臺灣博碩士論文加值系統

晶背研磨廢水中含有大量不易沉降且高穩定性之奈米級懸浮顆粒，因而造成濁度偏高及處理效果不彰。因此，研究微波作用所具有物化特性是否具有增進廢水混凝後沉澱及後續逆滲透處理後回收再利用之效能與潛力。
本研究以800W；2450MHz之微波作用，對晶背研磨廢水進行下列探討：(1)微波作用對廢水粒子特性之影響。(2)微波作用對化學混凝後沉澱之影響。(3)微波作用於逆滲透處理系統之影響。藉由不同微波作用的程序，評估各處理程序，是否具有正面效能之提升，並希望藉此能夠降低處理之負荷。
結果顯示，微波作用後水中之研磨粒子以SEM及 TEM 顯微影像觀察後可發現粒子群會隨著微波作用越久而鬆散，而使得較大的顆粒群( 10 μm ~ 20 μm )，因微波作用而鬆散為較小的顆粒群( 2 μm ~ 5 μm )；而其溫度及導電度會隨微波時間越長及其作用水樣體積越小而呈線性的上升。而其濁度、pH之變化較不明顯，而表面張力下降約10.0％ ~ 16.5％ 之間。
於微波作用於混凝後沉澱之影響，以水樣體積500mL；微波作用時間為(0 ~ 60 sec；以10 sec為間隔)，最後於不同沉降時間(0 ~ 120 min)，取其上澄液作分析。結果發現微波作用後，可形成較大的膠羽，增進沉降效率並縮短沉降時間，且以微波作用20sec之效果最為佳，估計可縮短沉降時間約6倍。但微波作用時間超過40sec其沉降效能反而變差，因此若控制微波作用時間於20 ~ 30 sec，溫度約在30 ~ 40 ℃，方可有效增進混凝後沉澱之效能。
微波作用於逆滲透處理系統的研究方面，以不同微波作用時間(0~721sec；以103sec為間隔)，於40NTU、5L的晶背研磨廢水，再通入逆滲透處理系統。可發現微波作用後之水樣，於過濾後的熱能損耗較小，且其濾速可由原先的2.25 ml/sec增加至微波作用後的4.61 ml/sec。回收率方面，亦可由原先的28％增加至微波作用後的48％。並保有對逆滲透後滲透液的品質。

Backslide grinder wastewater, in which a large amount of high stability nano-particles were difficult to precipitate, had its high turbidity and was not treated effectively. Therefore, this present study aimed to investigate the effect of microwave heating on wastewater coagulation and the follow-up treatment of reverse osmosis (for reuse).
In this study, microwave heating (800W;2450MHz) was employed to investigate: (1) the effect of microwave heating on particle characteristics of wastewater, (2) the effect of microwave heating on coagulation , and (3) the effect of microwave heating on treatment of reverse osmosis for reuse. Besides, different processes were used to evaluate their improvement of positive effectiveness and were hoped to reduce the load of treatment.
The results had shown that observed with SEM and TEM, large size particles (10-20μm) became loose along with the longer heating time; as for small size ones (2-5μm), their temperature and conductivity arose linearly along with the longer time of treatment and the smaller water sample volume. Besides, the change of turbidity and pH value was not apparent, and the surface energy dropped nearly between 10.0% and 16.5%.
In terms of coagulation, this experiment was conducted with 500mL of water sample volume and 0 ~ 60 seconds of microwave heating, and finally its supernatant liquor was analyzed at different time point (0 ~ 120 min )of precipitation. The result showed that floc aggregates aggrandized by the treatment of microwave heating; the effectiveness of precipitation increased and the time of precipitation decreased. At best, the time of precipitation was estimated to be as short as six times primarily with 20 seconds of microwave heating; however, the efficiency of precipitation decreased with more than 40 seconds. Thus, it was suggested that the time of microwave heating was controlled between 20 and 30 seconds and the temperature of sample water between 30 and 40 ℃.
In terms of treatment of reverse osmosis, this experiment was conducted with 40NTU, 500mL of sample water at different time point (0~721 sec) of microwave heating, and the water was drew into RO directly to be treated. It was found that its heat energy loss was less, and its rate of filtering increased from 2.25ml/sec to 4.61 ml/sec. In addition, the recovery of efficiency also increased from 28% at first to 48%, and maintained its quality.

目錄
摘 要 I
ABSTRACT III
誌 謝 V
第一章 緒論 1
1.1 研究緣起及背景 1
1.2 研究目的 3
1.3 研究架構與流程 4
第二章 理論基礎與文獻回顧 6
2.1微波(電磁)原理及技術應用 6
2.1.1微波(電磁)原理 7
2.1.1.1微波(電磁)作用對水之影響及探討 9
2.1.1.2 微波加熱法與一般傳統加熱法之比較 11
2.1.1.3 微波作用與物質介電因數之關係 12
2.1.1.4 微波所具有的物理特性 15
2.1.2微波加熱於工業應用的特點 18
2.1.3微波技術於環境工程上的應用 19
2.2 晶背研磨原理及特性分析 23
2.2.1 晶背研磨原理及設備流程 23
2.2.2 晶背研磨特性組成分析 26
2.3 化學混凝處理技術之發展 31
2.3.1 混凝理論 31
2.4 逆滲透過濾原理及應用 39
2.4.1薄膜種類及處理技術 39
2.4.2逆滲透原理及技術 43
2.4.3影響逆滲透過濾之參數 49
第三章 研究設備及方法 51
3.1 實驗處理對象及廢水來源 51
3.1.1採樣流程及內容 52
3.2 實驗設備及儀器 53
3.3 模廠實驗方法及流程 62
3.3.1 研究方法與方向 62
3.3.2 模場處理程序及操作條件 65
3.3.3 杯瓶試驗 67
第四章 結果與討論 73
4.1 晶背研磨廢水水質特性及分析 73
4.1.2 微粒性質分析 78
4.2 微波作用對晶背研磨廢水特性之影響 84
4.2.1微波作用對廢液pH、溫度、濁度之影響 85
4.2.2 微波作用對廢液導電度、表面張力之影響 88
4.3 微波作用對晶背研磨廢水混凝後沉澱效能之影響 92
4.3.1微波對混凝後沉澱濁度之影響 92
4.3.2微波作用對混凝後沉澱時間之影響 94
4.3.3微波作用對混凝後沉澱溫度之影響 100
4.3.4微波作用對混凝後沉澱膠羽大小之影響 101
4.3.5微波作用對混凝後沉澱pH、導電度與表面張力之影響 102
4.4 微波作用對廢水經RO處理效能之評估 105
4.4.1實驗水樣體積以及加熱時間參數之選定 106
4.4.2微波作用對廢水過濾後溫度續含能力之影響評估 108
4.4.3微波作用對廢水過濾濾速之影響評估 113
4.4.4微波作用對廢水經RO處理回收率之影響評估 117
4.4.5微波作用對廢水過濾後pH之影響評估 119
4.4.6微波作用對廢水過濾後導電度之影響評估 121
4.4.7微波作用對廢水過濾後濁度之影響評估 127
第五章 結論與建議 136
5.1結論 136
5.2建議 139

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