臺灣博碩士論文加值系統

本論文利用撓性結構模態正交性的特性，透過模態電極形狀之設計，具體實現靜電式模態驅動器的設計理念，製作出可控制特定模態之靜電式模態驅動器。以往有關靜電式驅動元件的設計，均採用全覆蓋型電極的設計，操作電壓過高，且與CMOS電路元件不相容。靜電式模態驅動器將可改善系統的穩定性與降低操作電壓。根據模態的正交特性得知，針對不同的模態設計適當電極形狀，可製作出特定模態之靜電式模態驅動器。在製程方面，以曝光、顯影及濺鍍製做電極形狀，用蝕刻製作模態驅動器之結構，及其它微機電製程技術完成模態驅動器的製作。在實驗方面，以全像式顯微雷射干涉儀量測模態驅動器的自然頻率及所對應的模態，並以不同的輸入電壓量測，比較不同電極間距之模態形電極模態驅動器在不同頻率下之動態響應，以驗證結果與設計理念是否相符。

A novel electrostatic micro modal actuator adopted the orthogonality of the mode shape of the microstructure is created. By using the design of the shape of the modal electrode, the stability of the actuator can be improved and the driving voltage can be reduced by controlling the actuated modes precisely. In the analysis in this investigation, the equations of motion considering the effect of the coupling between the flexibility and the electrostatic field of the micro actuator are developed. The modal equations derived by the modal expansion indicate that distributed electrostatic modal actuators can be realized through the constructed correctly modal electrodes and the specific excited mode. The developed electrostatic modal actuator can reduce the driven voltage and eliminate the spillover phenomenon. Since, the stiffness, the dynamic properties, and the stability of the system can be affected by the changes of the electric field, the effect of the electrostatic field and the shape of the electrode on the actuator are also investigated. The experimental modifications of the modes caused by different shapes of the actuators are examined by using the time-average holographic micro-scope laser interferometer. The analytical model considering the coupling effect between the structure and electrostatic field can be established in the form of the linear periodically time-varying function and the relationship between the full field mode and the driven voltage can be obtained.

誌謝 I
摘要 II
Abstract III
目錄 IV
表錄 VI
圖錄 VII
第一章 緒論 1
1-1 前言 1
1-2 研究背景與目的 2
1-3靜電式微驅動器 4
1-4 文獻回顧 7
第二章 相關理論介紹 12
2-1 全像干涉術 12
2-1.1 時間平均法 14
2-1.2 相移原理 18
2-2 模態驅動器設計原理 21
第三章 模態驅動器製作 26
3-1 前置程序 26
3-2 上電極製程 29
3-2.1第一道程序 29
3-2.2 第二道程序 38
3-2.3 第三道程序 43
3-3 下電極製程 48
第四章 模態驅動器實驗分析 52
4-1 實驗設備介紹 52
4-2 實驗步驟 57
4-3 全覆蓋形電極靜電式驅動器實驗結果 67
4-4 模態形電極靜電式驅動器實驗結果 77
4-5 模態形電極模態驅動器實驗結果比較 87
第五章 結論與未來展望 90
參考文獻 92

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