臺灣博碩士論文加值系統

隨著科技的進展，元件的尺寸越做越小，因此所需要的材料尺寸也隨之縮小。隨著尺寸的縮小，許多能夠在巨觀下製作的材料並無法直觀地在奈米尺度下製作出來。而奈米螺旋碳管的出現，突破了許多在製作奈米元件上技術中的限制。然而在應用上，我們則必須能夠預先瞭解到材料的性質。
本文是利用在奈米科技中一項重要的工具－原子力顯微鏡並配合奈米操控儀，來對此一新穎的奈米材料做機械性質的量測。
本實驗使用鐵、錫二元催化劑並配合化學氣相沈積法成長奈米螺旋碳管。之後利用微影製程於二氧化矽試片表面製作出金電極，電極間距10微米，再使用電泳法將奈米螺旋碳管整齊排列於兩電極之間。完成之後，藉由金球粒化的特性將螺旋碳管部分包裹住而固定於試片表面。接著便使用奈米操控儀對螺旋碳管進行操控。最後經由分析實驗中探針所受側向力與位置的變化，計算出螺旋碳管的彈簧常數。再利用掃瞄式電子顯微鏡量測螺旋碳管的特徵尺寸後，便可以再計算出螺旋碳管的剪力模數。
經過實驗後，計算出奈米螺旋碳管的剪力模數約在2.0~2.6 GPa。並發現螺旋碳管與二氧化矽表面的動摩擦力小於螺旋碳管本身的彈力。

In this paper, we researched on the carbon nanocoil’s mechanical property by AFM
nanomanipulator. The nanocoil were fabricated by CVD with Fe-Sn as catalyst. The
Au electrodes were fabricated on SiO2 by photolithography. The gap between
electrodes is around 10μm. Then the nanocoils were aligned by electrophoresis. By
Au clustering, the nanocoil were fixed on the surface of wafer. As the sample
completed, the coil were imaged and manipulated by AFM manipulator. During the
experiment, the difference of lateral force can be recorded. By analyzing the change
of lateral force, the spring const of nanocoil can be realized. The coil diameter and
line diameter were determined by SEM. With spring const, coil diameter, and line
diameter, the shear modulus of nanocoil can be calculated. After calculation, the shear
modulus of the nanocoil is 2.0~2.6 GPa. During the experiment, we realized the
friction between nanocoil and SiO2 surface during moving smaller then the tension of
nanocoil.

致謝 i
摘要 ii
Abstract iii
第1 章 諸論 ...............................................1
1.1 前言 ..................................................1
1.2 研究動機與目標.........................................2
第2 章 文獻回顧............................................3
2.1 螺旋碳管的製備方式.....................................3
2.1.1 使用鐵鉻錳鉬鎳為催化劑製備螺旋碳管...................3
2.1.2 使用鐵銦錫為催化劑製備螺旋碳管.......................5
2.2 螺旋碳管的機械性質量測.................................6
2.3 以原子力顯微鏡進行性質檢測.............................9
2.3.1 利用原子力顯微鏡進行壓痕試驗.........................9
2.3.2 利用側向力變化量測機械性質..........................10
2.4 其他方面的性質檢測....................................17
2.5 螺旋碳管的機電特性....................................19
第3 章 實驗材料、設備及架構...............................21
3.1 實驗材料..............................................21
3.1.1 奈米螺旋碳管的製備..................................21
3.1.2 奈米螺旋碳管溶液的製備..............................25
3.1.3 實驗試片的製作......................................27
3.2 實驗設備..............................................28
3.2.1 TopoMetrix Explorer, AFM............................28
3.2.2 3rdTech NanomanipulatorTM DP-100....................30
3.2.3 儀器組成架構........................................32
3.2.4 JEOL JSM-6390, SEM..................................33
3.3 實驗架構..............................................35
3.3.2 固定奈米螺旋碳管於試片表面..........................36
3.3.3 利用AFM 尋找目標並利用探針操控之....................39
3.3.4 將探針變形量轉換成力量的改變量......................40
3.3.5 計算力改變量與螺旋碳管變形量的關係得出機械性質......42
第4 章 實驗結果與討論.....................................43
4.1 實驗結果..............................................43
4.1.1 實驗一..............................................43
4.1.2 實驗二..............................................46
4.1.3 實驗三..............................................49
4.1.4 實驗四..............................................52
4.1.5 實驗五..............................................55
4.2 實驗結果分析..........................................58
4.2.1 實驗一分析..........................................62
4.2.2 實驗二分析..........................................65
4.2.3 實驗三分析..........................................67
4.2.4 實驗四分析..........................................69
4.2.5 實驗五分析..........................................71
4.3 實驗結論..............................................73
第5 章 結論與未來展望.....................................74
5.1 結論..................................................74
5.2 未來展望..............................................75
參考文獻 .................................................76

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