臺灣博碩士論文加值系統

超穎介面是指具有亞波長厚度與晶格週期的超材料，它是能夠產生自然界罕見電磁現象的人造結構。當此結構具有手性時，它與其鏡像結構互為對映異構體。此時若有一道無偏振光穿過，不同對映異構體會產生相對的左旋或右旋的圓偏振光。本論文的核心在於疊合兩種互為對映異構體的金奈米棒二聚體陣列，此疊合後之超穎介面具有對稱性(不具手性)，因此一般的無偏振光垂直入射通過時不會產生旋度。接著利用拉伸可撓式基板造成形變的方式，我們能以控制金奈米棒的相對位置的方式改變晶格中特定金奈米棒二聚體的耦合，來破壞超穎介面之對稱性並達到改變並控制穿透光旋性之功效。
模擬方面，本論文使用有限元素法分析其金奈米棒二聚體與三聚體超穎介面中特定波長的電場分布，並以侷域性表面電漿共振對應出消光光譜的電漿子混成模態。在製程方面，以電子束微影技術磷化銦基板上定義出結構，使用掀離製程做出金超穎介面，並使用掃描式電子顯微鏡去確認元件的結構，接著將元件轉移到可撓性基板上。元件完成後，通過消光光譜分別量測概念演示元件與實際拉伸的元件，以進一步證明了此可撓性超穎介面元件具有在可見光區域中調變穿透光旋度並切換左右旋特性的能力。這樣的元件在未來可以進一步應用於化學和生化感測、藥物分析與製作具備旋性的光源。

The metasurfaces are refers to the metamaterials with sub-wavelength thickness, which are artificial structure produce electromagnetic phenomena not normally found in nature. When an un-polarized light pass through two asymmetry metasurface, it will produce a corresponding left-handed or right-handed circular polarization. And these two asymmetry metasurface are enantiomer to each other. In this thesis, we combine two enantiomer dimers to form a symmetrical metasurface, and then control the circular dichroism by breaking symmetric with stretch. The original designed metasurface will not cause circular dichroism when non-polarized light normal incident the device. However, when the flexible substrates sustain a strain, the relative position of the gold nanorods will change, leads to symmetry breaking and the metasurface will generate a relative circular dichroism. This is because when one of enantiomer dimer is decoupled, the circular dichroism spectra will dominate by another. Moreover, since the symmetry has been broken, the relative circular dichroism is generated.
In this work, the flexible metasurfaces was fabricated by using e-beam lithography, electron beam evaporation and PDMS bonding process. Its ability of tuning and switching circular dichroism in near Infrared and visible light region has been proved by Proof-of-Concept and further demonstrated in real device. Furthermore, the elements of STNR are also investigated by extinction spectra. This work can further use in several applications in the future, such as chemical and biochemical sensing, drug analysis, chiral light source.

Chapter 1 Introduction 1
1-1 Introduction to Circular Polarized Light 1
1-2 Manipulating Circular Polarized Light with Plasmonic Metasurface 4
1-2.1 Background of Localize Surface Plasmon 5
1-2.2 Tuning Optical Chirality with Plasmonic Chiral Metasurface 10
1-3 Optical Properties Tuning by Flexible Substrate 12
1-4 Motivation and Overview of Thesis 16
Chapter 2 Experiment Instrument & Method 18
2-1 Introduction to Fabrication Equipment and Materials 18
2-1.1 Scanning Electron Microscope 18
2-1.2 Electron Beam Evaporation System 22
2-1.3 Polydimethylsiloxane (PDMS) 25
2-2 Fabrication Steps for Flexible Chiral Metasurface 26
2-3 Transmission Measurement System 29
Chapter 3 Design of Circular Dichroism Tunable Chiral Metasurface 33
3-1 Design of Chiral Metasurfaces 33
3-2 Origin of Circular Dichroism on Chiral Metasurface 38
3-2.1 Single Nanorod 38
3-2.2 Dimer Nanorods 40
3-2.3 Shift Trimer Nanorods (STNR) 52
3-2.4 Breaking Symmetry of Metasurface 55
3-3 Summary 57
Chapter 4 Demonstration of in-situ Circular Dichroism Tunable Chiral Metasurface 58
4-1 Proof-of-Concept for the Circular Dichroism Tunable Chiral Metasurface 58
4-2 In-situ Manipulating Circular Dichroism by Stretching 65
4-3 Investigating the Metasurfaces Chiral Resonance under Stretching 71
4-4 Repeatability Test 76
4-5 Summary 78
Chapter 5 Conclusion and future works 79
5-1 Summary 79
5-2 Future work 81

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