臺灣博碩士論文加值系統

本研究利用微機電系統技術開發具奈米特性之半導體金屬氧化物氣體微感測器，應用於感測一氧化碳氣體。當待測氣體吸附於感測薄膜表面時，由於蕭特基接觸而使薄膜產生電阻變化，藉由量測此電阻變化，可以獲得感測靈敏度。利用光微影技術在晶片上製作圖案，進行圖案化。再以同軸靜電紡絲技術製作中空型氧化銦奈米纖維紡絲於晶片上作為感測薄膜，並利用光微影和蝕刻製程製作微型加熱器與指叉感測電極，將感測薄膜沉積於感測元件上，可以提高待測氣體與感測薄膜接觸面積，增加表面化學反應，有效提升元件操作特性及加快反應時間。
實驗探討氧化銦感測薄膜於不同內針與外針流速對奈米纖維的影響，以及一氧化碳氣體濃度的靈敏度變化。結果顯示氧化銦感測薄膜於280 ℃感測一氧化碳氣體可達最高靈敏度。

The research presents the design of metal-oxide semiconductor micro gas sensors base on MEMS technology with nano-properties for CO gas sensing. Sensitivity is defined by measuring the variation of resistance for sensing layers caused by Schottky contanct when gas specimens adsorb on the surface of sensing films. Using via lithography to produce patterns on the wafer. Then using the coaxial electrospinning technology to produce indium oxide nano hollow fiber spinning on the wafer as the sensing film, and a heater made via lithography and deep etching processes, in order to increase the effective area and chemical reactions on which gas molecules can be adsorbed. the properties of operation and response time. Experimental Investigation of indium oxide films in different senses the in needle and the outer needle flow rate on nano-fibers, as well as sensitivity to changes in the concentration of carbon monoxide gas. The results showed that indium sensing oxide films at 280 ℃ sensing of CO gas can reach the highest sensitivity.
The sensorusesan electrostatic spinning sense of indium oxide nano-fiber sensors for measurement of film,the measuring the carbon monoxide concentration in the range of 50 ~ 1000 ppm, the resistance change rate of 1 to 13.

致謝 i
中文摘要 ii
Abstract iii
目錄 iv
圖目錄 vi
表目錄 viii
第一章 緒論 1
1.1 前言 1
1.2 研究動機與目的 2
1.3 文獻探討 3
1.4研究流程與架構 7
第二章 靜電紡絲技術與氣體感測原理 8
2.1 靜電紡絲製程原理 8
2.1.1 臨界電位理論 8
2.1.2 施加電壓理論 10
2.1.3 一維穩態模型 10
2.2氣體感測器 12
2.2.1 蕭特基接觸 12
2.2.2 金屬氧化物氣體感測器感測機制 14
第三章 靜電紡絲製程與感測器設計 16
3.1靜電紡絲系統架構設計 16
3.2選用材料 16
3.3 靜電紡絲感測元件製作 17
3.3.1 奈米纖維薄膜製作 18
3.3.2靜電紡絲感測溶液調配 18
3.4 微感測元件製程規劃 21
第四章 分析與量測 24
4.1氧化銦中空型奈米纖維分析 24
4.1.1 內針溶液流速對奈米纖維形態分析 25
4.1.2 外針溶液流速對奈米纖維形態分析 27
4.1.3 中空奈米纖維形態 28
4.1.4 煅燒對奈米纖維形態分析 29
4.2 氣體微感測元件製程 29
4.2.1加熱器及溫度感測器製程 29
4.2.2指叉感測電極製程 31
4.2.3靜電紡絲氧化銦感測薄膜製程 31
4.3氣體感測器靈敏度分析與量測 32
4.3.1 量測架構 32
4.3.2 加熱器與溫度感測器特性分析 33
4.3.3 感測薄膜性質量測 36
第五章 結論 39
5.1 結論 39
5.2未來發展 40
參考文獻 41

[1]李科杰，新編感測器技術手冊，北京-國防工業出版社，2000 年 1 月。
[2] A. Formhals, “Process and Apparatus for Preparing Artificial Threads,” US Patent, Vol. 1, pp. 975-504, 1934.
[3]S. Kacmaz, K. Ertekin, A. Suslu, M. Ozdemir, Y. Ergun, E. Celik and U. Cocen,“Emission Based Sub-nanomolar Silver Sensing with Electrospun Nanofibers,”Sensor and Actuators B: Chemical, Vol. 153, pp. 205-213, 2011.
[4] G. Taylor, “Disintegration of Water Drops in an Electric Field,” Proceedings A, Vol. 280, pp. 383-397, 1964.
[5] G. I. Taylor and A. D. Mcewan, “The stability of a horizontal fluid interface in a vertical electric field,”Proceedings A, Vol. 22, pp. 1-15, 1964.
[6] G. Taylor, “Studies in Electrohydrodynamics. I. The Circulation Produced in a Drop by Electrical Field,” Proceedings A, Vol. 291, pp. 159-166, 1966.
[7] G. Taylor, “Electrically Driven Jets,” Proceedings A, Vol. 313, pp. 453-475, 1969.
[8]D. H. Reneker and I. Chun, “Nanometre diameter fibres of polymer, produced by electrospinning,”Nanotechnology, Vol. 9, pp. 216-223, 1996.
[9]S. Zhan, D. Chen, X. Jiao and S. Liu,“Facile fabrication of long α-Fe2O3, α-Fe and γ-Fe2O3 hollow fibers using sol–gel combined co-electrospinning technology,” Journal of Colloid and Interface Science, vol. 308, pp. 265-270, 2007.
[10]R. A. Thakur, C.A. Florek, J. Kohn and B.B. Michniak, “Electrospun nanofibrous polymeric scaffold with targeted drug release profiles for potential
application as wound dressing,” International Journal of Pharmaceutics, Vol. 364, pp. 87–93, 2008.
[11]J. Zhang, S. W. Choi and S. S. Kim,“Micro- and nano-scale hollow TiO2 fibers by coaxial electrospinning: Preparation and gas sensing,”Journal of Soild State Chemistry, Vol. 184, pp. 3008-3013, 2011.
[12]H. Fong, I. Chun and D.H. Reneker, “Beaded Nanofibers formed During Electrospinning,” Polymerm,Vol. 40, pp. 4585-4592, 1999.
[13]J. B. Ballengee and P. N. Pintauro, “Morphological Control of Electrospun Nafion Nanofiber Mats,” Electrochemical Society, Vol. 158, pp. 568-572, 2011.
[14]C. V. Do, T. T. T. Nguyen and J. S. Park,“Fabrication of polyethylene glycol/polyvinylidene fluoride core/shell nanofibers via melt electrospinning and their characteristics,” Solar Energy Materials &; Solar Cells, Vol. 104, pp. 131-139, 2012
[15]J. M. Yang, L. S. Zha, D. G. Yu and J. Liu, “Coaxial electrospinning with acetic acid for preparing ferulic acid/zein compositefibers with improved drug release profiles,” Colloids and Surfaces B: Biointerfaces, Vol. 102, pp. 737-743, 2013.
[16]W. Zheng, X. Lu, W. Wang, Z. Li, H. Zhang, Y. Wang, Z. Wang and C. Wang, “A highly sensitive and fast-responding sensor based on electrospun In2O3 Nanofibers,” Sensors and Actuators B：Chemical, Vol. 142, pp. 61-65, 2009.
[17]P. S. Khiabani, A. Hosseinmardi, E. Marzbanrad, S. Ghashghaie, C. Zamani, M. Keyanpour-Rad and B.Raissi, “NO2 Gas Sensor Fabrication Through AC Electrophoretic Deposition from Electrospun In2O3 Nanoribbons,” Sensors and Actuators B: Chemical, Vol. 162, pp. 102-107, 2012.
[18]H. Du, X. Lu, J. Wang, M. Su, P. Yao, Y. Zheng and N.Yu, “Formaldehyde gas sensor based on SnO2/In2O3 hetero-nanofibers by a modified double jets electrospinning process,” Sensors and Actuators B: Chemical, Vol. 166-167, pp. 746-752, 2012.
[19]S. K. Lim, S. H. Hwang, D. Chang and S. Kim, “Preparation of mesoporous In2O3 nanofibers by electrospinning and their application as a CO gas sensor,” Sensors and Actuators B: Chemical, Vol. 149, pp. 28-33, 2010.
[20]S. Wei, Y. Yu and M. Zhou,“CO gas sensing of Pd-doped ZnO nanofibers synthesized by electrospinning method,” Materials Letters, Vol. 64, pp. 2284-2286, 2010.
[21]O. Landau and A. Rothschild,“Microstructure evolution of TiO2 gas sensors produced by electrospinning,” Sensors and Actuators B: Chemical, Vol. 171-172, pp. 118-126, 2012.
[22] G. I. Taylor and A. D. Mcewan, “The Stability of a Horizontal Fluid Interface in a Vertical Electric Field.” The Journal of Fluid Mechanics, Vol. 22, pp. 1-15, 1965.
[23]S. N. Reznik, A. L. Yaein, A. Theron and E. Zussman, “Transient and Steady Shapes of Droplets Attached to a Surface in a Strong Electric Field,” Journal of Fluid Mechanics, Vol. 516, pp.349-347, 2004.
[24]G. I. Taylor, “Electrically Driven Jets,” Proceedings of the Royal Society of London, Vol. 313, pp. 453-457, 1969.
[25]L. Y. Yeo and J. R. Friend, “Electrospinning carbon nanotube polymer composite nanofibers,” Journal of Experimental Nanoscience, Vol. 1, pp. 177-209, 2006.
[26]J. He, L. Xu, Y. Wu and Y. Liu, “Review Mathematical Models for Continuous Electrospun Nanofibers and Electrospun Nanoporous Microspheres,” Polymer International, Vol.56, pp. 1323-1329, 2007.
[27]S. R. Morrision, “Chemical Sensors,” Semiconductor Sensors, pp. 383-410, 1994.
[28]P. B. Weisz, “Effects of Electronic Charge Transfer between Adsorbate and Solid on Chemisorption and Catalysis,” The Journal of Chemical Physics, Vol. 21, pp.627-933, 1979.
[29]Y. Wang, G. Wang, L. Chen, H. Li, T. Yin, B. Wang, J. C. Lee and Q. Yu, “Electrospun Nanofiber Meshes with Tailored Architectures and Patterns as Potential Tissue-engineering Scaffolds,” Biofabrication, Vol. 1, pp. 1-9, 2009.
[30]Y. Wu, Z. Dong, S. Wilson and R. L. Clark, “Template-assisted Assembly of Electrospun Fibers,” Polymer, Vol. 51, pp. 3244-3248, 2010.
[31]F. L. Zhou, L. Hubbard, J. Eichhorn and J. M. Parker ,“Jet deposition in near-field electrospinning of patterned polycaprolactone and sugar-polycaprolactone core-shell fibres,” Polymer, Vol. 52, pp. 3603-3610, 2011.
[32]M. Park, J. Im, J. Park and U. Jeong,“Micropatterned Stretchable Circuit and Strain Sensor Fabricated Lithography on an Electrospun Nanofiber Mat,” ACS Appl. Mater. Interfaces, Vol.17, pp.8766-8771, 2013.