜置後旋塗與直接注液之比較34
3-3-1 可完整覆膜分析37
3-4 玻璃基板角落對覆膜之影響37
第四章 結論40
參考文獻42
附表47
附圖49
表目錄
表一、無鹼玻璃基本性質47
表二、彩色光阻液基本性質48
圖目錄
圖一、液晶顯示器結構圖49
圖二、15吋液晶顯示器成本結構分析50
圖三、彩色濾光片結構剖面圖……………………………………….. 51
圖四、顏料分散法製作流程………………………………………….. 52
圖五、真空吸引式玻璃基板變轉速控制系統………………… ……. 53
圖六、彩色光阻液注液系統54
圖七、影像擷取分析系統55
圖八、旋轉塗佈實驗系統整合示意圖56
圖九、靜置後旋塗影像圖57
圖十、直接注液影像圖58
圖十一、螺旋狀注液影像圖59
圖十二、以350 ㎜為噴嘴移動基準之螺旋狀注液方式影像階段圖60
圖十三、以玻璃基板對角線長為噴嘴移動基準之螺旋狀注液方式影像
階段圖61
圖十四、3 ml彩色光阻液直接注液覆膜成形影像圖62
圖十五、以矽由為實驗流體之移動式注液覆膜情形63
圖十六、5 ml彩色光阻液靜置後旋塗在不同轉速作用下液膜波前與時
間關係圖64
圖十七、10 ml彩色光阻液靜置後旋塗在不同轉速作用下液膜波前與
時間關係圖65
圖十八、9 ml彩色光阻液以9 ml/sec注液速率直接注液在不同轉速時
之液膜波前與時間關係圖66
圖十九、10 ml彩色光阻液以不同注液速率直接注液，可完整覆膜之
轉速與塗佈時間分佈曲線圖67
圖二十、7 ml、10 ml彩色光阻液靜置後旋塗可完整覆膜之轉速與塗
佈時間分佈曲線圖68
圖二十一、10 ml彩色光阻液於靜置後旋塗和直接注液兩種注液方式下可完整覆膜之轉速與塗佈時間分佈曲線圖69
圖二十二、7 ml彩色光阻液以不同注液速率直接注液之液膜波前與時間關係圖（ω= 1000 rpm）70
圖二十三、10 ml彩色光阻液以不同注液速率直接注液之液膜波前與
時間關係圖（ω= 1000 rpm）71
圖二十四、直接注液10 ml彩色光阻液可完整覆膜之注液速率與塗佈
時間分佈曲線圖（ω= 1000 rpm）72
圖二十五、不同彩色光阻液量靜置後旋塗之液膜波前與時間關係圖
（ω= 800 rpm）73
圖二十六、不同彩色光阻液量靜置後旋塗之液膜波前與時間關係圖
（ω= 1500 rpm）74
圖二十七、不同彩色光阻液量直接注液之液膜波前與時間關係圖
（ω= 800 rpm，Q = 9 ml/sec）75
圖二十八、不同彩色光阻液量直接注液之液膜波前與時間關係圖
（ω= 1500 rpm，Q = 3 ml/sec）76
圖二十九、7 ml彩色光阻液靜置後旋塗和直接注液之液膜波前與時間
關係圖（ω= 800 rpm）77
圖三十、11 ml彩色光阻液靜置後旋塗和直接注液之液膜波前與時
間關係圖（ω= 800 rpm）78
圖三十一、7 ml彩色光阻液直接注液之覆膜成形影像圖 （ω= 800 rpm，Q = 7 ml/sec）79
圖三十二、3 ml彩色光阻液靜置後旋塗和直接注液之液膜波前與時間
關係圖（ω= 1500 rpm）80
圖三十三、7 ml彩色光阻液靜置後旋塗和直接注液之液膜波前與時間
關係圖（ω= 1500 rpm）81
圖三十四、靜置後旋塗可完整覆膜和不可完整覆膜之轉速與彩色光阻
液量分界曲線圖82
圖三十五、直接注液可完整覆膜和不可完整覆膜之轉速與彩色光阻液
量分界曲線圖83
圖三十六、完整覆膜之玻璃基板角落顏料光阻液匯聚影像成形圖84
圖三十七、覆膜不完整之玻璃基板角落影像成形圖85

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