臺灣博碩士論文加值系統

本文提出新型三自由度繞射雷射光學尺系統，優於目前傳統一軸光學尺在量測位移的同時，可再量測出兩個角度誤差。此三自由度量測系統利用偏振干涉原理量測線性位移，並利用自動視準儀原理量測兩個角度，並將此兩個量測系統設計於同一套光學系統內。新型三自由度繞射雷射光學尺系統線性位移解析度為 13.1 nm，角度位移解析度為 0.11 arcsec。本論文利用HP雷射干涉儀與自動視準儀驗證本光學尺的實驗結果，於檢測平台25 mm 行程中，線性位移誤差最大約為 0.16 μm，搖擺度誤差最大約 0.4 arcsec，滾動度誤差最大約 0.41 arcsec。

In this study, a three-degrees-of-freedom laser encoder was developed. The measuring principles of linear displacement measurement was based on the diffractive method and polarization interference method. The angle measuring method was the autocollimation method. These optical paths of these two methods are designed in a single optical system. The resolution of linear displacement is 13.1 nm and the angular resolution is 0.11 arcsec.The HP laser interferometer and an autocollimator were used to verify our proposed system. The accuracy of linear displacements is 160 nm and the accuracy of angular measurement is 0.41 arcsec.

中文摘要 i
Abstract ii
誌謝 iii
目錄 v
表目錄 viii
圖目錄 viiii
第一章 背景、重要性與研究目的........1
1.1 背景與重要性.....................1
1.2 研究目的.........................2
1.3 文獻回顧.........................4
第二章 光學理論及系統元件介紹.......9
2.1 光學理論.........................9
2.2 光柵繞射的Doppler 頻移...........12
2.3 光學元件介紹.....................14
第三章 誤差分析與移動平台的誤差來源.28
3.1 誤差分類.........................28
3.1.1 系統誤差.......................28
3.1.2 過失誤差.......................28
3.1.3 隨機誤差.......................29
3.2 靜態誤差.........................29
3.3 移動平台運動誤差之原因...........30
第四章 新型三自由度繞射雷射光學尺....32
4.1 量測目的與系統架構...............32
4.2 量測原理.........................33
4.3 搖偏度、滾動度誤差數學推導.......39
4.4 線性位移量測數學模型.............39
4.5 四象限位置感測器校正架構與原理...44
4.6 四象限位置感測器校正實驗方法與結果.46
4.7 搖偏度、滾動度校正架構與原理.....49
4.8 搖偏度、滾動度校正實驗方法與結果.50
4.9 量測系統實驗與結果...............53
4.9.1 實驗步驟.......................53
4.9.2 搖偏度、滾動度誤差結果.........54
4.9.3 定位誤差結果...................59
第五章 結論與未來發展................64
5.1 結論.............................64
5.2 未來發展.........................65
參考文獻.............................66

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