臺灣博碩士論文加值系統

本研究探討利用超臨界瞬間膨脹法(rapid expansion of supercritical solution, RESS)於有機發光二極體(organic light emitting diode, OLED)材料Alq3(tri 8-hydroxyquinoline aluminum)的成膜機制。主要利用超臨界CO2 (SCCO2)從高壓降至常壓的過程中瞬間揮發的特色，造成溶質瞬間以過飽和析出，其產生的粒子高速撞擊基材表面而成膜。SCCO2 於30.6 MPa、35 ℃下擁有較佳的溶解度，可析出較小粒子而得到粗糙度15.8 nm的薄膜；接著利用電漿清洗以及基板加溫來改善粒子的附著性，降低薄膜粗糙度至6 nm。此外，輔以適當的共溶劑Ethyl alcohol(mass of Alq3/mass of Ethyl alcohol=30)增加SCCO2對Alq3的溶解量，因此只需要原先60％的SCCO2使用量就可以得到相同70 nm厚度的Alq3薄膜，並且使薄膜表面結構產生再聚集而降低粗糙度達3.2 nm。對OLED元件的電性量測，以蒸鍍方式加入NPB及LiF增加電子、電洞的躍遷，得到的OLED元件(ITO/ NPB (35 nm)/Alq3(70 nm)/LiF(0.5 nm)/Al(100 nm))，電壓6V下產生了啟動電壓，並在10V下擁有300 mA/cm2的電流密度，達到了OLED元件的需求。

This research investigated the film deposition mechanism of organic material Alq3 through rapid expansion of supercritical solution (RESS) to organic light emitting diode (OLED) application. The depressurization of supercritical carbon dioxide (SCCO2) into ambient environment produced a rapid supersaturated precipitation. The high speed particles imprinted the substrate and aggregated to form a membrane. It was found that SCCO2 at 30.6MPa and 35℃ has higher solubility to obtain finer particles and to form a thin film with 15.8 nm roughness. Employing plasma and heating substrate to improve adherence with Alq3, the thin film became smoother with 6 nm roughness. Moreover, with a suitable addition of co-solvent Ethyl alcohol (mass of Alq3/mass of Ethyl alcohol= 30) to increase the solubility of Alq3, it can save up to 40% of SCCO2 producing 70 nm thickness of Alq3 thin film compared to the original method. Besides, the surface structure of the produced thin film was re-agglomerated to reduce roughness to 3.2 nm. For the OLED electrical test, layers of NPB and LiF were generated by evaporator to improve the electron and hold transition ability. The OLED device (ITO/ NPB (35 nm)/Alq3 (70 nm)/LiF (0.5nm)/Al(100 nm)) has turn on voltage at 6V and 300 mA/cm2 current density at 10V, which have meet the requirements of the OLED device.

中文摘要………………………………………………………………………I
Abstract………………………………...……………………………………II
目錄….……………………………………………………………...……….. III
圖目錄…………………………………………...…………………...……...VI
表目錄………………………………………………………….…...………X

第一章 緒論..……..…………………………………………………...………..1
第二章 文獻回顧及分析介紹….....…...…………...…………………………3
2-1 OLED…..…..…..…..…..…..…............................………..….3
2-1-1 OLED結構及發光機制….…….……………………………..…...3
2-2光電有機薄膜的成長機制及製作…..…………...…………...……….6
2-2-1 利用超臨界流體製作有機層………………………………..…...9
2-3 RESS 歷史與應用.……...…………………………………………….14
2-4 RESS的成膜機制..…….………………………………………….18
2-5 RESS的操作條件..…….………………………………………….22
2-5-1 萃取槽之操作條件............…..……………………………..…...24
2-5-2 管件之操作條件..............…..…………………….………..…...27
2-5-3 噴嘴之操作條件..............…..…………………….………..…...28
2-5-4 膨脹槽之操作條件..........…..…………………….………..…...31
2-5-5 基材之操作條件..............…..…………………….………..…...32
2-6 研究動機與目的….......…….………………………………………….34

第三章 實驗設備及實驗程序…………………………..…………………...35
3-1實驗藥品…………………………………………………….………....35
3-2實驗儀器規格…………………………………………….……………35
3-3實驗流程………………………………….……………………….....37
3-3-1定義陽極……………………….…………..…………..……….38
3-3-2玻璃清洗……………………….…………..…………..……….38
3-3-3以RESS製作有機膜.……………………..…………..……….39
3-3-4定義陰極……………………….…………..…………..……….48
3-3-5量測…………………………….…………..…………..……….49

第四章 結果與討論….……………..…………………….………...............51
4-1 SCCO2對Alq3特性分析……..……..……………..……..…….…51
4-2薄膜成長機制的探討……………………..………………………….53
4-3薄膜形貌的探討…………………………..………………………….57
4-4萃取槽壓力溫度對薄膜的影響…………..………………………….61

4-4-1萃取槽壓力對薄膜的影響……………………………….…….61
4-4-2萃取槽溫度對薄膜的影響…...…………………………………68
4-5 增加萃取槽噴出量對薄膜的影響…….……………………………...72
4-6 利用基板加熱及電漿處理…….……..……………………………...77
4-7 萃取槽共溶劑對薄膜的影響….……..……………………………...82
4-8 綜合較佳條件下的薄膜…..….……....……………………………...88
4-9 實驗參數對薄膜電性的影響.….……....……………………………...90

第五章 結論與未來展望….......……………..………………………..…97
5-1結論..……………………………………………………...….………97
5-2 未來展望...…………………………………………….……..…..….…98

參考文獻…………………………………………………………….....……..100

附錄一…………………………………………………………….....……..…110
附錄二…………………………………………………………….....……..…114

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