臺灣博碩士論文加值系統

本研究中主要利用脈衝雷射沉積法將Ag5Pb2O6合成一純相的薄膜，並控制其合成參數調整薄膜的結構與組成，在單晶石英基板上可合成一具有優選面取向的純相Ag5Pb2O6薄膜，且藉由調變靶材內化合物比例，成功合成出铋取代鉛以及銅取代銀的銀鉛氧化物薄膜。
生成之薄膜可利用電化學方法進行電子的摻雜，並將摻雜後的薄膜進行電阻與溫度關係的量測。另可將Ag5Pb2O6薄膜結合固態電解質薄膜製成一新穎全固態薄膜電池。

In this research we adapted pulsed laser deposition technique for the synthesis of pure phase Ag5Pb2O6 thin film. The structure and the composition of the film was tailored using various experimental conditions. To acquire the preferred orientation, the film was grown on the Z-cut quartz substrate. Further the target composition was modulated by replacing bismuth and silver with lead and copper respectively and successfully synthesized.
Electron doping was carried out using electrochemical methods and the resistivity of the film was measured against the temperature. The Ag5Pb2O6 thin film was used as cathode in the battery technology to obtain a novel solid-state thin film battery.

摘要 i
Abstract ii
目錄 iii
圖目錄 v
表目錄 viii
第一章 緒論 1
第一節 研究動機 1
第二節 Ag5Pb2O6銀鉛氧化合物 2
第三節 薄膜電極 (Thin film electrode) 5
第四節 薄膜電池 (Thin film battery) 7
第五節 固態電解質 (Solid electrolyte) 10
第六節 薄膜製程 (Thin film growth) 13
第二章 藥品暨儀器 17
第一節 藥品 17
第二節 儀器及原理 18
第三章 實驗 27
第一節 實驗流程 27
第二節 Ag5Pb2O6靶材前趨物製備 28
第三節 靶材製備 29
第四節 基板製備 30
第五節 薄膜製備 33
第四章 結果與討論 34
第一節 靶材分析與鑑定 34
第二節 薄膜合成與分析 36
第三節 APO薄膜合成與鑑定—溫度參數 40
第四節 APO薄膜合成與鑑定—基板參數 43
第五節 APO薄膜合成與鑑定—能量功率 47
第六節 APO薄膜合成與鑑定—頻率參數 49
第七節 APO薄膜合成與鑑定—光徑參數 53
第八節 APO薄膜合成與鑑定—最佳化參數合成 55
第九節 參雜與取代 62
第十節 全固態電池 70
第五章 結論 81
第六章 參考文獻 82

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