臺灣博碩士論文加值系統

本研究研發高精度的多角度感測器，包括高解析度的角耦式雷射準直儀及自動視準儀，可以量測位移平台及導軌運動時之直線度、pitch、roll、yaw各項誤差，利用雷射擴束及飄移補償架構，可以減少二極體雷射啟動後因為溫度及壓力梯度的變化造成之雷射飄移，提升系統之穩定性，再應用數位濾波的理論使得訊號之跳動量下降並減少量測系統誤差。
工具機各軸移動時會有六自由度誤差，根據阿貝原理其中角度誤差會隨著不同偏位而放大，此阿貝誤差是造成工具機體積誤差之重要因素，將實驗室開發之角度感測器組合成三角度感測器量測工具機台運動中的各項誤差並進行回饋補償，動態補償工具機的阿貝誤差，以齊次轉換矩陣推導三軸工具機的體積誤差模型並和符合阿貝原理的體積誤差模型做比較，並實驗驗證符合阿貝原理的體積誤差模型能夠減少工具機的定位誤差，將定位精度提升80% 以上。另引入布萊恩原則，將導軌移動時直線度感測器之量測軸線無法和切削刀具運動軸線同軸，利用布萊恩原則導出布萊恩誤差，可以利用角度及偏位關係計算出空間中任何一點的直線度誤差。
利用體積誤差公式可以用來進行誤差預算分析並設計不同結構之工具機，誤差預算表以精度分配的觀點來拆解各軸自由度的容許誤差，利用體積誤差公式及誤差預算表作為機台組裝的參考，本研究對工研院之次微米工具機進行分析並提出各軸六自由度誤差所容許之範圍。
為達到目標之精度各移動軸需要減少移動時產生的角度及直線度誤差，而造成移動軸幾何誤差的來源除了導軌本身的製造誤差外裝配誤差也是重要之因素，兩滑軌不平行也會使得移動平台會有偏擺角、俯仰角及滾動角度誤差，當量測軸及運動軸的距離加大，此三項角度誤差會放大機台的誤差，本研究提供一個快速調整滑軌之方法，並以量測系統進行導軌各項誤差之檢測，可以大幅減少裝配誤差造成之六自由度誤差以達到設計目標之工具機精度。

This research develop high accuracy multiple degrees of freedom sensors, including high resolution laser straightness measurement system and autocollimator. The sensors can detect straightness, pitch, yaw, and roll errors of the linear guideways and linear stage. By using laser expander and drift compensated system, the laser drift caused by the temperature and pressure can be reduced. The application of the digital filter can decrease the noise of the signal and improve the stability of the systems.
According to the Abbe principle, the angular errors will be enlarged by the Abbe offset. The Abbe error is considered to be the major cause of volumetric error of machine tool. In the measurement system, we use the autocollimator and roll sensor to measure errors during the movement of machine tool and compensate the three angular errors immediately. Derive the volumetric error model of three-axis machine tool by homogeneous transformation matrix and compare to the volumetric error model which follow the Abbe principle. Experiment shows that the volumetric error model we proposed can significantly improve the accuracy of machine tool. Furthermore we apply the Bryan principle, the measurement axis of the straightness sensor and cutting axis cannot be coaxial. By using angular errors and Bryan offset, we can calculate the straightness error at any point in the space.
Using the model we proposed to analyze and set up the error budget of a particular precision machine tool developed by the Industrial Technology Research Institute (ITRI). By using the error budget method, we can find the most cost-effective way to allocate the limit value of each geometric error of 3-axis as the guideline of installation in order to control the total volumetric errors of the machine tool.
In order to achieve the target accuracy, the geometric errors of the linear stage must be decreased. The assembly error will affect the accuracy of linear guideway. The parallelism of two linear guideway will cause the pitch, yaw, and roll error. This research provides the method to adjust the linear guideway which can significantly reduce errors of the stage and achieve the target accuracy.

摘要 II
Abstract IV
目錄 V
圖表目錄 VIII
第一章 緒論 1
1-1 研究目的及動機 1
1-2 文獻回顧 4
1-2-1 體積誤差推導 4
1-2-2 誤差預算表 7
1-2-3 量測系統 9
第二章 多自由度感測器 14
2-1 量測原理 14
2-1-1 四象限光感測器 14
2-1-2 自動視準儀原理 14
2-1-3 滾動度量測原理 15
2-2 高解析度角耦式雷射準直儀 16
2-2-1 系統架構 16
2-2-2 系統校正 17
2-3 滾動角度感測器 19
2-3-1 滾動角度感測器架構 19
2-3-2 裝配方法 20
2-3-3 去除角度誤差之裝配方法 22
2-4 雷射擴束減少雷射角度飄移誤差 28
2-4-1 長時間飄移實驗 30
2-5 自動視準儀及雷射角度飄移測量架構 31
2-5-1 飄移補償實驗 32
2-6 應用數位濾波理論降低系統隨機誤差 33
2-6-1 巴特沃斯濾波 33
2-6-2 濾波實驗 36
第三章 符合阿貝及布萊恩原則之體積誤差公式推導比較 37
3-1 前言 37
3-2 實驗架構 38
3-3 齊次轉換矩陣體積誤差公式 39
3-4 符合阿貝原理之體積誤差公式 44
3-4-1 各軸阿貝偏位 45
3-4-2 定位誤差阿貝偏位 46
3-4-3 直線度誤差布萊恩偏位 49
3-4-4 體積誤差公式 53
3-5 布萊恩誤差驗證實驗 54
3-5-1 X軸移動時Y方向直線度誤差 54
3-5-2 X軸移動時Z方向直線度誤差 61
3-6 齊次轉換矩陣及體積誤差公式之比較 65
3-6-1 齊次轉換矩陣定位誤差 65
3-6-2 體積誤差模型定位誤差 66
3-7 定位誤差驗證及比較 67
3-7-1 工具機X軸 67
3-7-2 工具機Y軸 70
3-7-3 工具機Z軸 75
第四章 誤差預算表 76
4-1 原理介紹 76
4-2 體積誤差公式推導 77
4-3 程式設計 81
4-3-1 定位誤差計算 81
4-3-2 體積誤差計算 82
4-4 小結 84
第五章 精密導軌精度提升方法 85
5-1 前言 85
5-2 直線度調校實驗設計 85
5-2-1 直線度調校方法步驟 87
5-3 平行度調校實驗設計 92
5-3-1 量測原理 92
5-3-2 平行度量測架設步驟 93
5-3-3 平行度驗證實驗 96
5-4 角度調校實驗設計 101
5-4-1 俯仰角度調校 101
5-4-2 偏擺角度調校 102
5-4-3 滾動角度調校 103
第六章 結論 104
參考文獻 105

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